Aili Industrial Semiconductor Clean Air Solution
From the clean room to the equipment micro-environment , match clean air supply with process needs
Aili Industrial provides FFU, EFU, HEPA/ULPA filters, chemical filters and control system packages for semiconductor clean rooms, equipment micro-environments, wafer processing and advanced packaging projects.
Focusing on the installation space, cleanliness goals, air flow direction, air volume, static pressure and equipment interfaces, we collaboratively design filtration, power, structure and control configurations, and provide product and technical support for new projects, equipment development and existing system modifications.
What air control issues need to be addressed for semiconductor projects?
Clean air control in semiconductor projects requires consideration of the production space, equipment interior, personnel and material passages, and local operating areas. Different areas have different tasks and have different requirements for filtration, air supply, pollutant control and equipment structure.
When selecting, you should first clarify the areas that need to be protected, the pollutants of concern, and operating conditions, and then jointly check the filters, fans, installation structures, and control methods. The movement of people and materials in and out of the equipment also needs to be coordinated with changing, cleaning and on-site management processes.
| demand direction | What to pay attention to in the project | Product configuration direction |
| particulate matter control | Particle size of concern, cleanliness targets, filtration requirements and installation and sealing conditions | HEPA/ULPA filter, matched with FFU, EFU or terminal air supply equipment |
| local airflow organization | Supply air coverage, air flow direction, equipment occlusion, return air path and the impact of moving parts | Equipment-side EFU, customized FFU and local clean air supply components |
| Molecular contamination control | Target pollutants, concentration range, temperature, humidity and treatment air volume | Configure AMC chemical filters based on contaminant type |
| Access of people and materials | Clean zoning, traffic methods, material size and cleaning management process | Configure air shower room, cargo shower room and transfer window according to project needs |
| local cleaning operation | Operation content, product protection scope, work space and surrounding environment | Clean workbench, clean booth and customized clean air supply components |
| Space and maintenance | Installation height, opening size, air inlet gap and filter disassembly and installation direction | Ultra-thin, small size, detachable and other customized structures |
| Operation and control | Working and standby modes, speed regulation requirements, communication and equipment linkage | Controller, group control system and corresponding power configuration |
How to configure purification equipment for different semiconductor application scenarios?
Semiconductor clean air and purification equipment need to be selected based on the specific use location. Clean room ceilings, equipment front-end modules, wafer transfer areas, personnel passages and local operating stations can be equipped with corresponding products according to their respective needs.
| Application scenarios | Main needs | supporting products | Key confirmation conditions |
| Semiconductor clean room | Production space filtered air supply and zoned operation management | FFU, HEPA/ULPA filter, group control system | Cleanliness target, supply air coverage, resistance, return air and maintenance |
| Device front-end module | Partial cleaning of wafer loading, unloading and transfer areas | EFU, small size EFU, HEPA/ULPA filter | Openings, robot occlusion, airflow direction and interfaces |
| Microenvironment related to lithography equipment | Control local particulate matter and specific molecule pollution according to equipment requirements | EFU, particle filters and targeted chemical filtration configurations | Clean boundaries, contaminant types, spaces and verification conditions |
| Etching and thin film deposition equipment supporting area | Clean air supply for designated loading, unloading, transmission and peripheral areas | Custom EFU, filters and control components | Location of use, airflow path, structure and maintenance |
| Wafer inspection and metrology | Meet the requirements for particulate matter, airflow and vibration in the detection area | EFU, speed control, HEPA/ULPA filter | Wind speed, fixed structures, equipment sensitive conditions and testing |
| Advanced packaging and partial assembly | Clean air supply and product protection for designated processes | FFU, EFU, clean bench or clean booth | Process, coverage, static control and linkage |
| Personnel enters clean area | Cooperate with personnel entry and exit and dressing management | Configure air shower room according to project requirements | Number of people passing through, layout, interlocking and management processes |
| Material entry and area transfer | Cooperate with material cleaning, transportation and clean zone management | Cargo shower room, transfer window, air shower transfer window | Material and packaging suitability, dimensions and means of passage |
| Fresh air and circulating air treatment | Configure air treatment and pollutant filtration links | Air conditioning box, particle filter, chemical filter | Air volume, processing load, filter resistance and maintenance conditions |
Semiconductor clean air and clean room purification equipment
Aili Industrial provides clean air supply, air filtration, local cleaning, personnel and material entry and exit, air treatment and control products. Models can be selected separately according to project conditions, or supporting designs can be carried out around equipment structure and site layout.
