EFU – equipment fan filter unit
Clean air, designed for equipment
Aili Industrial EFU is a fan filter unit for semiconductor equipment, electronic manufacturing equipment, automation equipment and other local clean applications. Product configuration is carried out according to the equipment installation space, air volume, wind speed, filtration requirements and control methods, and standard EFU and equipment-specific customized solutions can be provided.
Ultra-thin EFU |Small size EFU |DC EFU |Equipment matching customization
What are the requirements for EFU for different devices?
EFU is mainly used for clean air filtration and air supply inside the equipment or in local areas. The internal space, process requirements and control methods of different equipment are different, so the EFU needs to be configured based on the installation size, air volume, wind speed, filtration requirements and equipment control methods.
Installation space is limited
The internal space of the equipment is usually limited by the mechanical structure, electrical components and process modules.
EFU requires structural design based on actual installation height, length and width.
Air volume and wind speed requirements are different
Different equipment and different processes have different requirements for clean air.
EFU can configure the power system according to the target air volume, wind speed and filter resistance.
Need to be linked with equipment
Some equipment requires EFU to be linked with the equipment control system.
Control methods such as start-stop, speed regulation, and communication can be configured according to project requirements.
Different cleaning requirements
According to the cleanliness requirements inside the equipment, EFU can be equipped with corresponding HEPA or ULPA filters.
| Selection items | What needs to be confirmed | Impact on EFU configuration |
| Device available space | Confirm the length, width, and height of the EFU installation location, as well as the space required for upper air inlet, lower air supply, cable layout, and peripheral components. When space is limited, provide internal dimensional drawings or three-dimensional structural drawings of the equipment. | Determine the overall dimensions, overall height, and arrangement of fans and filters of the EFU. Projects with limited space on top of the equipment can further evaluate ultra-thin EFUs or small size EFUs. |
| Installation opening | Confirm the length, width, hole position, load-bearing conditions, installation direction and sealing requirements of the reserved opening for the equipment; if there are equipment drawings, mark the location where the EFU is connected to the equipment. | Determine the cabinet structure, installation frame, fixing method and connection size. For the modification of existing equipment, the adaptation plan can be evaluated based on the actual opening. |
| Target air volume/wind speed | Explain the area that needs air supply, the effective air supply area, and the target air volume or target wind speed; if there are different operating states such as working and standby, also explain them together. | Determine the fan, motor, filter area and speed adjustment plan. The air volume and wind speed need to be determined comprehensively based on the filter resistance, the internal air duct of the equipment and the actual installation conditions. |
| filter level | Describe the target cleanliness requirements, the particulate matter or process environment of concern, and whether there are any specified HEPA, ULPA filter grades or filter media requirements. | Decide on filter type and configuration. The filter grade, size and operating resistance will affect the air volume, wind speed and structural design of the entire machine. |
| Power supply and control interface | Confirm the voltage, frequency, wiring method that the equipment can provide, and whether start/stop, speed adjustment, status feedback, fault alarm, or communication with the equipment control system is required. | Determine motor, controller, wiring and communication configurations. The specific interface and control logic should be confirmed together with the equipment electrical scheme. |
| Maintenance method | After confirming the EFU installation, from which direction personnel can access the equipment, whether filters and electrical components need to be replaced regularly, and the maintenance space that can be reserved around the equipment. | Determine the filter disassembly and assembly direction, maintenance structure and installation location to make subsequent maintenance compatible with the existing structure of the equipment. |
Aili Industrial EFU equipment-side fan filter unit EFU product series
According to different equipment structures and clean air requirements, Aili Industrial provides EFU products with different structures and configurations, which can be selected according to installation space, air volume, wind speed, filters and control methods.
How to choose different EFU products?
The equipment space, installation method and control requirements are different, and the suitable EFU structures are also different. The following product comparison can be used as a preliminary selection entry; the specific size, air volume, filtration configuration and interface are subject to the corresponding product and project confirmation plan.
