**FFU (Fan Filter Unit)** is an air purification and air supply equipment that integrates a fan and a high-efficiency filter. It is usually installed on the ceiling of a clean room or above a clean area. The fan drives the air through the HEPA or ULPA filter and then sends it into the clean space to provide continuous and stable filtered air for the clean room.
Aili Industrial focuses on the R&D and manufacturing of clean equipment. FFU products can be configured according to the needs of different clean room projects, including fan type, filter level, air volume, wind speed, installation size, control method and shell structure .
Relying on the manufacturing capabilities of fans, control systems, filters and complete machines, Aili Industries is able to carry out collaborative development from core components to FFU complete machines, providing matching air filtration and air supply solutions for different clean environments.
ALGY-1175
Ai Li Industrial
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FFU (Fan Filter Unit) is a modular air purification equipment composed of a fan, HEPA/ULPA filter and box. It is widely used in clean room environments. Aili Industrial has the capabilities of clean room equipment research and development, manufacturing, installation, and clean room design, construction, and maintenance. The company has been engaged in the field of purification equipment for many years, and its FFU products cover lithium batteries, semiconductors, electronic optoelectronics, new energy, biomedicine, precision machinery, food industry and other industries.
Aili Industry adopts a full-chain independent production model from fans, control systems to filters. Its products have passed ISO 14644-1, CE and other certifications, and can provide users with non-standard customized services.
2'×2'(575*575mm), 2'×4'(1175*575mm), 4'×4'(1175×1175mm), etc.
Non-standard size customization is acceptable
Box materials are available: aluminum-zinc-plated steel, stainless steel (SUS304/316), painted steel plate
Fan type: AC or EC DC
Control mode: single machine manual, touch screen group control, computer centralized control
parameter |
scope/options |
|---|---|
Applicable cleanliness level |
ISO class 5 (class 100) to ISO class 8 |
Outlet wind speed |
0.3~0.9 m/s (continuously adjustable) |
Filter level |
H13/H14 (HEPA); U15/U16/U17 (ULPA) |
Filtration efficiency for 0.3μm particles |
≥99.995% (H14 level) (higher level filter optional) |
operating noise |
≤48-59dB (depending on model) |
Cabinet material |
304 stainless steel, 316 stainless steel, aluminum-zinc-coated plate, cold-rolled steel plate painted |
Motor type |
AC AC or EC DC brushless |
Communication interface |
RS485, Modbus protocol |
Installation method |
Ceiling keel embedded, indoor replacement type, etc. |
power supply |
220V AC/50Hz (can be customized to 110V, etc.) |
Note: Size, air volume, filter level, etc. can be customized according to project requirements.
The unique internal diversion and air outlet design ensures uniform and stable wind speed on the air outlet surface.
Effectively eliminate eddy currents and dead corners, and provide stable and balanced vertical one-way airflow for the process area.
Various structural options available:
Bottom replacement type (filter replacement on the ground, no need to climb), top replacement type (top maintenance)
Ultra-thin model (cabinet thickness as low as 70mm, suitable for semiconductor sandwich)
Stainless steel models (corrosion-resistant and easy to clean), explosion-proof models (explosion-proof motors and circuits), etc., suitable for different spaces and working conditions.
Industry norm: Most FFU manufacturers outsource component assembly, lack independent verification capabilities, and rely on supplier data for product performance.
The difference of Aili Industrial: It has an advanced R&D laboratory equipped with a complete set of testing equipment such as fan testing system, fan dynamic balance testing system, motor testing system, filter leak detection platform, TSI air volume hood, dust particle detector, vibration tester, wind tunnel and other testing equipment. All products undergo long-term, multiple, and rigorous testing and verification before mass production.
Practical implications for customers:
Each FFU has been tested and verified before leaving the factory. It is not a 'design value' but an 'actual measurement value'
Each fan must undergo three performance tests before being allowed to be assembled online.
The filters are tested for leaks one by one, not 'sampling qualified', but 'passed one by one'
Special requirements (such as low vibration, high wind speed) can be verified by equipment
Industry norm: Most FFU manufacturers purchase outsourced fans, outsourced controllers, and outsourced filters. They do 'assembly' and rely on suppliers for quality.
The difference of Aili Industrial: It has realized the self-research and production of the three core components of fans, control systems and filters. The factory covers an area of nearly 30,000 square meters, and everything from motor winding, filter material compounding, control system software and hardware design, and complete machine assembly are all completed within its own system.
