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Static electricity control and clean air supply are integrated on the equipment side
The EC fan, H14 high-efficiency filter and electrostatic control module are integrated into a compact EFU to provide clean air supply solutions for semiconductor equipment, electronic manufacturing and precision production environments.
EC motor·H14 filter·Static control·Stepless speed regulation·Single machine/group control
Anti-static EFU|FFU is a fan filter unit used for clean air supply at the equipment end and combined with static control function.
EFU is usually installed in a location that requires clean air and equipment space. The fan drives the air through a high-efficiency filter and then sends it to the target area.
On this basis, the anti-static EFU adds an electrostatic control module to control static electricity for specific application environments.
For semiconductor equipment, electronic manufacturing and precision production environments, air cleanliness and electrostatic environment may affect the process. Therefore, filters, fans, electrostatic modules and control systems need to be comprehensively configured according to actual equipment requirements.
Aili Industrial Anti-static EFU adopts EC fan solution and can be configured with H14 high-efficiency filter and electrostatic module, which is suitable for equipment-side applications that require clean air and static electricity control.
Optional EC internal rotor motor configuration is available to provide aerodynamic power to the EFU and support stepless speed regulation.
Existing specifications and configurations use H14 high-efficiency filter (ULPA filter optional).
Equipped with an electrostatic module, it can be used for electrostatic control in specific application environments.
It supports stepless speed regulation and can realize local control, single machine control and communication group control according to the configuration.
01air entering Ambient air enters the EFU |
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02EC fan drive EC fan generates air flow |
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03High efficiency filtration Air passes through H14 high-efficiency filter |
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04Static control Static control of application areas via static modules |
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05Clean air supply Treated air enters equipment or clean areas |
EFU configuration for static-sensitive environments
On the basis of clean air filtration, the anti-static EFU can be combined with the electrostatic module to control the electrostatic environment in the application area.
Electrostatic module: configured with electrostatic module V.
Dissipation time: The static electricity dissipation time recorded in the existing specifications is: <10S. The test conditions are ±1000V to ±100V, face wind speed 0.45 m/s ±20%, and a distance of 30 cm from the air outlet surface.
According to project requirements, optional:
Online particle detector → Online electrostatic detector。
Technical Note: The above electrostatic parameters correspond to specific product specifications and test conditions. Actual performance will be affected by installation distance, wind speed, environmental conditions and product configuration. Project selection should be based on the final product technical documents and actual test conditions.
H14 high-efficiency filtration (filters with higher purification levels can be customized) to provide clean air for equipment
Anti-static EFU not only needs to consider static electricity control, but also needs to meet the air cleanliness requirements on the equipment side.
The existing product specifications are equipped with H14 high-efficiency filter. The filter material is made of ultra-fine glass fiber and the outer frame is made of anodized aluminum profiles.
High efficiency filter efficiency: 99.99% @ 0.3 μm
Filter structure:
Ultra-fine glass fiber filter material → anodized aluminum profile frame → plastic sprayed steel mesh protection → off-white sealing strip
Reference wind speed: 0.45 m/s ±20%
The specific air volume and speed need to be confirmed based on the filter resistance, fan performance and equipment working conditions.
The anti-static EFU adopts EC fan configuration, and the operating status of the fan is adjusted through the controller.
The existing product specifications adopt EC internal rotor motor, equipped with 220V/50Hz power supply, rated power 150W, and the impeller adopts metal impeller.
Stepless speed regulation: The control system supports stepless speed regulation and can adjust the fan operating status according to the actual air supply requirements of the equipment.
Standalone control: Each EFU can be controlled independently.
Group control: According to the system configuration, multiple EFUs can be group managed.
Communication control: The control system supports 485 communication and Modbus-RTU standard protocol, and can be integrated according to the project control system.
From single machine control to group management
Local control → Single machine speed regulation → Multiple unit group control → RS485 communication → Modbus-RTU
The control system supports single control or group control, and supports partition control and 485 communication. Modbus-RTU communication includes data items such as FFU start and stop, speed setting, real-time current and real-time speed.
Parameter items |
Specifications |
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Product model |
F-DE315-450×450×160-F70H14 |
EFU box size |
450×450×160mm |
filter size |
450×450×70+10mm |
Filter level |
H14 |
Filtration efficiency |
99.99% @ 0.3 μm |
Filter media |
ultrafine fiberglass |
filter frame |
Anodized aluminum profiles |
protection net |
Sprayed steel mesh |
Reference wind speed |
0.45 m/s ±20% |
Fan type |
EC fan |
Motor type |
Inner rotor EC motor |
power supply |
220V/50Hz |
Rated power |
150W |
impeller |
metal impeller |
Electrostatic module |
Configuration |
Electrostatic module voltage |
4.6 kV |
Static electricity dissipation time |
<10S |
Speed regulation method |
Stepless speed regulation |
Control method |
Local control/communication control |
Communication method |
RS485/Modbus-RTU |
Online particle detection |
Optional |
Online static electricity detection |
Optional |
Cabinet material |
Painted steel plate/galvanized plate/stainless steel |
Some electrostatic parameters correspond to specific test conditions. The actual product size, filter, fan, motor, air volume, wind speed, electrostatic performance, control method and optional functions may be adjusted according to specific models and project requirements. Performance data such as static electricity dissipation time, balance voltage, etc. should be understood in conjunction with the specified test conditions. The final product parameters and applicable conditions are subject to the product technical documents confirmed by Aili Industrial and the actual product test results.
