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Aili Industrial EFU (Equipment Fan Filter Unit) is a key air purification component specially developed for high-end precision manufacturing equipment such as semiconductors, flat panel displays, and lithium batteries. It is directly built into the equipment machine or installed close to the equipment. It is responsible for providing ISO Class5-1 (UDF) high-cleanliness vertical one-way flow protection for the core process surface, effectively eliminating particulate matter generated during equipment operation and suppressing the impact of gaseous molecular pollutants (AMC), while maintaining a stable temperature and humidity microenvironment in the process area. EFU is the core functional unit that directly determines equipment operation stability, process repeatability and final product yield.
FFU (Fan Filter Unit) : Installed on the ceiling of a clean room to serve the entire factory environment, such as a Class 1,000 clean room. One-way flow covers a large space. Typical applications are wafer manufacturing plants and biopharmaceutical workshops.
EFU (Equipment Fan Filter Unit) : Integrated inside the equipment machine or close to the equipment to ensure an ultra-clean environment inside the equipment (ISO Level 1). It needs to overcome high resistance inside the equipment. Typical applications are inside the lithography machine, packaging equipment, and panel Array segments.
Aili Industry has nearly two decades of technological accumulation, and its core competitiveness is rooted in the 'independent supply of the entire industry chain' system. It does not rely on the assembly of outsourced components, but independently masters three core links:
Self-produced motors: Customized and optimized motor winding parameters, impeller structure and heat dissipation design for different EFU sizes and equipment back pressure conditions, providing high-efficiency EC, DC, AC and other motor selections to meet 7×24 hours of continuous operation.
Self-produced filters: The cutting and molding of filter materials are completed in our own factory, which can be adapted to HEPA H13/H14 to ULPA U15/U16 grades, and supports special materials such as PTFE boron-free filter media.
Self-developed control system: supports RS485, Modbus, PLC, I/O and other protocols, can be seamlessly connected to equipment main control or factory affairs system, and achieves 0.35-2m/s stepless speed regulation, remote monitoring and group control linkage.
The direct value brought by self-production of the entire chain: the motor output characteristics and filter resistance characteristics can be accurately calibrated and dynamically matched before leaving the factory. Higher external static pressure, more uniform surface wind speed distribution and longer filter life can be obtained under the same energy consumption, and performance fluctuations caused by batch differences in purchased components can be avoided.
Aili Industrial regards 'non-standard customization' as its core service rather than as an additional option. Custom dimensions include:
Structural dimensions : non-standard length and width (minimum 300×180mm to maximum 1500×1500mm), standard thickness and 70mm ultra-thin type available.
Box material : lightweight aluminum alloy, SUS304 stainless steel, 316 stainless steel, aluminum-zinc plate, spray-coated steel plate, optional anti-static coating.
Filter grade : HEPA H13/H14, ULPA U15/U16, optional PTFE boron-free filter material (reduces boron pollution and AMC risks).
Air inlet and outlet and installation : Customized side air inlet/side air outlet structure, multiple installation methods such as embedded, side-mounted, top-mounted, and bottom-mounted.
Special working conditions : explosion-proof, high temperature resistance, corrosion resistance and other requirements can be adapted.
Control mode : potentiometer, 0-10V, MODBUS, wireless monitoring and other flexible options.
Aili Industry provides a complete customized service chain from demand docking, project selection, sample trial production to batch delivery.
EFU is widely used in core process links that require higher cleanliness:
Semiconductor : core machines for photolithography, etching, diffusion, etc. for 8-inch/12-inch wafer manufacturing.
Flat panel display (FPD) : Array, color film, box, module assembly.
Lithium battery : pole piece coating, rolling, slitting and other equipment.
Precision manufacturing : EFEM, Load Port, wafer sorter.
