Aili Industrial FFU matching chemical filter is a chemical air filtration product installed inside the FFU or on the air inlet side of the FFU. It is mainly used to control AMC air molecular pollutants in the clean room air.
The product is equipped with corresponding chemical adsorption materials according to different types of pollutants, and can perform air treatment for acidic gases, alkaline gases, VOCs, condensable organic matter and some process-related molecular pollutants.
The product adopts a modular design adapted to the FFU structure and can be customized according to FFU size, installation space, air volume, pollutant type and usage conditions. It is suitable for clean environments such as semiconductors, electronic manufacturing, pharmaceuticals, biotechnology, and laboratories.
FFU → Chemical Filtration → AMC Control → HEPA/ULPA → Clean Air
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FFU mainly uses fans to promote air circulation and controls particulate matter in the air through filters. In some clean environments that have requirements for air molecular pollutants, acidic gases, alkaline gases, VOCs and other molecular pollutants in the air also need to be treated.
Aili Industrial FFU matching chemical filter is designed according to the structure and installation space of the FFU. It can be installed inside the FFU or on the air inlet side to control specific gaseous pollutants through chemical adsorption and other methods.
Compared with filters that only target particulate matter, the selection of chemical filters requires attention to the type of pollutants, concentration, air volume, temperature and humidity, and target life cycle.
Particulate → HEPA/ULPA filtration
Gaseous pollutants → chemical filtration
Particulate matter + gaseous pollutants → FFU + HEPA/ULPA + chemical filtration
AMC refers to air molecular pollutants, which mainly refers to pollutants that exist in a molecular state in the air and may affect the clean environment and production process.
In semiconductor, electronic manufacturing, precision manufacturing and other environments, AMC control usually needs to be designed based on specific production processes and environmental testing results.
Aili Industrial FFU supporting chemical filters can select corresponding chemical filter materials according to target pollutants, and configure products according to the FFU structure.
Pollutant category |
Typical pollutants |
Filter material direction |
|---|---|---|
acid gas |
HF, HCl, H₂SO₄, HNO₃, SO₂, NO₂, etc. |
Acid gas chemical adsorption materials |
alkaline gas |
NH₃, amines, NMP, etc. |
Alkaline gas chemical adsorption materials |
VOC |
Toluene, acetone and other volatile organic compounds |
VOC adsorbent materials |
Condensable contaminants |
Silicones, plasticizers, etc. |
Targeted adsorption materials |
process related contaminants |
Boron, phosphorus, arsenic and other related compounds |
Targeted chemical adsorption materials |
Different pollutants require different chemical adsorption materials, and product configuration should be determined based on the actual pollutant type and concentration.
Acid gas is an important pollutant category in clean room AMC control.
FFU chemical filters can select targeted acid gas adsorption materials based on actual pollutants and are used to treat gaseous pollutants such as HF, HCl, H₂SO₄, SO₂, and NO₂.
Suitable for semiconductor, electronic manufacturing and other clean environments that require AMC control.
Acid gas detection → Material selection → FFU size matching → Chemical filtration
Alkaline pollutants such as ammonia and amines can be treated with targeted chemical adsorption materials.
Aili Industrial FFU chemical filters can be configured according to pollutant type, concentration, air flow rate and FFU installation space.
For semiconductor and electronics manufacturing environments, filter materials can be selected based on specific process areas and air quality requirements.
VOCs include a variety of volatile organic compounds, and the adsorption characteristics of different VOCs are different.
Aili Industrial can select corresponding adsorption materials according to the target VOC type for FFU circulating air or local air treatment in clean rooms.
Products can be used in electronic manufacturing, semiconductors, pharmaceuticals, laboratories and other environments where organic pollutants in the air are controlled.
Chemical filters can use activated carbon, chemical adsorption materials, ion exchange materials and composite adsorption materials, and combine them according to the target pollutants.
For different gases, different material formulas need to be selected, rather than using the same activated carbon for all pollutants.
Aili Industrial can configure corresponding chemical filter materials according to the type of pollutants and project requirements.