| product type | Main applicable scenarios | Parameters to be confirmed first | Detailed entry |
| Regular EFU | The interior of the equipment or local process areas require independent filtering and air supply, and the installation space is sufficient. | Installation size, air supply area, target air volume or speed, and filtration level. | View regular EFU → |
| Ultra-thin EFU | Semiconductor equipment, equipment top mezzanine and other scenarios with limited installation height. Some products can achieve an overall height of 70 mm. | Available total height, air inlet space, installation opening, target air volume, filter configuration. | View ultra-thin EFU → |
| Small size EFU | The equipment has small openings, compact internal space, or only needs to cover a partial process area. | Opening length and width, available height, effective air supply range, and mounting hole locations. | View small size EFU → |
| DC EFU | Equipment that requires speed regulation, equipment linkage, or long-term energy consumption concerns. | Power supply conditions, target air volume, speed range, start and stop logic and control interface. | View DC EFU → |
| Snap-on EFU | The equipment structure is suitable for snap-on connections, or there are clear requirements for assembly and disassembly methods. | Butt structure, buckle position, installation tolerance, sealing method and maintenance space. | View snap-on EFU → |
| Anti-static EFU | Electronic manufacturing, semiconductor and other equipment areas that require static electricity control. | Static control objectives, equipment grounding conditions, installation space, filtering configuration and control methods. | View anti-static EFU → |
| Special FFU/EFU for SMT placement machines | Local clean air supply for placement machines and related electronic manufacturing equipment. | Equipment brand and model, head space, installation location, air supply range and electrical interface. | View SMT equipment supporting products → |
| Custom EFU | Projects where standard construction makes it difficult to match equipment size, air volume, filtration or control requirements. | Equipment drawings, installation openings, available space, target air supply requirements and control interfaces. | Inquire about customized EFU → |
Why does the equipment need independent clean air supply?
Integral air control of the clean room is oriented to the entire production space. The process area of some equipment is located in a hood, cavity or other relatively independent structure. The air supply position, air flow direction and cleanliness requirements need to be determined in conjunction with the equipment itself. The EFU can be installed at a designated location on the equipment to provide filtered air to a local area.
| Local air supply needs | What to pay attention to when configuring EFU |
| Cover designated process area | Determine the air supply location, effective air supply range and target air volume according to the area that needs to be protected. |
| Adapt to the internal space of the device | Determine the product structure based on the installation height, opening size, peripheral components and maintenance space. |
| Work with equipment | According to the power supply and control conditions of the equipment, determine the start, stop, speed regulation and linkage methods. |
How does Aili Industrial build an EFU?
From core components to complete machine assembly, product design and manufacturing are carried out according to equipment requirements.
From core components to EFU complete machine
The overall dimensions, air supply performance and control method of the EFU need to match each other. Aili Industrial configures motors, fans, control systems, boxes and filters based on equipment installation conditions, completes assembly and debugging of the entire machine, and provides manufacturing support for standard products and equipment supporting projects.
Motors and Fans | Control Systems | Box Structure
Match power according to target working conditions
Select the motor and fan configuration based on the target air volume, filter resistance and installation space, and conduct corresponding operation tests.
Cooperate with equipment control needs
Configure start-stop, speed regulation, status feedback and communication methods according to project requirements, and confirm the connection conditions with the equipment control system.
Design structure according to device interface
Determine the box size and installation method based on the reserved opening, installation hole position, overall height and maintenance space.
Filter manufacturing and configuration
According to the particle control requirements, air supply area and resistance conditions, configure the corresponding HEPA or ULPA filter.
Whole machine assembly
Assemble the power, filtration, control and cabinet components according to the confirmed product plan, and check the installation and connection status.
Overall machine performance testing
Check the operating status and related performance parameters according to product requirements.
The creation of high-performance EFU is not just a simple assembly of parts, but also the collaborative design of core components to achieve overall optimization of aerodynamic performance.
Aili Industrial relies on its independent R&D and manufacturing system to systematically match and strictly test key components to ensure stable performance, consistent quality and long-term reliable operation of products from the source.
The core components of EFU are independently developed and produced by Aili Industrial
There is a relationship between EFU size, air volume, air speed and control method. Aili Industrial incorporates the production links of motors, fans, automatic control system software and hardware, sheet metal and filters into its own manufacturing system. During the EFU development process, parts can be matched according to product needs.
Independently developed motor
Provide core power for stable operation
The motor is the core of the stable operation of FFU. Aili Industrial independently develops and produces AC, EC, DC and other motors, which can be configured according to product operating parameters. While ensuring sufficient power, it achieves higher efficiency, lower energy consumption, lower noise and longer service life, laying a solid foundation for the performance of the entire machine.
Independently designed centrifugal fan
Achieve efficient and uniform air supply
The fan directly affects the air supply efficiency and air flow uniformity of the FFU. Aili Industrial independently designs the centrifugal fan and air duct structure. By optimizing the impeller design and aerodynamic layout, it improves the air volume output efficiency, reduces operating noise, and enables clean air to cover the entire work area more evenly and stably.