FFU (factory side) : installed on the ceiling of the clean room | Maintaining a large clean room environment (such as Class 1,000) | One-way flow covers a large space | Wafer manufacturing plant, biopharmaceutical workshop
EFU (Equipment side) : Integrated inside the equipment machine | Guaranteeing an ultra-clean environment inside the equipment (ISO level 1) | High static pressure overcomes internal resistance of the equipment | Inside the lithography machine, packaging equipment, panel Array segment
Aili Industrial realizes independent production of the entire chain from fans, filters to automatic control systems, instead of relying on external procurement and assembly. From the winding of fan motors, cutting of filter materials to the welding of automatic control system circuit boards, everything is completed in its own production base.
Controllable quality: All aspects are integrated into the in-house quality control system to avoid performance fluctuations caused by batch differences in purchased parts | - Deep collaboration: Fan air volume and filter resistance can be matched in real time to improve the operating efficiency of the entire machine
Quick response: The customization cycle is 30%-50% shorter than the outsourcing model | - After-sales guarantee: Self-produced core components are replaced to avoid equipment downtime caused by outsourcing shortages
One of the biggest technical highlights of Aili Industrial in EFU production is its own motor production capacity. Compared with simply using outsourced fans, self-produced motors bring multiple advantages:
Deep performance matching: optimized motor parameters and impeller structure for different sizes of EFU | - Multiple motor selections: high-efficiency EC motors, DC motors, and AC motors are flexibly optional
Controllable reliability: from windings, bearings to aging tests, customized according to project conditions | - 7×24 hours long-term operation: reducing equipment maintenance costs
Aili Industrial EFU supports deep integration with the equipment main control system:
Communication protocol: RS485, Modbus, PLC, I/O | - Control method: stand-alone control, centralized control, remote monitoring, networked control
Intelligent linkage: linkage and group control with the main control system of the cleaning equipment | - Precise adjustment: 0.35-0.9m/s stepless adjustment of wind speed
Aili Industry emphasizes the 'requirements for fully embedded equipment' - EFU is not an independent module, but a part of the equipment system: the size, interface, maintenance space, and wiring method all need to be highly matched with the entire machine.
Size customization: supports non-standard customization of any length and width, minimum 300×300mm, maximum 1500×1500mm | - Thickness customization: standard thickness and 70mm ultra-thin optional
Material customization: lightweight aluminum alloy, SUS304 stainless steel, 316 stainless steel, aluminum-zinc plate, spray-coated steel plate | - Surface treatment: anti-static coating optional
Filter customization: HEPA H13/H14, ULPA U15/U16 | - Special filter material: PTFE boron-free ultra-fine filter (to prevent AMC pollution)
Air inlet and outlet method: Side air inlet/side air outlet structure customization | - Installation method: embedded, side-mounted, top-mounted, bottom-mounted
Control method: potentiometer, 0-10V, MODBUS, wireless monitoring | - Special working conditions: explosion-proof, high temperature resistance, corrosion resistance
Cabinet thickness: standard thickness / 70mm ultra-thin type (excluding filter) | Cabinet material: aluminum alloy / SUS304 / 316 / aluminum-zinc plate
filter grade: HEPA H13/H14 / ULPA U15/U16 | Filtration efficiency: ≥99.995% for particles above 0.3μm
Air volume range: 200-3000 m³/h (higher can be customized) | Face wind speed: 0.3-2m/s Uniformly adjustable
motor type: High-efficiency EC brushless DC motor | Control interface: RS485 / Modbus / PLC / I/O
Noise control: ≤55dB | Cleanliness: up to ISO Class 1
Aili Industrial has factories in Suzhou and Guangde, forming a dual-base collaborative industrial layout. The Guangde production base covers an area of more than 30,000 square meters and is equipped with standardized production workshops and engineering technology R&D centers.
Each fan has undergone at least three performance tests | - Comprehensive performance testing and verification before leaving the factory
CE certified industrial grade purification equipment | - Products must pass rigorous long-term testing before mass production
No matter what space constraints, cleanliness requirements or control needs your equipment faces, Aili's team of industrial engineers can provide professional support.
Contact Aili Industrial immediately to obtain customized EFU solutions and detailed specifications for your equipment model.
