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Semiconductor equipment, precision electronic equipment and other high-end manufacturing equipment require the integration of mechanical, electrical, process and clean air systems in a limited structural space.
The size and installation structure of traditional air filtration equipment may be limited by the internal space of the equipment.
Aili Industrial's 70mm ultra-thin EFU is designed to be ultra-thin for this application scenario. The ultra-thin fan structure reduces the space occupied by the air filtration module on the equipment side, and the product size, air volume, filter and control method are matched according to the equipment installation conditions.
Suitable for semiconductor equipment, EFEM, precision electronic equipment, optoelectronic equipment and other applications that require clean air at the equipment end.
EFU, the equipment-end fan filter unit , is an air filtration equipment for the local clean environment inside the production equipment or at the equipment end.
Unlike FFU, which is mainly installed on the ceiling of a clean room, EFU pays more attention to:
Equipment internal installation space
local clean area
Equipment structure integration
Equipment side air supply
Matching air volume and wind speed
filter resistance
control system interface
Cooperation with the overall structure of the equipment
Therefore, EFU is not simply a reduction of ordinary FFU, but needs to the equipment structure, installation space and air treatment requirements .be designed based on
Aili Industrial 70mm ultra-thin EFU adopts 70mm ultra-thin box structure。
The 70mm fan structure combined with the HEPA/ULPA filter module can form a typical overall working thickness of approximately 100mm.
This structure is especially suitable for: small spaces inside the equipment → top of the equipment → side walls of the equipment → local clean areas
Adopt a fan solution that matches the ultra-thin structure.
Support: AC fan/EC fan
For projects that require variable speed control, communication control or equipment system integration, EC fan solutions can be configured according to requirements.
According to the project cleanliness requirements, it can be configured:
HEPA/ULPA
The filtration level can be selected according to the specific product plan.
The box is not only responsible for the installation of fans and filters, but also needs to match the equipment structure.
Can be designed according to project requirements:
Overall dimensions | Installation hole positions | Air intake method
Air outlet method | Fixed structure | Wiring method
special interface
support:
Independent adjustment → RS485 → Modbus and other project-based control solutions
The fan structure can be as low as 70mm
Designed for applications with limited space inside the device.
Instead of simply shrinking the normal FFU, it's around:
Equipment space → Fan → Filter → Airflow → Control → Installation for overall matching.
Choose AC or EC fans according to different project requirements.
For equipment that requires variable speed control, communication control and system integration, EC control solutions can be further configured.
Choose the appropriate filter solution based on the cleanliness level and process requirements.
Available according to customer equipment:
Drawings → Installation space → Interface requirements → Control requirements
Carry out product customization.
Aili Industrial has:
Fan→ Motor→ Control system→ Filter→ Sheet metal→ EFU complete machine
manufacturing and R&D capabilities. The core components and the complete machine can be uniformly matched.
Space inside equipment is increasingly restricted
Semiconductor and precision manufacturing equipment usually require the integration of a large number of functional modules.
For example: mechanical movement mechanisms, process modules, electrical components, sensors, piping systems, vacuum systems, control systems, clean air systems, etc. These systems jointly occupy the internal space of the equipment.
Therefore, in addition to meeting air filtration and air supply requirements, the equipment-side air filtration module also needs to consider:
There is limited space available inside the device.
The EFU needs to match the overall structure of the device.
It needs to be determined according to the clean area inside the equipment.
The airflow resistance inside the filter and equipment needs to be considered.
Requires communication or linkage with the equipment control system.
This is also where the application logic of ultra-thin EFU is different from that of ordinary FFU.