Self-developed intelligent control system
Achieve precise air volume control
The control system determines the stability and intelligence level of FFU operation. Aili Industrial independently developed the control system software and hardware, supporting various control methods such as PWM speed regulation, RS485 communication, Modbus protocol, PLC joint control and intelligent group control. The control method can be configured according to the equipment requirements.
Precision sheet metal manufacturing
Create a strong and reliable body structure
The FFU body structure directly affects the sealing, strength and long-term stable operation of the equipment. Aili Industry has complete sheet metal processing capabilities. Through processes such as laser cutting, CNC bending, welding and surface treatment, it can carry out structural design according to the equipment installation dimensions.
Independent production of air filters
Ensure clean air quality
The filter is the core component of FFU for air purification. Aili Industrial independently produces HEPA and ULPA filters, strictly controls raw materials, production processes and testing procedures to ensure filtration efficiency, resistance performance and product consistency, and configures corresponding filtration solutions according to cleanliness requirements.
Precision assembly
Make every part work together
The overall performance of the machine comes from the precise matching of each core component. Aili Industrial uses standardized assembly processes to optimize and integrate independently developed motors, fans, control systems and filters, making the entire machine more stable, airflow more uniform, and more reliable in long-term use.
Multiple rigorous tests
Ensure that each EFU is stable and reliable
EFU must undergo strict testing before leaving the factory to ensure that the product meets design standards and can operate stably in various clean environments for a long time.
EFU joint development for equipment manufacturers
Focusing on equipment space, air supply performance and control requirements, let the fan, control system and overall machine structure work together.
The EFU needs to be compatible with the installation space, air supply area and control system of the customer's equipment. Aili Industrial has the capabilities of motor manufacturing, independent research and development and production of fans, control system software and hardware development, filter manufacturing and complete machine design. It can organize relevant engineers to participate and implement equipment requirements into component configuration, box structure and control scheme.
Aili Industrial Engineering customizes FFU/EFU according to your requirements:
| Structure and air supply configuration | Control and supporting configuration |
| Overall dimensions and installation openings | Start, stop and speed adjustment methods |
| Overall height and installation structure | Communication interfaces and protocols |
| Air volume, wind speed and wind speed uniformity | HEPA/ULPA filter configuration |
| Motor type and fan configuration | Box material and surface treatment |
| Inlet and outlet air direction and air supply range | Power supply conditions and special voltage |
| Filter disassembly and maintenance methods | OEM/ODM equipment matching |
What industries and equipment is EFU used in?
EFU is mainly used for clean air filtration and air supply inside the equipment or in local areas. According to the installation conditions of different production industries and equipment, Aili Industrial can configure EFU products based on equipment space, air volume, wind speed, filtration requirements and control methods.
Semiconductor equipment
Semiconductor equipment has different requirements for local clean environment, air parameters and internal space of the equipment. EFU can be configured according to the equipment installation location, air volume, wind speed, filtration requirements and control method.
Pay attention to: cleanliness/wind speed/air flow uniformity/installation space
Lithium battery equipment
Lithium battery production equipment has different requirements for the air conditions of the local environment. For applications that require clean air supply inside the equipment, corresponding EFU products can be configured according to process requirements.
Pay attention to: air volume/wind speed/cleanliness/equipment space
Photovoltaic equipment
Photovoltaic production involves a variety of process equipment, and a corresponding clean air environment needs to be maintained inside some equipment. EFU can be configured according to the equipment structure and local air supply needs.
Focus on: clean air/air volume/wind speed/equipment space
Panel display device
Panel display production equipment often has larger equipment structures and different clean area requirements. EFU can be configured according to the internal space of the equipment, air supply location and cleanliness requirements.
Pay attention to: cleanliness/air volume/wind speed/air flow uniformity
Automation equipment
The structures of automation equipment vary greatly, and the clean air supply unit needs to be configured according to the internal space of the equipment and actual operation requirements. EFU can adjust its structure and parameters for different installation positions.
Pay attention to: structural size/installation method/air volume/control
Precision testing equipment
Some precision testing equipment needs to control the internal air environment to prevent particles in the air from affecting the operation of the equipment or the testing process. EFU can configure corresponding filtration solutions based on equipment space and cleanliness requirements.
