How does EFEM air inlet chemical filtration correspond to equipment cleanliness requirements?

EFEM air inlet chemical filtration should simultaneously correspond to the particle, gas and airflow requirements of the equipment. Particle levels, local air paths and AMC targets need to be confirmed separately, and the performance of one filter cannot represent the cleanliness requirements of all equipment. EFEM is a microenvironment for wafer loading and transportation, and its air quality control involves multiple levels.

1. Determine the conditions through the device interface

It is necessary to check the inlet air volume, space, materials and sensitive gases, and confirm whether there is internal release after the filter section. Room data is not necessarily representative of the microenvironment.

Particle, gas and flow conditions inside an EFEM are different than in a clean room background. Equipment manufacturers usually give the particle level and AMC control requirements within EFEM, and the detection objects should be determined according to these requirements when selecting models. At the same time, the mechanical movement, carrier materials and wafer transfer process inside the EFEM will also produce releases, and there may be new sources of gas after the filter section. Aili Industry isIn the chemical filter equipment end package, the filter section is confirmed according to the EFEM inlet conditions and internal structure.Flat chemical filters are suitable for scenarios where the internal space of EFEM is limited. The relationship between levels and filtering requirements can be found inISO cleanliness level comparison。

2. Check the combination structure and verification

The chemical filter section and particle filter section should take into account powder loss, gas release, sealing and resistance. Airflow and associated contaminants are individually verified after installation.

EFEM air inlet chemical filtration is usually used in conjunction with particle filtration. The media in the chemical filter section may produce particles, which require downstream particle filtration to intercept them. At the same time, the resistance of the chemical filter section will affect the internal air volume of EFEM, which needs to be checked with the fan capacity of FFU or EFU. Aili Industry isIn the FFU chemical filter package, confirm the combination structure according to the EFEM internal space and air volume.Type V chemical filters are available as an alternative when depth is limited. For the relationship between combination structure and verification, please refer toHEPA FAQs and Selection Guide . The chemical filter FFU can be used as an independent circulation unit on the EFEM equipment side to treat particles and gases at the same time.

3. Examples of project judgment

When there is new material inside the equipment, the inlet filtration and internal sources can be checked at the same time to avoid only increasing the inlet filter material capacity.

When new materials or mechanisms are added inside the EFEM, the gas source may be transferred from the inlet to the interior. At this time, only improving the inlet filtration capacity may not be effective. The internal release should be investigated and the filtration position adjusted at the same time.

4. Application Check Points

5. Verification and subsequent use

Process areas, equipment entrances and protected locations may have different air conditions. Inspection points should be set up around the actual product or equipment usage location, and normal operation records should be kept. Environmental filtration can work with source, material and airflow measures, but cannot automatically cover contamination in unfiltered sections.

Aili Industry isIn the chemical filter EFEM supporting solution, the filtration section is confirmed according to the equipment interface and internal structure.Box-type chemical filters can be used in conjunction with EFEM in centralized fresh air treatment.

6. Related questions and answers

Can EFEM air inlet filtration cover all pollution inside the equipment?
cannot. The filter section can only process the air passing through it. The release of materials inside the equipment and the dust generated by the mechanism require additional investigation and treatment.

Can EFEM particle filtration replace chemical filtration?
cannot. Particle filtration and chemical filtration tasks are different and the AMC within EFEM needs to be evaluated separately.

The internal space of EFEM is small, how to install chemical filtration?
Flat or compact chemical filters can be used to be embedded inside the equipment, but installation space, resistance and maintenance conditions need to be checked.

7. Related articles

Chemical filter product series

FFU chemical filter

Flat chemical filter

HEPA FAQs and Selection Guide

What is a chemical filter FFU? The main difference from ordinary FFU?

8. Key points for selection and acceptance inspection

9. Aili Industrial products and equipment supporting equipment

Aili Industry provides chemical filters and clean air supply equipment selection packages. It can compare FFU package, box type, flat type and V-shaped products according to gas composition, treatment air volume and installation conditions. The manufacturing and supporting system covers the independent research and development and production of motors and fans, control systems, sheet metal, air filters and complete machine assembly, making it easy to jointly confirm the filter section, power and structural conditions. The specific gas effect, environmental suitability and service life still need to be verified based on the corresponding configuration data and actual working conditions.

learnChemical filter product series , check the products and air supply matching according to the project conditions. Clarify the goal → Check the conditions → Verify the effect → Arrange maintenance.