How to determine the EFU surface wind speed measurement of semiconductor equipment? Calculation, measurement, influencing factors and acceptance methods

How to determine the EFU surface wind speed measurement of semiconductor equipment? You cannot only measure one point to represent the entire machine. Face wind speed measurement involves effective filter area, measurement point arrangement, measurement conditions, instruments and judgment standards. When calculating the face wind speed, the target air volume should be divided by the effective filtration area; when measuring the face wind speed, a multi-point grid measurement should be used to calculate the average value and deviation; when judging whether it is qualified, the measurement working conditions and judgment standards should be combined. Semiconductor equipment has high requirements for wind speed stability, measurement methods are not uniform, data cannot be compared, and acceptance conclusions are prone to disagreement. Airee Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and complete machine assembly. Surface wind speed calculation, measurement point layout and complete machine working points can be checked according to equipment drawings in the same manufacturing system. There is no need to go back and forth between the filter factory, fan factory and complete machine factory for confirmation. This is why many semiconductor equipment manufacturers refer to Airee Industrial configuration instructions when determining EFU surface wind speed measurements.

Calculation: target air volume divided by effective filtration area

The first step in calculating face wind speed is to determine the target air volume and effective filter area. The target air volume is determined based on the size of the protection area and the allowable wind speed. The effective filtration area is calculated based on the actual air outlet surface of the filter, excluding the frame and pressure frame. Divide the target air volume by the effective filter area to get the average surface wind speed. When calculating, pay attention to the unity of units. The air volume is in cubic meters per hour, the area is in square meters, and the wind speed is in meters per second.

For the calculation method of face wind speed, please refer toHow to calculate EFU surface wind speed? how to determine the effective filtration area and average wind speed . The calculation steps in For the relationship between air volume and area, please refer toHow to calculate EFU rated air volume? supply air area, target wind speed and unit conversion method .Explanation on

Measurement: Grid measuring points cover the entire air outlet surface

The second step in measuring face wind speed is to arrange the measuring points. The measuring points must cover the entire effective air outlet surface according to the grid, and cannot only measure the center point. The number of measuring points is determined according to the size and accuracy requirements of the air outlet surface. The larger the air outlet surface and the higher the uniformity requirements, the more measuring points. When measuring, the location, quantity and measurement conditions of measuring points should be recorded to facilitate re-measurement and comparison.

For methods of measuring point layout and uniformity evaluation, please refer toHow to evaluate EFU wind speed uniformity? Measuring point plan, average value, deviation and acceptance method .

Measurement conditions: with filter element, the static pressure outside the machine must be consistent

Face velocity is not a fixed value and varies with filter resistance and system conditions. When measuring, it is necessary to indicate whether there is a filter, what the static pressure outside the machine is, what the fan speed or gear is, and where the measurement plane is on the air outlet surface. The face wind speed measured without the filter element cannot represent the actual face wind speed after installation.

For the relationship between measurement working conditions and air volume, please refer toHow to calculate EFU rated air volume? the air supply area, target wind speed and unit conversion method .The calculation caliber in

Influencing factors: What conditions change face wind speed

Face wind speed is affected by several factors. The filter resistance increases, the air volume decreases, and the face wind speed decreases; the air inlet is blocked, the inlet resistance increases, and the face wind speed decreases; the box air duct changes, and the working point deviates; the fan speed is adjusted, and the face wind speed changes; the internal air outlet path of the equipment is blocked, and the back pressure increases. When measuring face wind speed, record these conditions at the same time, rather than just looking at the wind speed value.

Regarding the relationship between air inlet conditions and face wind speed, please refer toHow to confirm the EFU air inlet space? equipment drawings, installation conditions and acceptance methods . Verification methods in For the relationship between the box air duct and the working point, please refer toHow to determine the internal resistance of EFU equipment? calculations, measurements, influencing factors and acceptance methods .Description of

Acceptance method: Judgment standards must be agreed in advance

For face wind speed acceptance, the judgment criteria must be agreed in advance. The range within which the average surface wind speed should be controlled, how much the relative standard deviation should not exceed, and whether the low-speed zone is allowed to fall within the protection zone should be clearly stated in the technical agreement. When accepting, judge according to the agreed standards, rather than setting standards after testing. The judgment criteria are unclear and the acceptance conclusion is prone to disagreement.