Focus on: cleanliness/filter/air volume/low-noise operation
Production base to provide manufacturing support for EFU projects
From product development to mass production, Aili Industry has established a complete production and manufacturing system. The production base of nearly 30,000 square meters covers sheet metal processing, component production, filter manufacturing, complete machine assembly and product testing, providing corresponding manufacturing support for EFU and other clean equipment.
Sheet metal processing
Whole machine assembly
Product testing
Finished product area
Quality control, starting from core components
A truly stable FFU does not just rely on final inspection, but controls every key link starting from core component manufacturing. Aili Industrial incorporates motors, fans, control systems and filters into its own quality management system, and continuously controls product performance and consistency through component testing and complete machine testing.
Motor performance testing
Test the motor's operating performance, electrical parameters and operating status to ensure that the power system meets the long-term operation requirements of FFU.
Fan performance testing
Test the operating status, air volume and related performance of the centrifugal fan to provide stable aerodynamic performance for the entire equipment.
Control system function test
Test the control board, speed control function, communication function and control logic to ensure that the FFU can respond stably to different control instructions.
Filter performance testing
Conduct relevant performance testing of HEPA and ULPA filters according to product requirements to ensure that the filters meet design and application requirements.
Overall machine comprehensive performance test
After completing the assembly of core components, the FFU will be tested for complete machine operation and comprehensive performance to confirm that the coordinated operation of each system is normal.
From parts to finished products, how is each step inspected?
Through whole-process quality control, we reduce overall machine performance fluctuations caused by differences in component performance and ensure that EFU and other purification equipment have stable operating performance and good batch consistency.
When the motor, fan, control system, filter and complete machine are all controlled by its own manufacturing system, when performance deviations occur in the product, the problem can be quickly located and optimized, rather than relying on repeated coordination with multiple external suppliers.
For each EFU, from the motor, fan, control system and filter to the final EFU machine, Aili Industrial has verified the product performance at all levels through full-process quality management and multiple performance tests. We are not only concerned about whether the EFU can operate normally, but also whether it can operate stably for a long time in a clean environment.
From manufacturing capabilities to customer value
Independent research and development, full industry chain manufacturing and engineering customization capabilities are not only different production methods, but also directly affect the performance, customization, quality and project delivery of EFU.
01｜Performance is more controllable— starting from core components to master FFU performance
Core links such as motors, fans, control systems and filters are manufactured independently, allowing each component to be matched around the needs of the entire machine and reducing performance differences between different suppliers.
Motor｜Fan｜Filter｜Control system
02｜Customization is more flexible - not restricted by standard products
Aili Industry can adjust the structure, power, filtration and control to provide customized solutions for special applications.
Size | Structure | Air volume | Wind speed | Filtration | Control
03｜More stable quality - from parts to complete machine, layer-by-layer control
Aili Industrial combines core component testing, production process control and complete machine performance testing, not only focusing on the final product, but also controlling the performance and consistency of the EFU from the source.
Component inspection｜Process control｜Complete machine testing
04｜More reliable delivery - complete manufacturing system supports project delivery
The 30,000-square-meter modern production base covers core component manufacturing, sheet metal, filters and FFU complete machine assembly, providing stable production and delivery support for standard products and mass customization projects.
Independent production | Mass manufacturing | Stable delivery
Only when core capabilities are in your own hands can you truly achieve controllable performance, flexible solutions, stable quality, and reliable delivery.
This is also the basis for Aili Industries to continue to provide solutions from standard EFU to special application customization.
About EFU, you may also want to know
From product selection, performance configuration to customized development, the following are the issues that customers are most frequently concerned about when choosing EFU.
01｜What is EFU?
EFU is the abbreviation of Equipment Fan Filter Unit, which is the equipment-side fan filter unit. EFU is usually used for clean air filtration and air supply inside the equipment or in local areas. It consists of a fan, motor, filter, box and control components. According to the installation space and cleanliness requirements of different equipment, the corresponding product structure and parameters can be configured.
02｜What is the difference between EFU and FFU?
FFU is mainly used for air filtration and circulating air supply in clean rooms, clean work areas and other spaces, while EFU is mainly used for clean air supply inside equipment or local areas of equipment. Both can use a combination of fans and high-efficiency filters, but EFU usually requires more consideration of equipment installation space, structural size, and equipment control requirements.
03｜Can EFU make ultra-thin structures?
Can be designed according to specific product structure. The overall height of the EFU is affected by factors such as motors, fans, filters, and internal structures. The height of some EFU products of Aili Industrial can reach about 70mm. The specific size needs to be determined according to product conditions such as air volume, filter, and installation space.
