What process environment requirements need to be collected for the air-conditioning box of semiconductor clean factory?

Semiconductor clean factory air conditioning box requirements should be collected from the process environment matrix, including temperature and humidity, particle and molecular pollution control, space zoning, operation continuity and interface conditions. You cannot give a unified cleanliness level or unit configuration based on the words 'semiconductor workshop'.

Fill out the requirements by process area instead of plant name

The environmental tasks in areas such as photolithography, cleaning, inspection and equipment maintenance may be different, and sensitive objects and control values ​​should be confirmed by the process party. Then distinguish the background environment of the factory building, the local micro-environment and the internal conditions of the equipment to determine which tasks belong to the air-conditioning box and which tasks are undertaken by the terminal or the equipment itself, so as to avoid repeated purchases or leaving control gaps.

The environmental matrix should write down the regional targets, measurement points and applicable production status; the pollution data should write down the sources and limits of particles and target gaseous pollutants; the operation interface should write down the shifts, backup strategies, energy supply conditions and control connections. The three types of information correspond to different majors and cannot be summarized by just one room parameter table. How the fresh air tasks of the clean room MAU correspond to the process exhaust air, please refer toHow does the fresh air task of the clean room MAU correspond to the process exhaust?。

Temperature and humidity requirements must be written to the measuring point and allowable fluctuations

Semiconductor processes usually have clear requirements for temperature and humidity, but the control targets, measuring point locations, and allowable fluctuations may be different in different areas. When collecting, the background temperature and humidity of the factory building, the temperature and humidity of local areas and the internal conditions of the equipment should be distinguished, and the location of the measuring points, evaluation period and allowable deviations should be noted. Only writing a temperature range and humidity range makes it impossible to determine how the unit should be configured.

For the control target composition of the constant temperature and humidity project, please refer toWhat control objectives should be clarified when selecting a constant temperature and humidity air conditioning box? . How to write the allowed fluctuation into the technical requirements, please refer toHow should the allowable fluctuations of constant temperature and humidity units be written into the technical requirements? . For the difference between air supply accuracy and room accuracy, please refer toWhat is the difference between air supply accuracy of air conditioning box and room control accuracy?。

Particulate and molecular contamination are collected separately

Particle control requirements are usually expressed in terms of cleanliness level, particle size and measuring points; molecular pollution control requirements are expressed in terms of target gases, concentration limits and detection methods. The two types of requirements correspond to different filtering configurations and cannot replace each other. Common molecular contaminants in semiconductor projects include acidic gases, alkaline gases, organic components and specific doping substances, which should be listed separately by process area.

For the difference between particle and gas processing, please refer toWhat do the chemical filter and particle filter of the air conditioning box deal with respectively? . For the sensitivity of photolithography area to alkaline gas, please refer toHow should the filtration target be determined when the photoresist is sensitive to alkaline gases? . Terminal particle filtration can be combined withHEPA/ULPA filter confirmation, chemical filtration can be viewedChemical filter solutions.

Spatial partitioning and operational continuity impact system architecture

Semiconductor factories usually have large areas and many zones, and different areas may have different production shifts and cleaning requirements. When collecting, the service boundaries, return air paths, exhaust relationships, and pressure difference requirements for adjacent areas of each area should be clarified. How to provide air supply in different zones in a large-area workshop? Please refer toHow does the panel display air-conditioning box in the workshop deal with large-area air supply zones?。

In terms of operational continuity, it is necessary to understand the operating requirements under normal production, shutdown and maintenance, maintenance and abnormal conditions, as well as backup strategies. Semiconductor production has high requirements for continuous operation. The backup arrangements for units and key components should be explained at the demand stage instead of considering it after the equipment arrives on site.

Interface conditions and device-side requirements must be collected together

The interface relationship between the air conditioning box and FFU, EFU, dry coil, chemical filtration section and terminal high-efficiency filter should be explained in the demand stage. The micro-environment at the equipment end may have independent temperature, humidity and cleanliness requirements, which cannot all be borne by the air-conditioning box in the factory. Water, electricity, steam, control interfaces and maintenance access should also be collected together.

For equipment-side filtering packages, please refer toHow does EFEM air inlet chemical filtration correspond to equipment cleanliness requirements? andWhat field data is needed for chemical filtration of the air inlet of lithography equipment? . Clean air supply package can be combinedFFU fan filter unit andthe fan filter unit at the EFU equipment end .Check

From demand matrix to unit technical conditions

Correspond each demand to air volume, processing status, filtration division and deliverable data, and then confirm the relationship between each unit through system design. Without project evidence, other factory parameters should not be regarded as universal standards, nor can the improvement in production line yield be inferred based on unit configuration alone.

The air volume, pressure, temperature and humidity, and pollution control requirements in the demand matrix will eventually be converted into functional segment configurations and fan operating points. The order of function segments can be referred toOn what basis should the sequence of functional sections of the air conditioning box be determined? , the pressure caliber can be referred toWhat is the difference between static pressure, total pressure and static pressure outside the air conditioner box?。

Aili industrial supporting equipment

Aili Industrial can participate in parameter verification around air-conditioning boxes, FFU, EFU and filtration packages; bringing the regional environment matrix when communicating will help connect centralized processing with equipment-side needs. Aili's industrial manufacturing end covers independent research and development and production of motors and fans, control systems, sheet metal, air filters and complete machine assembly. Air conditioning boxes, FFU, EFU and filtration products can be checked in the same package for interfaces and operating conditions; non-standard structures can be adjusted according to factory zoning and transportation conditions.

Product form can be viewedAir handling unit andFan box page; clean air supply package can be combinedFFU fan filter unit andEFU equipment end fan filter unit verification; terminal particle filtration can be combinedHEPA/ULPA filter confirmation; when it comes to gaseous pollution control, you can communicate separatelyChemical filter solutions. Specific environmental requirements, filtration effects and delivery scope still need to be verified based on corresponding configuration data and on-site working conditions. Actual results are subject to on-site leak detection, particle testing and gas detection results.

Submit project parameters:https://ailigy.com/contactus.html

Related questions and answers

Can you complete the selection of semiconductor air-conditioning boxes by only writing the cleanliness level and temperature and humidity?
not enough. Molecular pollution targets, spatial partitions, operational continuity, exhaust relationships and equipment-side interface conditions are also required, otherwise the configuration is easy to miss.

Can the requirements for molecular contamination of semiconductor factories be uniformly specified?
It is not appropriate to provide uniform regulations. The ingredients and limits of concern in different process areas are different and should be collected and checked separately by area.

Can Aili Industrial help sort out the environmental requirements of semiconductor projects?
The air conditioning box, FFU, EFU and filtration matching can be checked based on the regional environment matrix. The specific configuration needs to be confirmed based on the project process conditions and on-site data.

Related articles

1. How does the fresh air task of the clean room MAU correspond to the process exhaust?

2. How should the filtration target be determined when the photoresist is sensitive to alkaline gases?

3. How does EFEM air inlet chemical filtration correspond to equipment cleanliness requirements?

4. What control objectives should be clarified when selecting a constant temperature and humidity air conditioning box?

Key points for selection and acceptance inspection