The FFU supporting chemical filter adopts a modular filtration structure, and the filter size and thickness can be designed according to the internal installation space of the FFU.
Structural composition |
Configuration direction |
Main function |
Customizable content |
|---|---|---|---|
Chemical filter materials |
Activated carbon, chemical adsorption materials, etc. |
Adsorption of specific gaseous pollutants |
Material type, formula |
Filter material structure |
Foldable etc. |
Increase effective filtration area |
pleat pitch, filter area |
frame |
Aluminum, galvanized steel, stainless steel |
Support filter structure |
Material, size |
Sealed structure |
EPDM etc. |
Reduce installation bypass |
Sealing materials and structures |
protective structure |
Metal mesh, etc. |
Protect filter material |
Material, mesh |
Installation structure |
FFU supporting structure |
Installation matching FFU |
Size, fixation method |
Features |
Product Description |
Features |
Product Description |
|---|---|---|---|
FFU supporting design |
Size matching based on FFU structure |
AMC control |
Treating gaseous molecular pollutants |
Various adsorbent materials |
Select materials based on contaminants |
VOC treatment |
Configurable VOC adsorption materials |
acid gas |
Supports acid gas filter materials |
alkaline gas |
Supports alkaline gas filter materials |
Modular structure |
Easy to install inside FFU |
Size customization |
Support non-standard sizes |
Pressure loss design |
Matching based on FFU air volume |
Sealed design |
Configure according to installation structure |
OEM/ODM |
Support equipment matching customization |
Multi-industry applications |
Semiconductors, electronics, pharmaceuticals, laboratories, etc. |
Parameter items |
Parameter content |
Parameter items |
Parameter content |
|---|---|---|---|
Product name |
FFU matching chemical filter |
brand |
Aili Industrial/DSX |
product type |
FFU chemical filter |
Filter objects |
AMC Air Molecular Pollutants |
chemical materials |
Activated carbon, chemical adsorption materials, etc. |
Material selection |
Tailored to pollutants |
filter structure |
Foldable etc. |
frame |
Aluminum, galvanized steel, stainless steel, etc. |
sealing material |
EPDM etc. |
Installation method |
Inside the FFU or on the air inlet side |
Filter thickness |
50mm, 70mm, etc. |
size |
Support non-standard customization |
Typical wind speed |
0.5m/s |
Air volume |
Determined according to FFU specifications |
Reference resistance |
30Pa, 45Pa, etc. |
Customized way |
OEM/ODM |
Dimensions |
thickness |
Reference wind speed |
Reference resistance |
|---|---|---|---|
287×592mm |
50mm |
0.5m/s |
45Pa |
508×508mm |
50mm |
0.5m/s |
45Pa |
592×592mm |
50mm |
0.5m/s |
45Pa |
610×610mm |
50mm |
0.5m/s |
45Pa |
610×915mm |
50mm |
0.5m/s |
45Pa |
531×1131mm |
50mm |
0.5m/s |
45Pa |
570×1170mm |
50mm |
0.5m/s |
45Pa |
600×1200mm |
50mm |
0.5m/s |
45Pa |
810×1010mm |
50mm |
0.5m/s |
45Pa |
915×1200mm |
50mm |
0.5m/s |
45Pa |
1165×1165mm |
50mm |
0.5m/s |
45Pa |
1175×1175mm |
50mm |
0.5m/s |
45Pa |
1200×1200mm |
50mm |
0.5m/s |
45Pa |
287×592mm |
70mm |
0.5m/s |
30Pa |
508×508mm |
70mm |
0.5m/s |
30Pa |
592×592mm |
70mm |
0.5m/s |
30Pa |
610×610mm |
70mm |
0.5m/s |
30Pa |
610×915mm |
70mm |
0.5m/s |
30Pa |
531×1131mm |
70mm |
0.5m/s |
30Pa |
570×1170mm |
70mm |
0.5m/s |
30Pa |
600×1200mm |
70mm |
0.5m/s |
30Pa |
810×1010mm |
70mm |
0.5m/s |
30Pa |
915×1200mm |
70mm |
0.5m/s |
30Pa |
1165×1165mm |
70mm |
0.5m/s |
30Pa |
1175×1175mm |
70mm |
0.5m/s |
30Pa |
1200×1200mm |
70mm |
0.5m/s |
30Pa |
HEPA filters are mainly used to filter particulate matter in the air, while chemical filters are mainly used to deal with specific gaseous pollutants.