Practical implications for customers:
Traceable quality means not 'finding the supplier if there is a problem', but 'controlling the whole process by yourself'
Pricing is transparent, not 'multiple price increases', but 'source price'
The delivery date is controllable, not 'waiting for suppliers to schedule', but 'self-coordinating all links'
Industry norm: The vast majority of FFU manufacturers do not have the ability to produce their own motors and rely on outsourced brands. The wind speed can only be selected at ready-made gears.
The difference of Aili Industrial: It has a team of senior electrical engineers and self-researches the whole link from electromagnetic design, impeller dynamics to control system. The self-developed flat brushless motor is only 28mm thick. Each fan is allowed to go online after three performance tests.
Practical implications for customers:
The wind speed can be customized at will, not 'you can only choose the existing gear', but 'adjust the wind speed according to your needs' (can accurately achieve non-standard wind speeds such as 1.0m/s, 1.5m/s, 1.8m/s or even 2.5/s)
The ultra-thin EFU can be installed into the semiconductor sandwich. It is not '200-300mm cannot be installed', but '100mm can be installed into 100-150mm space.'
The motor has a longer life and does not 'break after just one use'
Industry norm: Most FFU control systems are outsourced as standard solutions. Customers who want to change the logic have to wait for the supplier's schedule.
The difference between Aili: The control system software and hardware are all designed and manufactured by ourselves, and senior software and hardware engineers can customize them for customers. The LCD model can control 300 FFUs, and the computer model can control tens of thousands of FFUs. It supports real-time monitoring of operating status, alarm function and wind pressure monitoring function.
Practical implications for customers:
The control logic is customized on demand. It is not 'use whatever the supplier gives you', but 'program it how you want to control it.'
The seamless integration of the system does not mean that 'you have to find another connection solution', but that 'all mainstream protocols are supported'
Management is done in one set, not 'operate one machine at a time', but 'manage all tens of thousands of machines'
Industry norm: Most FFU manufacturers only provide standard products. There is not enough space for customers to modify the factory. There is too much dust so customers need to add protection. There is vibration and customers have to isolate themselves.
The difference of Aili Industrial: Based on the three underlying capabilities of self-developed motors, self-developed control systems, and full industry chain manufacturing, it can be deeply adapted to different working conditions. Just to name some customization directions:
Space customization: 70mm ultra-thin EFU, directly installed into the 100-120mm interlayer of semiconductor equipment, no design required
Customized for harsh environments: Protective FFU, sealed structure to prevent the intrusion of lithium battery conductive dust
In addition, the wind speed, size, filtration level, box material, control method, etc. can be configured as needed.
Practical implications for customers:
There is no need to modify the factory building for the equipment. It is not 'make do if it cannot be installed', but 'design according to your space'
There is no need to change equipment for the environment. It is not 'buy another one if it breaks', it is 'customized according to working conditions and verified according to scenarios'
There is no price increase for non-standard products. It is not 'double the price for customization', but 'self-developed and self-produced, with controllable costs.'
Industry norm: Clean room construction faces scattered suppliers - one for FFU, one for filters, and another for air showers. The specifications are not uniform, the delivery dates are not synchronized, and there is no after-sales coordination.
The difference of Aili Industrial: the product line covers primary, medium, high-efficiency/super-high-efficiency air filters, FFU, EFU, BFU, high-efficiency air supply outlets, air showers, transfer windows, clean benches, weighing rooms, sampling trucks, clean screens, purification boards, stainless steel products, etc.
Practical implications for customers:
One-time docking is not 'facing seven or eight suppliers', but 'one window to solve everything'
Unified standards are not 'each electrical control is different', but 'the specifications are consistent across the entire line'
Synchronized delivery is not 'waiting for this and that', but 'getting it in place together and coordinating after-sales service'
Aili Industry provides multiple types of FFU, which can be classified and selected according to maintenance methods, functional characteristics, application scenarios and size specifications, and non-standard customization is also supported.
Maintenance personnel can complete filter replacement on the ground without climbing, effectively reducing the risk of climbing operations.
It adopts the bottom replacement filter design, which takes less time to replace a single filter. It is suitable for clean rooms with a floor height of not less than 2.4m. The air volume range is 900-1500m³/h, the operating noise is ≤58dB, and the box material can be selected from different materials such as 304 stainless steel, galvanized plate, aluminum plate, and painted steel plate.
Maintenance personnel operate from the technical mezzanine above the suspended ceiling, without occupying the working space inside the clean room.