Clean air supply and air filtration
| product | Main purpose | Key points in selection |
| FFU fan filter unit | Clean room ceiling, clean shed and local area filtered air supply | Air volume, static pressure, filtration level, maintenance methods and group control |
| EFU equipment side fan filter unit | Clean air supply inside the equipment, front-end modules and designated local areas | Installation space, openings, air flow direction and control interface |
| BFU air supply unit | Local areas that require independent power and filtered air supply | Installation location, air volume, air duct connection and filter configuration |
| Efficient air outlet | The end of the clean area of the centralized air supply system | Air volume, system static pressure, sealing and leak detection requirements |
| HEPA/ULPA filter | Clean room terminal and equipment particulate matter filtration | Level, detection method, air volume, resistance and sealing |
| AMC Chemical Filter | Specified Molecular Contaminant Control | Pollutants, media, air volume, temperature and humidity and replacement criteria |
Partial cleaning and operating areas
| product | Main purpose | Key points in selection |
| Clean workbench | Partial protection for product inspection, assembly and other applicable operations | Air flow direction, operating space and process applicability |
| Clean shed | Partial clean coverage of designated equipment, workstations or production areas | Coverage, layout, return air and personnel entry and exit |
| Customized local clean air supply components | Adapted to equipment covers, special workstations and local areas | Installation boundaries, air supply areas, interfaces and maintenance |
Access of people and materials
| product | Main purpose | Key points in selection |
| Air shower room | Set up channels for personnel to enter the clean area according to management requirements | Number of people, passage size, access control interlocking and procedures |
| cargo shower room | Surface blowing of applicable materials, carts or packages | Material size, access method, door opening structure and layout |
| transfer window | Small material transfer between different areas | Material size, clean partition, interlocking and cleaning methods |
| Air shower transfer window | Material transfer with blowing requirements | Material applicability, blowing configuration and management requirements |
Air handling and operational control
| product | Main purpose | Key points in selection |
| air conditioning box | Responsible for fresh air or circulating air treatment according to system design | Air volume, filtration, temperature and humidity processing requirements and interfaces |
| fan box | Provide power for designated applicable air paths | Air volume, static pressure, air medium and installation conditions |
| FFU group control system | Centralized and partitioned management of clean air supply units | Management quantity, communication, operating mode and status feedback |
| Device side controller | Speed regulation and linkage of EFU and local air supply equipment | Power supply, signals, interfaces and control logic |
Air handling and operational control
| product | Main purpose | Key points in selection |
| air conditioning box | Responsible for fresh air or circulating air treatment according to system design | Air volume, filtration, temperature and humidity processing requirements and interfaces |
| fan box | Provide power for designated applicable air paths | Air volume, static pressure, air medium and installation conditions |
| FFU group control system | Centralized and partitioned management of clean air supply units | Management quantity, communication, operating mode and status feedback |
| Device side controller | Speed regulation and linkage of EFU and local air supply equipment | Power supply, signals, interfaces and control logic |
Semiconductor equipment EFU customization to match the air supply unit with the equipment structure
Semiconductor equipment often houses mechanical, electrical and process modules. The EFU design should take into account the available space and check the overall height, air inlet clearance, air supply openings, cable location and maintenance direction.
Aili Industrial provides ultra-thin, small-sized and equipment-specific EFUs that can be configured around the installation structure, target air volume, filtration requirements and control interfaces. The ultra-thin EFU with an overall height of 70 mm can be used for project evaluation with limited installation height. The specific applicability needs to be confirmed based on actual working conditions.
| Customized direction | Contents jointly confirmed |
| Shape and space | Length and width, overall height, air inlet gap and effective air supply area |
| Installation and sealing | Flange, hole position, buckle, support structure and sealing interface |
| Air volume and power | Air volume, wind speed, system resistance and speed range |
| Filter configuration | HEPA/ULPA grade, filter media, size and resistance |
| Electrical and Control | Power supply, start and stop, speed regulation, communication and status feedback |
| Maintenance and replacement | Filter disassembly and assembly direction, electrical inspection location and maintenance space |
| collaborative direction | Effect on the project |
| Power and filter matching | Jointly check filter resistance, effective area and target air volume |
| Structure and installation adaptation | Design products around openings, hole locations, spaces and maintenance directions |
| Control and operation coordination | Confirm control configuration according to power supply, communication and operating mode |
| Prototype and test connection | Clarify test conditions, inspection items and acceptance conditions |
| Mass manufacturing collaboration | Implement the confirmed size, configuration and inspection requirements into production materials |
From project requirements to product delivery
For some precision manufacturing equipment, the overall environment of the clean room alone cannot meet the clean air needs of specific areas inside the equipment. EFU can be installed inside the equipment or in a local area of the equipment to provide filtered air to a specific space.
| stage | Work content | Confirm the result |
| Requirements sorting | Clarify the use location, cleaning targets, pollutants and operating conditions | Project requirements list |
| Product selection | Check air volume, static pressure, filtration, space and interfaces | Preliminary product plan |
| Technical confirmation | Confirm drawings, installation, power supply, control and maintenance requirements | Drawings and technical requirements |
| Prototype verification | Carry out testing and installation verification according to project needs | Verification results and adjustments |
| Batch matching | Organize manufacturing, inspection and delivery according to confirmed information | Products and agreement information |
Frequently Asked Questions about Semiconductor Clean Air and Purification Equipment
Should you choose FFU or EFU for semiconductor projects?
