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Partial clean air supply of equipment｜Small size and thickness matching｜Customized installation interface
Aili Industrial EFU supporting ULPA ultra-high efficiency filter is installed at the filtration position of the equipment's fan filter unit to provide particle-filtered air to the designated process area of the equipment.
The product is configured around the internal space of the equipment, the air outlet range and the installation interface. U15, U16 or U17 grades, as well as glass fiber or PTFE filter media, can be confirmed according to project requirements. The filter is matched with the EFU fan, box and fixed structure, supporting equipment development and replacement of original filters.
Obtain supporting specifications→ Submit equipment space and interface diagram→
name |
content |
name |
content |
|---|---|---|---|
Supporting equipment |
EFU equipment fan filter unit |
filter level |
U15, U16, U17, confirm by model |
Appearance configuration |
Small, standard or non-standard sizes |
Thickness configuration |
Evaluated by space and performance requirements |
Filter material selection |
fiberglass or PTFE |
Install seal |
Confirm according to the box and interface structure |
Air supply requirements |
Air volume, face wind speed and air outlet range |
Matching form |
New machine matching, equipment modification, replacement and customization |
According to the available length, width, thickness and surrounding structure of the equipment, confirm the filter frame and installation position. When selecting models, reserve space for fixing, sealing, and disassembly and assembly, and avoid determining dimensions based only on visible openings.
Determine the effective air outlet range based on the areas that need to be protected, check the relationship between the air outlet surface and equipment openings, diversion structures and process components, and reduce the obstruction of the air outlet surface by frames or installation parts.
Small, long, or other rectangular formats can be evaluated based on equipment drawings. When reducing the size, the filtration area, target air volume and corresponding resistance are simultaneously confirmed.
The filter configuration can be confirmed together with the fan, box, air inlet space and control conditions to meet the local clean air supply needs of the equipment.
Parameter items |
Product configuration or confirmation content |
|---|---|
Product name |
EFU equipped with ULPA ultra-high efficiency filter |
Supporting equipment |
Aili Industrial EFU or other equipment fan filter unit confirmed by the interface |
filter level |
U15, U16, U17, confirmed according to finished product test results |
filter material |
Glass fiber or PTFE, confirmed according to process requirements |
Filter element structure |
Configuration according to size, air volume and resistance |
Overall dimensions |
Width W × Height H × Thickness D, support non-standard customization |
Effective air outlet size |
Confirm by frame, seal and equipment opening |
Operating air volume |
Confirm according to the local air supply requirements of the equipment |
initial resistance |
Provide corresponding model data under specified air volume |
Thickness requirements |
Also check the total thickness, filter area and allowable pressure drop |
Sealing method |
Gasket or liquid tank, confirm according to equipment structure |
Fixed method |
Cooperate with equipment pressing parts, buckles or other fixed structures |
Protection configuration |
Net protection and accessories are confirmed upon request |
Installation direction |
Confirm according to product airflow direction and equipment layout |
Testing data |
Efficiency, scanning leak detection and order agreement information |
The specific dimensions, air volume, resistance and usage conditions are subject to the corresponding model specifications and confirmed drawings.
When the equipment space is limited, you need to also confirm whether the filter can be installed and whether it can meet the air supply requirements after installation.
spatial conditions |
Product configuration focus |
|---|---|
Installation height is limited |
Check total filter thickness, space occupied by fixings and seals |
Narrow opening |
Confirm the effective air outlet area and required air volume |
Long strip air supply position |
Check the air distribution based on the box and fan layout |
Peripheral components are densely packed |
Reserve space for frame installation and sealing contact |
Maintenance access is restricted |
Confirm that the filter can be removed along the specified path |
Multiple filter combinations |
Check single size, splicing sealing and air volume distribution |
The thin configuration needs to be evaluated based on the filter material, filter element structure and operating air volume. The height of the EFU machine and the thickness of the filter are different parameters and should be noted separately.
The outer frame size of the filter is used for installation, and the effective air outlet size is used to confirm the actual air supply area. Frames, pressing parts, protective structures or equipment covers may block part of the air outlet surface.
matching items |
Confirm content |
|---|---|
protected area |
Which process locations require filtered air |
vent opening |
Does the opening size correspond to the effective air outlet surface? |
Peripheral occlusion |
Are the fixings, covers and equipment structures shielded from wind? |
Airflow direction |
Whether the air supply path meets the equipment requirements |
diversion structure |
Is it necessary to combine the equipment structure for diversion? |
Verify location |
Is performance measured on the filter outlet side or in the process area? |
The performance of the filter outlet surface and the actual air flow status in the process area should be verified according to respective requirements.
The internal space of EFU is usually compact, and the filter resistance needs to be considered together with the air inlet conditions, box channels and other air flow resistance.
Operating air volume: Confirm based on the local air supply volume or effective air outlet area required by the equipment and the target surface wind speed.
Filter resistance: Check the initial resistance of the new filter under the design air volume, and clarify the reference conditions for subsequent maintenance.
Air inlet conditions: Check whether the equipment structure restricts EFU air inlet to avoid attributing insufficient air volume caused by inlet obstruction to the filter.