The top filter replacement method is used, which is the standard maintenance method of traditional FFU. It is suitable for clean rooms with sufficient maintenance space above the ceiling, and is suitable for conventional clean room ceiling installation scenarios.
Adapt to semiconductor micro-environments such as EFEM and Load Port to meet the cleaning needs of spaces with limited floor heights.
Specially developed for semiconductor manufacturing equipment and compact spaces, the thickness of the fan body is compressed to 70mm. It adopts self-developed DC motor and high-precision dynamically balanced aluminum alloy wind wheel. Optional PTFE boron-free ultra-fine filter. The control interface supports RS485/Modbus protocol, and the cabinet material can be selected from lightweight aluminum alloy or stainless steel.
Equipped with a DC brushless motor, it can save 30%-50% energy compared to AC FFU, and supports stepless speed regulation and intelligent group control.
Driven by a brushless DC motor, the power conversion efficiency is higher, and the average power is about 60W-180W. Supports 0-100% stepless speed adjustment. The operating noise is about 52-58 decibels, which is 5-7 decibels lower than AC FFU. Supports RS485/Modbus protocol to access the central monitoring system.
The motor and electrical system meet the requirements of explosion-proof specifications and are specially designed for flammable and explosive environments such as lithium battery new energy sources.
Targeted optimization of equipment materials, motor selection and electrical design is carried out for the actual process sections and explosion-proof zones of the lithium battery production line. It adopts explosion-proof motor and anti-static box material to meet the requirements of relevant explosion-proof regulations. We have expedited customization for a new lithium battery production line and completed production, distribution and on-site commissioning within 5 days.
The anti-static FFU integrated static elimination device neutralizes airflow charges in real time to avoid damage to precision electronic products caused by electrostatic discharge.
In view of the characteristics of semiconductor and electronic manufacturing, anti-static treatment options are available for the box material and filter. By integrating a static elimination device, the ionized air produces positive and negative ions, effectively neutralizing static charges in the airflow. Optional anti-static composite coating stabilizes surface resistance and effectively reduces dust adsorption.
Aili Industrial Stainless Steel FFU all-stainless steel box is corrosion-resistant and not easy to breed microorganisms. It is suitable for scenes with high hygiene requirements such as medicine and food.
The box body is made of SUS304 or SUS316L stainless steel, which has strong corrosion resistance and oxidation resistance. It is suitable for scenes with high hygiene requirements such as the food industry, biomedicine, and corrosive gas environments. The surface is finely polished for easy cleaning and disinfection, and the structural design reduces gaps and dead corners.
The wind speed of Aili Industrial's high-volume FFU can be customized to more than 2m/s to meet the process requirements for high-volume air supply in precision coating, drying and curing.
It is suitable for process scenarios that have high requirements on air supply volume, such as precision coating, drying and curing and other processes that require strong airflow to carry heat. The motor power and fan selection are re-matched according to high air volume requirements to ensure low noise and stable operation under large air volumes.
It is specially customized for mainstream placement machines such as Panasonic, ASM, and Fuji. The height of the body can be customized.
It can be directly and seamlessly mounted on the safety cover on the top of the placement machine without modification. Optional static-removing models, models with screens, etc. In addition to Panasonic, it can also be adapted to ASM, Fuji, Yamaha and other brand models.
Designed for EFEM, Load Port, Sorter, Stocker, OHT and semiconductor cleaning equipment, and supports linkage control with equipment PLC.
It has high requirements for air flow uniformity, no vibration and long-term continuous operation, and is suitable for various semiconductor equipment communication protocols. Typical application scenarios include EFEM equipment front-end modules, wafer transfer box interfaces, wafer sorters, wafer storage systems, OHT crane internal micro-environments and semiconductor cleaning equipment, etc.
It is suitable for TFT-LCD, AMOLED and other panel production lines to meet the differentiated cleanliness requirements of Array, Cell and Module processes.
In panel manufacturing, tiny dust or fibers can cause defects such as bright spots, dark spots, and dead pixels. Aili Industrial FFU can form a stable vertical laminar air supply with a stable wind speed of 0.45m/s, ensuring optimal particle settling efficiency. For AMC gaseous molecular pollutants, chemical filters can be used to remove acids, bases and organic matter. The cleanliness can meet the requirements of ISO 4-5 for LCD production and ISO 3-4 for OLED production.
Aili industrial lithium battery industry-specific FFU is suitable for pole piece coating, battery core winding, electrolyte injection and other process links, and can easily cope with high dust environments.
