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Aili Industrial snap-on EFU is an equipment fan filter unit for semiconductor equipment, electronic equipment, optoelectronic equipment and other clean equipment applications.
The product integrates a fan, high-efficiency filter and box into one. The fan drives the air through the HEPA or ULPA filter to provide filtered air inside the equipment or a local clean area.
The snap-on filter fixing structure is adopted, and the filter can be disassembled, assembled and maintained according to the product structure. At the same time, stainless steel boxes, EC/AC fans, filters and control methods can be configured according to project requirements.
Get product plan
The filter is fixed with buckles and can be disassembled, assembled and maintained according to the product structure.
The SUS304 mirror stainless steel box and corresponding surface treatment can be configured according to project requirements.
The filter is fixed with buckles and can be disassembled, assembled and maintained according to the product structure.
Choose the corresponding HEPA or ULPA filter according to actual cleaning requirements.
The snap-on EFU uses a snap-on structure to connect the filter and the box.
When the filter needs to be inspected, maintained or replaced, the buckle can be released and the filter can be disassembled and assembled according to the product structure.
This structure combines the fixing and disassembly of the filter in a snap-on structure and can be used in equipment applications that require regular filter maintenance.
Filter maintenance process
Release the buckle → Remove the filter → Install the filter → Secure the buckle
The actual operation method should be determined based on the specific EFU structure, installation direction, and on-site maintenance conditions.
According to the project requirements, Aili Industrial snap-on EFU can use SUS304 mirror stainless steel box.
Stainless steel materials are suitable for application environments that have corresponding requirements for equipment materials, surface cleaning and daily maintenance.
The box material and surface treatment can also be configured according to specific project conditions.
Can be configured according to the project
SUS304 stainless steel/SUS316 stainless steel/other metal materials/different surface treatments
Specific materials need to be determined based on the use environment, cleaning methods and project technical requirements.
The snap-on EFU integrates the fan and high-efficiency filter into the equipment box.
When the equipment is running, the fan drives the air into the interior of the EFU. After the air is filtered by the high-efficiency filter, it is sent from the air outlet side into the interior of the equipment or the target clean area.
Air entering → Fan drive → Air flow organization → HEPA/ULPA filtration → Clean air sent out
The specific airflow organization method is determined based on the EFU structure, fan configuration and equipment installation conditions.
Parameter items |
Configuration instructions |
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Product name |
Snap-on EFU |
English name |
Clasp-Type EFU |
product type |
Equipment Fan Filter Unit |
Cabinet material |
SUS304 mirror stainless steel, etc. |
Fan type |
EC/AC |
filter type |
HEPA/ULPA |
filter level |
H13/H14/U15, etc., configured according to project requirements |
Filter fixation method |
snap-on |
Control method |
Single station/group/communication control |
Communication function |
Configure according to project needs |
Product size |
Configure according to project needs |
Installation method |
Configure according to device structure |
Air intake method |
Configure according to project needs |
Air outlet method |
Configure according to project needs |
power supply |
Determine based on fan configuration |
Application areas |
Semiconductors, electronics, optoelectronics, precision manufacturing, etc. |
Customized services |
support |
Fan → Motor → Control system → Sheet metal → Filter → FFU/EFU → Purification equipment
Aili Industry has long been engaged in the R&D and production of purification equipment and related products. The product system covers fans, motors, control systems, sheet metal, filters, FFU, EFU and other purification equipment.
In the EFU project, fans, filters, box structures and control systems can be configured and matched according to actual needs.
EC/AC fan, DC motor, control system, HEPA filter, ULPA filter, FFU, EFU, fan box, air shower room, clean workbench, transfer window, clean shed
Designed according to equipment space and cleanliness requirements
Aili Industrial EFU is specially designed for applications such as semiconductors, photovoltaics, lithium batteries, panel displays and electronic equipment. It integrates motors, fans, filters and control systems into a compact structure to provide stable and controllable clean air inside the equipment.
Suitable for restricted installation space
The structure can be matched according to the internal height and installation position of the equipment, and an ultra-thin EFU solution can be provided.