In clean rooms that require simultaneous control of particulate matter and AMC, HEPA/ULPA filters and chemical filters can be configured according to the system structure.
Particulate Matter → HEPA/ULPA
AMC → Chemical Filter
Particulate matter+AMC → FFU+chemical filter+HEPA/ULPA
Chemical filter selection requires first determining the target pollutants, and then designing based on the FFU structure and air flow.
Target pollutants → Pollutant concentration → FFU air volume → Installation dimensions → Filtration thickness → Chemical materials → Allowable resistance → Use cycle
Customers can provide:
FFU model → FFU size → Installation space → Air volume → Target pollutants → Pollutant concentration → Temperature → Humidity → Use time → Replacement cycle
Pollutant type |
Material direction |
Application scenarios |
|---|---|---|
VOC |
VOC adsorbent materials |
Semiconductors, electronics, precision manufacturing |
HF, HCl |
Acid gas adsorbent materials |
Semiconductor and electronic clean room |
H₂SO₄ |
Acid gas adsorbent materials |
process clean area |
NH₃ |
Alkaline gas adsorption materials |
Semiconductor, electronic manufacturing |
Amines |
Alkaline gas adsorption materials |
process environment |
Acetone, toluene |
VOC/organic adsorbent materials |
Electronic manufacturing, laboratories |
Silicone |
Targeted adsorption materials |
Electronics, precision manufacturing |
ozone |
Corresponding chemical adsorption materials |
Fresh air and clean environment |
The semiconductor production environment has corresponding control requirements for particulate matter and molecular pollutants in the air.
FFU chemical filters can be installed inside the FFU or at corresponding air treatment locations, and the corresponding adsorption materials are selected according to the types of pollutants in different process areas.
In photolithography, etching, diffusion and other related areas, MAU, FFU, HEPA/ULPA and chemical filters can be combined to build a clean air treatment system.
MAU fresh air → chemical filtration → FFU cycle → HEPA/ULPA filtration → clean process area
Molecular pollutants such as VOCs, acidic gases, and alkaline gases in electronic manufacturing clean rooms need to be controlled based on the actual production environment.
Aili Industrial FFU supporting chemical filters can select corresponding materials according to different pollutants and customize them according to the FFU installation dimensions.
Pharmaceutical and biotech cleanrooms can be equipped with chemical filters based on the air quality requirements of the production area.
FFU chemical filters can be used as molecular pollutant control components in clean room air treatment systems and are matched with HEPA filters, MAU and FFU.
Laboratory air environments may involve different types of chemicals, so chemical filters need to select adsorbent materials based on the specific experimental environment.
Aili Industrial can provide FFU matching chemical filters based on the air volume, pollutant types and installation space of the laboratory air treatment system.
Aili Industrial also produces FFU, EFU, BFU, HEPA, ULPA, chemical filters, fans, motors and control systems.
For clean rooms that require AMC control, they can be configured according to the air handling system:
MAU → Chemical Filter → FFU → HEPA/ULPA → Clean Room
Chemical filters can also be integrated directly into the FFU system according to the specific clean room structure.
From filters to FFU, to fans, motors and control systems, Aili Industry has the independent production and supporting capabilities of related products, which facilitates systematic selection by equipment manufacturers and clean engineering projects.
Aili Industry supports OEM/ODM customization of FFU chemical filters, and can design products according to FFU model, installation space, air volume and pollutant type.
Customers can provide:
FFU model → FFU size → Installation dimensions → Filter thickness → Air volume → Target pollutants → Pollutant concentration → Operating temperature → Relative humidity → Replacement cycle → Installation method
Aili Industrial selects corresponding chemical filter materials based on actual working conditions, and completes the filter size, structure and sealing configuration.