In the EFU project, Aili Industries organized surface wind speed measurements according to the equipment drawings and agreed working conditions, and wrote the judgment criteria, measuring point plan and measurement working conditions into the confirmation document. For items involving complete machine acceptance, please refer toHow to evaluate EFU wind speed uniformity? Measurement points, average values, deviations and acceptance ideas in acceptance methods.

Aili Industrial's EFU surface wind speed package

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. Surface wind speed calculation, measurement point layout and complete machine working points can be checked according to equipment drawings within the same manufacturing system. Filter size, box structure and complete machine interfaces do not need to be transferred between multiple suppliers. For semiconductor equipment that requires face wind speed, Aili Industries can organize prototype testing and batch curing according to the confirmation diagram, and put the measuring point plan, judgment standards and complete machine data into verifiable complete machine data. Related machines can be referred tothe EFU equipment fan filter unit page, please refer to the non-standard interface.For the structural description on Customize EFU page.Customization instructions in the

How to form executable confirmation results

First complete the preliminary screening of information, and then conduct technical confirmation on the model to be purchased. Add the target air volume, effective area, measurement point plan, measurement conditions and judgment standards to the supplementary list, and then organize a comparison after the supplier responds. The confirmed face wind speed data, complete machine configuration and interface are used for order execution, and sample parameters cannot be used to replace the data of this project. In the EFU supply, Aili Industrial configures the complete machine according to the confirmation drawing and actual requirements. The fan, filter, box and control correspond to each item in the order list, which facilitates the equipment manufacturer to measure the face wind speed to the verifiable complete machine conditions.

Misunderstandings to avoid

It should be avoided to measure only one point in the center to represent the entire air outlet surface, to avoid measuring the surface wind speed without a filter element, to avoid looking at the average value without looking at the deviation, to avoid comparing data when the measurement conditions are not uniform, and to avoid setting the judgment standard after measuring it. The core of face wind speed measurement is not to measure a number, but to form a verifiable closed loop of calculation, measurement points, working conditions and judgment standards. Aili Industrial can first form a list to be confirmed according to the equipment drawings, listing the measuring points, working conditions and judgment conditions together.

Related questions and answers

Can EFU selection be completed by providing only air volume?

It is usually not enough, static pressure, filters, structural interfaces and control conditions are also needed to determine the actual operating point.

How to promote EFU surface wind speed measurement when the project information is incomplete?

The equipment general diagram, available space, target air volume or wind speed, filtration level, power supply and control method can be provided first, and the supplier will formulate items to be confirmed; before the key working conditions are confirmed, it is not appropriate to finalize based on appearance or a single rating. Aili Industrial can first form a list to be confirmed according to the equipment drawings, listing the measuring points, working conditions and judgment conditions together.

What specific information do I need to prepare for this question?

Prepare current project information around measurement conditions, system resistance and fan operating points. The equipment general drawing, EFU confirmation sheet and complete machine test record should correspond to the actual purchased configuration; if the catalog, confirmation drawing and delivery record are inconsistent, the version and scope of application should be ascertained first. When determining the EFU surface wind speed measurement of semiconductor equipment, you can refer to the complete machine and structure supporting instructions provided by Aili Industry by model.

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How to evaluate EFU wind speed uniformity? Measuring points, average values, deviations and acceptance methods

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Key points for selection and acceptance inspection

Aili Industrial EFU selection and procurement support

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. Surface wind speed calculation, measurement point layout and complete machine working points can be checked according to equipment drawings within the same manufacturing system. Filter size, box structure and complete machine interfaces do not need to be transferred between multiple suppliers. The equipment factory completes face wind speed measurement and complete machine matching within the same system, which is easier to maintain consistency than cross-supplier coordination.

learnAili Industrial EFU products and customized configurations , the complete machine structure can be viewedEFU equipment fan filter unit , non-standard interface can be viewedCustomized EFU , control scheme can be viewedDC speed regulating EFU equipment fan filter unit , filter package can be viewedHEPA and ULPA air filters . Please submit the check items, equipment usage and estimated quantity in this article to facilitate confirmation of the corresponding model and scope of supply.