Co-design of fans, filters and airflow structures
Match the aerodynamic system according to the target air volume, wind speed and system resistance.
From motors and fans to control systems
Aili Industry has established a production system covering core components and complete machine assembly.
According to equipment, rather than letting equipment adapt to standard products
Supports customization of size, air volume, wind speed, filter, installation structure and control system.
In semiconductor, photovoltaic, lithium battery, panel display and electronic manufacturing equipment, some key areas require a stable and clean air environment.
Unlike relying solely on centralized clean room air systems, EFU can be installed directly inside or at the equipment end to provide local clean air to the target area.
Aili Industrial EFU integrates fans, motors, filters and control systems into a compact structure and matches them according to equipment space and actual process requirements.
Instead of simply reducing the FFU, the structure and aerodynamic design are redesigned for equipment-side applications.
To provide stable power for fans, AC, EC or DC motor solutions can be configured according to product requirements.
Aili Industrial Advantages: Self-produced motors , flexible motor solutions, and controllable costs.
Match according to the target air volume, static pressure and installation space.
Aili Industrial Advantages: self-produced fans , precise matching, stable performance, and guaranteed delivery.
Configure HEPA, ULPA and other filtration solutions according to cleanliness requirements.
Aili Industrial Advantages: It has its own filter material production line , self-controlled quality, and the price is more affordable with the same quality.
Supports functions such as speed regulation, equipment linkage and communication control.
Aili Industrial Advantages: The control system is independently developed ，with strong compatibility and no intermediate price increase.
Design according to equipment installation space, size and interface requirements.
Aili Industrial Advantages: In-house sheet metal production, flexible non-standard customization, and better overall cost.
Aili Industrial has the R&D and manufacturing capabilities of core components such as motors, fans, filters and control systems.
Design the EFU structure according to the internal height, width, installation location and interface conditions of the equipment.
Comprehensive consideration of air volume, static pressure, wind speed, filter resistance and air flow distribution.
Speed regulation, PLC linkage, RS485, Modbus and other solutions can be configured according to the equipment control system.
Conduct corresponding performance tests on fans, filters, control systems and the operating status of the entire machine.
Clean air supply at the end of process equipment such as photolithography machines, etching machines, cleaning machines, glue coating and development equipment, etc.
Provide high-efficiency filtration guarantee for production environments with large dust production and strict cleanliness requirements
Provides 100-level cleanliness for the micro-environment of the chip head, effectively preventing false soldering and short circuits caused by fine dust
Clean air supply for wafer and panel display manufacturing equipment
With many years of clean equipment research and development experience as its core, and relying on its own production capabilities and in-depth customized services across the entire industry chain, Aili Industrial EFU is committed to providing efficient, reliable, and intelligent equipment-side air purification solutions for the high-tech manufacturing industry.
Provide equipment size, installation space, target air volume or equipment drawings, and Aili Industrial can match the EFU solution according to actual needs.
The snap-on EFU is an equipment fan filter unit that uses a snap-on structure to fix the filter. The fan and HEPA/ULPA filter are integrated into the equipment and can be used for air filtration and air supply inside the equipment or in local clean areas.
The buckle is used to connect the filter and the EFU box. When the filter needs to be maintained or replaced, the buckle can be released and disassembled according to the product structure.
Can. According to project requirements, materials such as SUS304 mirror stainless steel can be used.
Can. HEPA filters such as H13 and H14 can be configured according to project requirements, and corresponding ULPA filters can also be configured according to project requirements.
Can. The product can be configured with EC or AC fans according to project requirements.
Whether wind speed adjustment is supported depends on the specific fan and control system configuration. When using the corresponding EC fan and control system, the speed can be controlled according to project requirements.
Can. Depending on the project control system configuration, single or group control can be performed.
Corresponding communication control methods can be configured according to project requirements. The specific interface and communication protocol need to be determined based on the actual project system.
Can. Aili Industry can configure products according to the equipment installation space, filter size, fan specifications, air inlet and outlet methods and installation interfaces.
It can be used inside semiconductor equipment or in local clean areas. The specific configuration needs to be combined with the equipment space, air volume, static pressure, filter and control requirements.