04｜What equipment is EFU suitable for?
EFU can be used in equipment and applications that require local clean air supply, such as semiconductor equipment, photovoltaic equipment, lithium battery equipment, panel display equipment, electronic manufacturing equipment, placement machines, automation equipment, precision testing equipment and optoelectronic equipment, etc. The specific product configuration needs to be determined based on the equipment installation space, cleanliness requirements and air parameters.
05｜Can EFU be customized?
Can. Aili Industrial's EFU can be configured according to requirements such as equipment installation space, product size, air volume, wind speed, filters, fans, motors and control methods. For projects with special installation conditions, solutions can be communicated based on equipment drawings or relevant technical parameters.
06｜Can EFU be equipped with HEPA or ULPA filter?
Corresponding filters can be configured according to cleanliness requirements. Common options include high-efficiency filters such as HEPA and ULPA. The actual selection needs to be comprehensively determined based on parameters such as cleanliness level, filter size, air volume, and filter resistance.
07｜How to determine the air volume and wind speed of EFU?
The air volume and speed of the EFU need to be determined based on the internal space of the equipment, air supply location, cleanliness requirements and actual process conditions. It is also necessary to consider the filter resistance and match the corresponding motor and fan parameters accordingly.
08｜Can EFU be connected to the equipment control system?
Corresponding control methods can be configured according to equipment control requirements, such as start-stop control, wind speed adjustment, communication and equipment linkage, etc. The specific control method needs to be determined according to the control system of the equipment itself and the project requirements.
09｜What types of EFU can Aili Industrial produce?
Aili Industrial produces EFU products with different structures and configurations, including ultra-thin EFU, standard EFU, high air volume EFU, and customized EFU configured according to equipment installation conditions. Products can be designed according to requirements such as installation size, air volume, wind speed, filters and control methods.
10｜What is the difference between Aili Industrial’s EFU and ordinary EFU?
Aili Industrial not only assembles EFU complete machines, but also independently develops and manufactures core components such as motors, fans, control systems, sheet metal and filters. From core components to complete machine testing, we have established a complete R&D, manufacturing and quality control system, and support customization of standard products and special applications.
Customize your own EFU solution for your special needs
Provide your installation dimensions, air volume/wind speed requirements and usage environment, and the Aili industrial engineering team can assist you in matching the solution.
When does a knock-down EFU need to be customized? Structural boundaries, technical protocols and acceptance points
How to choose ultra-thin EFU filter? Size, effective area, resistance and replacement direction
How to judge the abnormal working point of EFU fan? Operating data, failure causes and inspection sequence
How to calculate EFU rated air volume? Air supply area, target wind speed and unit conversion method
How to choose between EFU and high-efficiency air supply vents? Installation conditions, operating costs and maintenance differences
How does EFU implement PWM speed regulation? Frequency, duty cycle and air volume calibration method
What is the difference between DC EFU and AC EFU? Comparison of energy consumption, speed regulation, control and selection
How to troubleshoot if EFU cannot start? Power supply, control signal, motor and protection status inspection
What is the difference between ultra-thin EFU and regular EFU? Height, performance, maintenance and applicable equipment comparison
What is the reason for the increased vibration of EFU? Impeller, motor, fixed structure and resonance investigation
What should we pay attention to when configuring U15 filter in EFU? Key points of resistance, air volume, sealing and leak detection
How to calculate EFU surface wind speed? Effective filter area, measuring point layout and average method
What should I do if the EFU air outlet speed is uneven? Fan location, filter and structural shading analysis
How to customize side air intake EFU? Confirmation of air inlet position, air duct resistance and equipment interface
How to design the EFU special air outlet? Air supply range, uniformity and equipment structure match
How to choose small size EFU? Key points of equipment openings, air volume, filter area and control interfaces
What equipment is narrow body EFU suitable for? Air duct, filter and installation design when width is limited
How to match EC motor for EFU? Speed adjustment mode, efficiency range and control interface confirmation
Does EFU use AC motor or DC motor? Comparison of operating modes, speed regulation and equipment interfaces
How to choose U16 filter for EFU configuration? High resistance working conditions and complete machine performance verification method
How to configure EFU of lithography equipment? Key points of local cleaning, air flow stabilization and space interface
How to configure the etching equipment EFU? Corrosive environment, local air supply and maintenance conditions confirmation
How does EFU achieve 0-10V speed regulation? Signal wiring, speed calibration and abnormal status settings