Compact structure, adaptable to equipment installation space
For different equipment spaces and installation conditions, you can confirm according to the project requirements: EFU overall size → filter size → fan configuration → electrostatic module → installation and fixation method → control method
Aili Industrial can match the product structure according to the equipment side space and technical requirements.
Applicable industries
Used in applications requiring clean air supply and static electricity control inside or on the device side of semiconductor equipment.
It is suitable for areas with requirements for air cleanliness and electrostatic environment in electronic components and related production environments.
Used in precision production equipment with specific requirements for particle control and electrostatic environments.
Suitable for clean air treatment of some optoelectronic, display and precision equipment.
It can be used as an equipment-side air supply unit in clean equipment, and can be configured with filtration and electrostatic control functions according to project requirements.
It is suitable for supporting and modifying the placement machines of Panasonic and other brands.
For applications where both particle control and electrostatic environments are concerned, selection can be based on specific process conditions.
An EFU/FFU, paying attention to both cleanliness and static environment. For semiconductor, electronics and precision manufacturing equipment, air filtration alone may not necessarily cover all equipment-side environmental requirements.
The anti-static EFU integrates: EC fan → H14 high-efficiency filtration → static control → stepless speed regulation → communication control into one equipment unit, which can be combined and configured according to project requirements.
Configure the static electricity module to control static electricity according to application requirements.
The air is filtered through H14 high-efficiency filter.
Stepless speed regulation through EC fan and control system.
Supports single machine control, group control and communication control.
Aili Industry has established a product R&D and manufacturing system around FFU, EFU and related clean equipment.
Configure fans and motors based on EFU size, air volume, static pressure and control requirements.
Provide high-efficiency filtration solutions such as HEPA that match the EFU structure.
Configure the electrostatic control module and related detection functions according to project requirements.
Supports stepless speed adjustment, single machine control, group control and communication control.
Manufacture boxes and fixed structures according to product structure and installation requirements.
Complete product assembly, inspection and technical parameter confirmation.
How to choose anti-static EFU?
01 Using equipment |
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02 cleanliness level |
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03 Target wind speed |
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04 filter level |
05 Static electricity control requirements |
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06 Installation dimensions |
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07 Control method |
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08 Detection function |
Equipment name · Installation location · Cleanliness level · EFU size · Target wind speed · Filter level · Static electricity control requirements · Power supply · Control method · Communication requirements · Whether online detection is required
Based on this information, the anti-static EFU configuration can be matched more accurately.
The anti-static EFU is an equipment-side clean air supply unit that adds an electrostatic control function to the fan filter unit. It integrates an EC fan, high-efficiency filter and electrostatic module in one device to meet both clean air supply and specific electrostatic control needs.
It is mainly used in equipment and production environments that require both air cleanliness and electrostatic environment, such as semiconductor equipment, placement machines, electronic manufacturing, optoelectronic equipment and precision manufacturing.
The existing product specifications are equipped with H14 high-efficiency filter, the filter size is 450×450×70+10 mm, the filter material is ultra-fine glass fiber, and the filtration efficiency is recorded as 99.99%@0.3 μm. As a full industry chain EFU manufacturer, Aili Industry can fully customize according to your requirements.
The static electricity dissipation time recorded in the existing product specifications is <10S, and the test conditions are ±1000V to ±100V, face wind speed 0.45 m/s ±20%, and a distance of 30 cm from the air outlet surface. Specific product performance needs to be subject to actual product testing conditions and technical documents.
The existing specifications record a balance voltage of ≤|±100V|, corresponding to specific test conditions. The electrostatic parameters in actual use will be affected by the installation distance, wind speed, environmental conditions and product configuration.
Can. The existing control system supports stepless speed regulation and can adjust the operating status of the EC fan according to the air supply requirements at the equipment end.
Can. The product control system supports single control and group control, and supports partition control and 485 communication, and can be configured according to project system requirements.
The existing control system supports the Modbus-RTU standard protocol, which can realize communication of FFU start/stop, speed setting, real-time current, real-time speed and other data.
An online electrostatic detector can be selected according to project requirements. The product specification also lists the online particle detector as an optional item.
Structural design can be carried out based on equipment installation space, filter size, fan configuration and project requirements. Existing product specifications include an EFU configuration of 450×450×160 mm. The specific size can be confirmed based on the actual project.
The existing specification configuration uses an EC internal rotor motor, the power supply is 220V/50Hz, the rated power is 150W, and the impeller is a metal impeller. Configurations may vary by model and project.
When selecting, it is recommended to provide information such as equipment installation space, cleanliness level, target wind speed, filter level, electrostatic control requirements, power supply, control method and whether online testing is required, and the engineering staff will configure it according to specific working conditions.
Product price is related to factors such as size, filter, fan, motor, electrostatic module, control method and optional detection functions. It is recommended to provide specific project parameters before configuration and quotation.
If your equipment also focuses on clean air, static electricity control, air volume adjustment and equipment space , you can send the project parameters to Aili Industrial.
We can help confirm based on your equipment conditions:
EFU size · H14 filter · EC fan · Electrostatic module · Wind speed · Control method · Communication function · Online detection