Fan capacity: Confirm that the fan can provide the required air volume under the corresponding system resistance, and leave adjustment conditions suitable for maintenance requirements.
Aili Industrial can combine filters, fans and equipment spaces to help confirm the EFU supporting configuration.
A continuous seal needs to be formed between the filter and the EFU box, and at the same time it must be supported and fixed by a prescribed structure.
Installation project |
Confirm content |
|---|---|
Sealing contact surface |
Contact width, flatness and perimeter continuity |
Spacer configuration |
Surface, material and pressing conditions |
Tank configuration |
Slot and blade size, installation direction and matching space |
fixed position |
The location of buckles, pressure plates or other fasteners |
Force mode |
The fixing force acts on the frame to avoid compressing the filter material. |
Limiting structure |
Avoid filter misalignment or contact with equipment parts |
Disassembly and assembly path |
Removal method without damaging the filter material and sealing parts |
Snap-on and other fixing methods should be based on the specific EFU installation structure. Compatibility cannot be judged based on filter size alone.
Application location |
Supporting points |
Application location |
Supporting points |
|---|---|---|---|
EFEM designated air supply area |
Air outlet range, interface and air flow direction |
Wafer processing equipment |
Process area and material requirements |
Precision assembly equipment |
Local protection range and air supply conditions |
Optical inspection equipment |
Installation space and particle control |
Automated production equipment |
Fixed structure and equipment linkage conditions |
Advanced packaging equipment |
Process requirements and maintenance paths |
Clean unit on top of equipment |
Thickness, air inlet and installation openings |
Customized local clean module |
Drawing interface and complete machine verification |
Specific applications should be confirmed by the equipment process. Filtration levels, materials and airflow configurations are based on corresponding project requirements.
When replacing the filter, you should check the original product and equipment installation status, especially the effective air outlet size, sealing position and fixed structure.
Replacement situation |
Things to check |
|---|---|
Maintenance and replacement with the same specification |
Frame, thickness, air volume, resistance and sealing |
HEPA upgraded to ULPA |
Process requirements, fan capacity and complete machine re-verification |
Adjust filter thickness |
Filtration area, pressure drop and fixed structure |
Replace filter media |
Process material requirements and complete assembly suitability |
Original product discontinued |
Old nameplates, drawings, inspection data and equipment photos |
EFU matching from other manufacturers |
Cabinet interface, installation method and actual operating parameters |
Providing only the complete EFU model number may not be sufficient to identify replacement parts. It is recommended to also provide the old filter dimensions and installation photos.
Parameter items |
Please provide information |
|---|---|
Equipment purpose |
Equipment type and process area to be protected |
Installation space |
Available length, width, thickness and surrounding structure |
filter level |
U15, U16, U17 or specified testing requirements |
Air outlet range |
Effective air outlet size and equipment opening |
Operational requirements |
Air volume, target wind speed and measurement location |
resistance limit |
Allowable initial resistance, final resistance and fan parameters |
Installation interface |
Sealing, fixing, buckling or pressure plate structure |
Usage environment |
Temperature and humidity, process media and material restrictions |
Maintenance method |
Disassembly and assembly directions, operating space and replacement conditions |
Procurement arrangements |
Quantity, sample verification and batch delivery planning |
The filter factory inspection confirms the efficiency, scans leak detection and corresponding information according to the order agreement, and associates the product number with the inspection information.
After installing the EFU, check the sealing, fixation and actual air supply performance of the filter and box. Equipment acceptance should further check the wind speed, airflow status and particle control requirements in the process area.
For sample projects, it is recommended to complete the verification under the actual installation conditions of the equipment before confirming the batch product configuration.
Aili Industry covers air filter manufacturing, motor manufacturing, independent research and development and production of fans, control system development, sheet metal processing and complete machine assembly. It can jointly confirm products based on EFU installation space and operation requirements.
For equipment development projects, filter, box and fan configurations can be coordinated; for maintenance projects, replacement parts selection support can be provided based on original interfaces and operating parameters.
View Aili Industrial EFU products→
It can be evaluated and customized, and the air volume, filter area, resistance and installation interface must be confirmed at the same time.
Not necessarily, it also needs to meet the air supply and resistance requirements, and match the fixed and sealed structure.
The configuration can be confirmed based on the snap position, mounting frame and sealing contact surface.
Check the filter resistance, air inlet conditions, fan operation and control settings, locate the cause and deal with it.
It is necessary to check the fan capacity and installation conditions first, and then re-verify the equipment performance after replacement.
The filter installation position and interface diagram are provided for easier confirmation, and can also be combined with dimensions and photos for verification.
Please submit equipment installation space, filtration level, air outlet range, air volume and interface drawings. Aili Industry will help confirm the ULPA filter configuration based on the EFU structure and process conditions.
Consult about small size and thin configuration → Submit equipment installation drawings →
Confirm the air volume and interface requirements→Consult about replacement parts and sample parts→
Aili Industry - Provides EFU supporting ULPA filters and technical support for local clean air supply of equipment.