Aili Industrial has a production base of approximately 30,000 square meters, and its products cover fans, motors, control systems, filters and purification equipment.
In the field of chemical filtration, we can provide FFU supporting chemical filters, V-type chemical filters and other chemical air filtration products; in the field of clean equipment, we can provide FFU, EFU, BFU, HEPA BOX, air shower and other products.
This product portfolio can meet different project needs from single chemical filters, to FFU air purification units, to clean room air handling systems.
industry |
Application area |
Main direction of pollutants |
supporting products |
|---|---|---|---|
semiconductor |
Photolithography, etching, diffusion areas |
Acid gas, alkaline gas, VOC |
MAU, FFU, HEPA, ULPA |
Electronic manufacturing |
Clean production area |
VOC, AMC |
FFU, chemical filter |
pharmaceutical |
clean room |
VOC and specific gases |
MAU, FFU, HEPA |
Biotechnology |
clean area |
specific gaseous pollutants |
FFU, chemical filter |
laboratory |
air handling system |
VOC and chemical gases |
FFU, MAU |
Precision manufacturing |
local clean area |
AMC |
FFU, EFU, chemical filter |
What is an FFU matching chemical filter?
The FFU matching chemical filter is a chemical filter installed inside the FFU or at the corresponding air inlet position to treat gaseous pollutants and AMC air molecular pollutants in the air.
What does the FFU chemical filter mainly filter?
It mainly deals with acidic gases, alkaline gases, VOCs, condensable organic matter and some process-related molecular pollutants.
Can FFU chemical filters handle HF?
Corresponding acid gas chemical adsorption materials can be configured according to HF concentration, air volume and operating conditions.
Can FFU chemical filters handle HCl?
Yes, corresponding acid gas adsorption materials can be selected for HCl.
Can FFU chemical filters handle ammonia?
Yes, alkaline gas chemical adsorption materials can be selected based on ammonia concentration and FFU air volume.
Can FFU chemical filters filter VOCs?
Yes, the corresponding adsorption material can be selected according to the specific VOC type.
Can FFU chemical filters be used with HEPA?
Can. Chemical filters mainly deal with gaseous pollutants, and HEPA/ULPA mainly control particulate matter. The two can be combined according to the clean room system design.
Can FFU chemical filters be customized in size?
Can. Aili Industry supports non-standard customization based on FFU size, installation space and filter thickness.
What are the thicknesses of FFU chemical filters?
Common configurations include 50mm, 70mm, etc., which can also be customized according to the FFU internal space and system requirements.
How to determine the air volume of FFU chemical filter?
A comprehensive selection needs to be made based on FFU air volume, filter size, filter area, material and allowable resistance.
How long does it take for the FFU chemical filter to be replaced?
The service life is related to the concentration of pollutants, air flow, chemical materials, operating time and environmental conditions. Maintenance and replacement should be carried out based on the actual operating status.
Can Aili Industrial customize products based on pollutant detection results?
Can. The corresponding chemical adsorption materials and product structures can be selected according to the target pollutants, pollutant concentration, air volume and usage conditions.
Can FFU chemical filters be used in semiconductor clean rooms?
Yes, semiconductor and electronic manufacturing are important application directions for FFU chemical filters.
Can Aili Industrial provide both FFU and chemical filters?
Can. Aili Industry also provides FFU and its supporting chemical filters, and can design matching products according to FFU size and system requirements.
If you are choosing FFU chemical filters, we can offer:
FFU model → FFU size → Installation dimensions → Filter thickness → Air volume → Target pollutants → Pollutant concentration → Operating temperature → Relative humidity → Replacement cycle → Installation method
Aili Industry can provide chemical filter material selection, filter size design and OEM/ODM customization services based on specific pollutants and FFU structures.
Aili Industrial | FFU, chemical filter, HEPA/ULPA and clean air treatment equipment manufacturer