Parameter items |
Technical parameters |
|---|---|
Product name |
Ultra-thin EFU |
product type |
Equipment Fan Filter Unit |
Fan structure |
Ultra-thin fan structure |
Product size |
Can be customized according to the project |
Reference product size |
500×400×70mm |
fan |
AC/EC |
Control method |
Independent adjustment/group control |
filter |
HEPA/ULPA |
filter level |
H13 / H14 / U15/U16/U17, etc., determined according to configuration |
Filter media |
Glass fiber, PTFE, etc., determined according to configuration |
Cabinet material |
SUS304 / SUS316 / aluminum alloy / sprayed steel plate, etc. |
Installation method |
Horizontal/vertical/special installation |
Installation structure |
Support customization |
size |
Support customization |
Air volume |
Support customization |
wind speed |
Support customization |
fan |
Support customization |
filter |
Support customization |
control system |
Support customization |
OEM/ODM |
support |
Semiconductor equipment manufacturers usually determine the EFU installation location based on the internal structure of the equipment.
Different projects may have: different sizes, different air inlet directions, different air outlet directions, different installation hole positions, different air volume requirements, different static pressure requirements, and different control interfaces.
Therefore, Aili Industry not only provides standardized products, but also supports customization according to customer equipment conditions.
As an EFU manufacturer in the entire industry chain, Aili Industry provides a full range of customized services
According to the internal space of the equipment: length → width → installation hole position → customization of the appearance structure.
Determine the air volume based on the internal air circulation of the equipment and the requirements of the target clean area.
Match the wind speed according to the internal cleanliness requirements of the equipment and process conditions.
According to: filter resistance → air duct resistance → internal resistance of the equipment
Determine the fan static pressure plan.
Support: AC → EC different fan solutions.
Support: HEPA → ULPA customization for different purification levels
Select the corresponding filter module according to the filtration level, air volume, resistance and space.
Support: independent adjustment → RS485 → Modbus and other project control solutions
It can be designed according to the equipment structure:
Horizontal installation → Vertical installation → Special installation
EFU is installed according to the internal space and airflow organization of the equipment to provide filtered air to the designated area.
Aili Industrial has the R&D and manufacturing capabilities of core components such as motors, fans, filters and control systems.
Design the EFU structure according to the internal height, width, installation location and interface conditions of the equipment.
Comprehensive consideration of air volume, static pressure, wind speed, filter resistance and air flow distribution.
Speed regulation, PLC linkage, RS485, Modbus and other solutions can be configured according to the equipment control system.
Conduct corresponding performance tests on fans, filters, control systems and the operating status of the entire machine.
Aili Industry has long been engaged in the R&D and manufacturing of clean equipment and core components. In EFU products, core manufacturing capabilities can cover:
Independently develops and produces fan-related products.
Motor matching according to fan and air handling requirements.
Independently develop control systems to support project-based control requirements.
Independently produces HEPA, ULPA and other air filtration products.
Independently complete the design and manufacturing of product boxes and structural parts.
Completion: design → component manufacturing → assembly → testing → delivery , forming a production chain from core components to the complete machine.
Ordinary products can be combined according to mature standard sizes. But ultra-thin EFU needs to be completed simultaneously in a limited space:
Fan→ Motor→ Air duct→ Filter→ Box→ Control
Space and performance matching between individual components. Aili Industrial has the manufacturing capabilities of fans, motors, control systems, filters, sheet metal and complete machines, so it can match the entire product rather than just processing a single box.
Semiconductor manufacturing equipment usually contains multiple process modules and functional areas, which have corresponding requirements for local air cleanliness, airflow organization, and internal space of the equipment. Aili Industrial's 70mm ultra-thin EFU can be configured according to the equipment installation space, air volume, wind speed, filtration level and control method to provide HEPA/ULPA filtered clean air inside the equipment or designated local areas.
Suitable for a variety of semiconductor and precision manufacturing equipment.
For wafer manufacturing front-end process equipment, the EFU structure and parameters are matched according to the internal space and clean air requirements of the equipment.
EFEM is an important front-end module for semiconductor equipment. EFU can be customized according to the internal space, installation location and air treatment requirements of EFEM to provide filtered clean air for relevant areas inside the equipment.
Semiconductor cleaning equipment has corresponding requirements for the clean air environment inside the equipment.
The 70mm ultra-thin EFU can be structurally designed and parameter matched according to the internal installation space, clean area, air volume and filtration requirements of the cleaning machine, and can be used for local clean air treatment inside the equipment.
Suitable for different types of wafer cleaning and related wet process equipment.