FFU can be evaluated on clean room ceilings and large-scale clean air supply; EFU can be evaluated inside equipment, compact spaces and designated local areas. The specific needs are determined based on the installation location, air supply coverage, resistance and maintenance conditions.
Do semiconductor equipment necessarily need ULPA filters?
Can chemical filters be paired with FFU or EFU?
The top space of the device is small. Can the ultra-thin EFU be customized?
Does every semiconductor project need an air shower, cargo shower, and transfer window?
How to choose between clean workbench and clean shed?
Can EFU be linked with the equipment control system?
What information is required for the consultation plan?
What is the difference between Aili Industry and ordinary manufacturers?
The creation of high-performance air purification products is not just about the simple assembly of parts, but also about the collaborative design of core components to achieve overall optimization of aerodynamic performance.
Aili Industry relies on its independent R&D and manufacturing system to systematically match and strictly test key components to ensure stable performance, consistent quality and long-term reliable operation of products from the source.
Semiconductor clean air and purification equipment selection consultation
Semiconductor projects need to consider cleanliness goals, process areas, equipment structures and on-site operating conditions. Clarifying the filtration requirements, air flow direction, air volume and static pressure, personnel and material flow lines, and control interfaces will help promote product selection, prototype verification, and batch matching.
Aili Industrial can semiconductor clean rooms, equipment microenvironments, wafer processing and advanced packaging projects .provide product information, technical parameters and customized support for
Production base to provide manufacturing support for air purification projects
From product development to mass production, Aili Industry has established a complete production and manufacturing system. The 30,000㎡ production base covers sheet metal processing, component production, filter manufacturing, complete machine assembly and product testing, providing corresponding manufacturing support for clean equipment.
Sheet metal processing
Whole machine assembly
Product testing
Finished product area
Quality control, starting from core components
A truly stable air purification product does not just rely on final testing, but controls every key link starting from the manufacturing of core components. Aili Industrial incorporates motors, fans, control systems and filters into its own quality management system, and continuously controls product performance and consistency through component testing and complete machine testing.
Motor performance testing
Test the motor's operating performance, electrical parameters and operating status to ensure that the power system meets the long-term operation requirements of FFU.
Fan performance testing
Test the operating status, air volume and related performance of the centrifugal fan to provide stable aerodynamic performance for the entire equipment.
Control system function test
Test the control board, speed control function, communication function and control logic to ensure that the FFU can respond stably to different control instructions.
Filter performance testing
Conduct relevant performance testing of HEPA and ULPA filters according to product requirements to ensure that the filters meet design and application requirements.
Overall machine comprehensive performance test
After completing the assembly of core components, the FFU will be tested for complete machine operation and comprehensive performance to confirm that the coordinated operation of each system is normal.
When motors, fans, control systems, filters and complete machines are all controlled by their own manufacturing system, when product performance deviations occur, the problem can be located and optimized more quickly, rather than relying on repeated coordination with multiple external suppliers.
From manufacturing capabilities to customer value
Independent research and development, full industry chain manufacturing and engineering customization capabilities are not only different production methods, but also directly affect product performance, customization, quality and project delivery.
01｜Performance is more controllable— starting from core components to master FFU performance
Core links such as motors, fans, control systems and filters are manufactured independently, allowing each component to be matched around the needs of the entire machine and reducing performance differences between different suppliers.
Motor｜Fan｜Filter｜Control system
02｜Customization is more flexible - not restricted by standard products
Aili Industry can adjust the structure, power, filtration and control to provide customized solutions for special applications.
Size | Structure | Air volume | Wind speed | Filtration | Control
03｜More stable quality - from parts to complete machine, layer-by-layer control
Aili Industrial combines core component testing, production process control and complete machine performance testing, not only focusing on the final product, but also controlling the performance and consistency of the EFU from the source.
Component inspection｜Process control｜Complete machine testing
04｜More reliable delivery - complete manufacturing system supports project delivery
The 30,000-square-meter modern production base covers core component manufacturing, sheet metal, filters and FFU complete machine assembly, providing stable production and delivery support for standard products and mass customization projects.
Independent production | Mass manufacturing | Stable delivery
Only when core capabilities are in your own hands can you truly achieve controllable performance, flexible solutions, stable quality, and reliable delivery.
This is also the basis for Aili Industries to continue to provide solutions from standard air purification products to customization for special applications.
Tailor-made air purification solutions for your special needs
Aili's industrial engineering team can assist you in solution matching.