In the production of lithium batteries, metal debris and conductive dust directly affect battery performance and safety. Aili Industrial Protection FFU unit is equipped with HEPA or ULPA filter to efficiently intercept dust and fiber pollutants. Explosion-proof FFU can be used in the liquid injection area to eliminate the risk of static sparks and ensure production safety.
Aili Industrial FFU is widely used in various frontier fields that have strict requirements for air cleanliness:
Semiconductor manufacturing : wafer lithography, etching, thin film deposition, packaging testing, third-generation cleaning machine, EFEM equipment front-end module, Load Port wafer transfer box interface. Ultra-low vibration and ultra-low outgassing ULPA filter material is required to ensure nano-level process accuracy.
Panel display manufacturing : TFT-LCD array substrate process (thin film deposition, photolithography, etching), color film preparation, box forming process (orientation layer coating, friction orientation, liquid crystal injection), OLED evaporation, module assembly. Aili Industrial optimizes the airflow pattern for OLED, LCD lamination, inspection and other work stations to reduce panel production defects.
Photovoltaic manufacturing : Silicon wafer cleaning, diffusion texturing, PECVD coating, screen printing and other processes require strict control of fine dust and gaseous molecular pollutants to ensure cell conversion efficiency.
Biomedicine : GMP sterile workshop, vaccine filling line, freeze-dried preparation production, sterile preparation filling. A continuous and stable high-cleanliness environment is required to ensure drug safety.
Medical facilities : Class 100 clean operating room, stem cell laboratory, ICU ward. It needs to operate with low noise and vibration to ensure the safety of patients and the operating comfort of medical staff.
Lithium battery new energy : pole piece coating, battery core winding, electrolyte injection area. Optional protective FFU (prevents conductive dust intrusion) and explosion-proof FFU (eliminates the risk of static sparks) ensure battery performance and production safety.
Precision manufacturing : aerospace component assembly, OLED panel inspection, SMT patch line, precision mold processing. Micro-vibration control and a stable and clean environment are required to ensure product accuracy.
Precision optical coating : In coating processes such as optical lenses and filters, particles as small as 0.3 microns can cause film defects, and an ultra-clean environment is required to ensure coating quality.
Medical device manufacturing : Sterile medical device production, implant processing, testing and packaging, and other processes require a sustained and stable high-cleanliness environment to ensure product safety.
In vitro diagnostic reagent production : The diagnostic reagent filling line has extremely strict requirements for microbial control, which is related to medical safety and testing accuracy.
Data center : Server rooms and storage equipment are sensitive to dust. Fine particles can easily adhere to the hardware surface and affect heat dissipation and operational stability. Low noise and low vibration FFU are required to ensure long-term reliable operation of the equipment.
Food industry : High-cleanliness packaging workshops, dairy/beverage filling lines, and fermentation environment microbial control require corrosion-resistant and easy-to-clean stainless steel FFU to ensure food safety.
Fine chemicals : In the production of high-purity chemicals, precision ingredients, and product packaging, particulate matter and chemical gaseous pollutants need to be controlled to ensure product purity and consistency.
Universities and scientific research laboratories : Experimental environments such as microbial testing, precision instrument operation, and sample preprocessing require local high cleanliness to ensure the accuracy and repeatability of experimental data.
Q: What filter levels does Aili FFU support?
A: You can choose HEPA H13/H14 or ULPA U15~U17. Materials are available in fiberglass and PTFE.
Q: Can non-standard sizes or special functions be customized?
A: Yes. We accept non-standard customization of height, length and width, and also provide explosion-proof, anti-static, ultra-thin, stainless steel and other special models.
Q: What are the ways to replace the filter?
A: It supports top replacement, bottom replacement (bottom replacement), side replacement and other methods. Customers can choose according to on-site installation conditions.
Q: Compared with traditional AC fans, what is the energy-saving effect of the EC solution?
A: In actual project comparisons, EC motors combined with intelligent speed regulation can reduce energy consumption by about 35% to 40%. The electricity bill saving is obvious under long-term operation.
Q: What is the noise index?
A: Most models are within 57dB, and the silent model is within 48dB (the measuring point is located 1.2 meters below the filter).
Q: How long is the delivery cycle?
A: Since the core components are produced independently, the delivery time for conventional models is shorter. Please consult sales for confirmation.
Aili Industrial can supply about 500,000 FFU units every year and has served more than 2,000 customers around the world. Products must pass multiple tests in the R&D laboratory before mass production, and each finished product must undergo multiple performance tests before leaving the factory.