For the clean air requirements inside lithography-related equipment, the EFU solution can be designed based on the equipment space, installation structure, air volume and filtration level.
For applications where the internal space of the equipment is limited, the ultra-thin structure facilitates spatial matching of the equipment-side air filtration module.
Used for clean air filtration inside etching equipment or designated areas.
Product configuration can be performed based on equipment structure, target air volume, static pressure, filters and control methods.
Suitable for equipment-side clean air applications in PVD, CVD, ALD and other related thin film process equipment.
Match the EFU's fan, filter, air volume and installation structure according to the internal space and process environment requirements of the equipment.
EFU products are configured according to the clean air requirements and installation space inside the equipment. The size, filter and control method can be customized according to the equipment structure.
In view of the local clean air demand of chemical mechanical polishing-related equipment, the EFU scheme is designed based on the internal space and air treatment requirements of the equipment.
It is suitable for clean air applications at the wafer transfer, processing and other related equipment ends, and can be configured according to the air treatment requirements of different areas inside the equipment.
For detection, measurement and precision equipment that have requirements for the internal air environment of the equipment, ultra-thin EFU can be configured according to the installation space and clean air requirements.
Suitable for local clean air treatment of advanced packaging related equipment, customized according to equipment structure, installation space, filtration level and air volume requirements.
Semiconductor front-end equipment → EFEM → Semiconductor cleaning machine → Photolithography equipment → Etching equipment → Thin film deposition equipment → Ion implantation equipment → CMP equipment → Wafer processing equipment → Inspection and measurement equipment → Advanced packaging equipment
Wafer manufacturing equipment, semiconductor front-end equipment, EFEM, etc.
FPD, OLED and related equipment
Advanced packaging equipment and local clean areas.
Electronic components and precision manufacturing equipment.
Precision optics and related equipment.
Micro-nano processing equipment that requires clean air at the equipment end.
Requirement communication → Drawing/space confirmation → Air volume and filtration parameter confirmation → Fan and filter matching → EFU structural design → Sample confirmation → Product testing → Mass production → Delivery
EFU is the abbreviation of Equipment Fan Filter Unit, which is the equipment fan filter unit. It is mainly used for air filtration and air supply in the local clean environment inside the equipment or at the equipment end.
70mm mainly refers to the height of the ultra-thin fan structure. The overall installation size of the EFU combined with the filter needs to be determined based on the specific filter, box and product configuration. The typical solution given in your existing product information is a 70mm fan structure, and the overall working thickness is about 100mm when combined with the filter module.
Mainly for semiconductor equipment, EFEM, advanced packaging equipment, FPD/OLED equipment, precision electronic equipment and other equipment that require local clean air at the equipment end.
Can. Your existing ultra-thin EFU product information includes EC brushless motor solutions and supports RS485 and other control methods.
Can. Depending on specific project requirements, HEPA or ULPA filtration options can be selected.
Can. Aili Industrial supports OEM/ODM and can customize product size, air outlet shape, special wiring interface, etc. according to customer CAD drawings.
Can. The device-side EFU usually needs to be matched according to the device space, so it supports product size and installation structure customization.
FFU is mainly used for air filtration and air supply in clean rooms. The common installation location is the clean room ceiling; EFU mainly serves the local clean environment at the equipment end, with more emphasis on the matching of the internal space, installation structure and control interface of the equipment.
Can. Aili Industrial has the manufacturing capabilities of fans, motors, control systems, filters, sheet metal and clean equipment, and can provide customized solutions from core component matching to EFU complete machines according to project requirements.
If your device is present:
Limited installation space → Cleanliness requirements inside the equipment → HEPA/ULPA filtration requirements → Special air volume/wind speed requirements → Equipment control system integration → Special dimensions or installation structures
Aili Industrial can match the EFU solution based on the actual conditions of the equipment.
Equipment drawings → Installation space → Target air volume → Wind speed → Filtration level → Control method
Our engineering team can further confirm product solutions based on this.
Clean room equipment and core components R&D and manufacturing enterprise
Phone: 136 4625 8112
