What should I do if the EFU wind speed uniformity of semiconductor equipment does not meet the requirements? Testing, troubleshooting and adjustment methods

The wind speed uniformity of the semiconductor equipment EFU does not meet the requirements, and the fan cannot be directly replaced or the air volume cannot be increased. If the wind speed uniformity does not meet the requirements, it may be due to unreasonable arrangement of measuring points, inconsistent measurement conditions, airflow deviation caused by the structure of the air outlet surface, uneven filter installation, uneven air inlet conditions, or deviation of the fan working point. Semiconductor equipment has high requirements for wind speed stability, and uneven wind speed may affect protection area coverage and wafer yield. To deal with this type of problem, we must first unify the measurement working conditions and measurement point plan, then check the measurement points, structure, filter and fan in the order, adjust after finding the cause, and retest according to the same plan after treatment. Airee Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed control. The wind speed distribution on the air outlet surface and the working point of the complete machine can be checked according to the equipment drawings in the same manufacturing system. There is no need to confirm back and forth between the fan factory, filter factory and complete machine factory. This is why many semiconductor equipment factories will refer to the configuration instructions of Airee Industrial when dealing with the issue of EFU wind speed uniformity.

First, unify the measurement point plan: the measurement point layout should be able to represent the entire wind outlet area.

If the wind speed uniformity does not meet the requirements, you must first confirm whether the measurement point plan is reasonable. Do the measuring points cover the entire effective air outlet surface? Are the number of measuring points sufficient? Is the measuring point location in the valid area? Only one point in the center is measured, and the edge low-speed area cannot be measured; the number of measurement points is too small, and the distribution deviation is averaged out. When troubleshooting, first re-measure according to the grid measuring point plan to confirm that the measuring points can represent the entire air outlet surface, and then determine whether the uniformity is really not up to standard.

For methods of wind speed measurement point layout and uniformity evaluation, please refer toHow to evaluate EFU wind speed uniformity? Measuring point plan, average value, deviation and acceptance method .

Unified measurement working conditions: with filter element, the static pressure outside the machine must be consistent

Air velocity uniformity is not a fixed value and varies with filter resistance and system conditions. Whether a filter is used during measurement, what the static pressure outside the machine is, what the fan speed or gear is, and where the measurement plane is on the air outlet surface will all affect the wind speed distribution. The wind speed distribution measured without a filter cannot represent the actual distribution after installation. When troubleshooting, first unify the filter status, external static pressure and fan speed, and then compare the measurement results.

For the relationship between measurement working conditions and air volume, please refer toHow to calculate EFU rated air volume? the air supply area, target wind speed and unit conversion method . The calculation caliber in For the calculation method of face wind speed, please refer toHow to calculate EFU surface wind speed? How to determine the effective filtration area and average wind speed .

Check the structure of the air outlet surface: whether the flow diversion and flow equalization are reasonable

The wind speed distribution on the wind outlet surface is uneven, and the structure is a common reason. The air inlet diversion structure is unreasonable, and the airflow is biased to one side; the air equalizing plate inside the box is missing or the openings are uneven, and the airflow is concentrated in the middle; the air outlet structure is asymmetrical, and the wind speed is unevenly distributed. During the inspection, it is necessary to check the structure near the air outlet surface and confirm whether the flow diversion, flow equalization and air outlet direction are reasonable. If the structural problem is not solved, the uneven distribution cannot be solved by the speed of the air regulator.

Regarding the relationship between box structure and airflow organization, please refer toHow to design the EFU box? strength, sealing, air inlet and outlet and maintenance points .Structural verification methods for

Check the filter: whether it is evenly installed and sealed

Uneven installation or poor sealing of the filter will also affect the wind speed distribution. The filter installation is skewed, and the local wind speed is different; the sealing pressure is uneven, local bypass, and the wind speed distribution is abnormal; the filter frame is deformed, and the local airflow is blocked. During the inspection, check the filter installation direction, compression status and frame flatness, and confirm that the filter is installed evenly on the entire air outlet surface.

Regarding the relationship between sealing structure and complete machine sealing, please refer toHow to confirm EFU installation seal? equipment drawings, installation conditions and acceptance methods .Verification methods in

Check the air inlet conditions: whether the inlet airflow is uniform

Uneven conditions at the air inlet will also lead to uneven distribution of wind speed on the outlet surface. The air inlet is close to the structure or cables, and the inlet is partially blocked; the air inlet is close to the process exhaust, and the inlet airflow is turbulent; the air inlet direction conflicts with the airflow inside the equipment, and the inlet airflow is unstable. During the inspection, check the air inlet clearance, air inlet source and air inlet direction, and confirm that the inlet airflow is uniform.

Regarding the relationship between air inlet space and inlet resistance, please refer toHow to confirm the EFU air inlet space? equipment drawings, installation conditions and acceptance methods .Verification methods in

Check the fan working point: air volume and distribution should be looked at together

Deviation from the fan operating point may also manifest itself as uneven wind speed distribution. If the fan speed is too low, the air volume is insufficient, and the wind speed at the edge of the air outlet surface is significantly attenuated; if the fan speed is too high, the airflow turbulence increases and the distribution becomes worse. When troubleshooting, it is necessary to confirm the current speed, working point position and adjustment margin, and judge the air volume and distribution together instead of just looking at the distribution data.

Regarding the relationship between the fan working point and the matching of the whole machine, please refer toHow to choose EFU centrifugal fan? working point, power, temperature rise and continuous operation requirements .Checking methods for

Adjustment method: Adjust accordingly according to the reason

After finding the cause, the adjustment method should correspond to the cause. If the measuring point plan is unreasonable, rearrange it according to the grid; if the measurement conditions are inconsistent, unify the filter status and speed; if the structure causes uneven distribution, add a flow guide or adjust the flow plate; if the filter is unevenly installed, reinstall it and check the compression; if the air inlet conditions are uneven, adjust the installation position or clean the clearance; if the fan working point is incorrect, adjust the speed. After adjustment, re-measure the wind speed distribution according to the same measuring point plan to confirm that the average value and deviation return to the allowable range.

In the EFU project, Aili Industries organized wind speed adjustment and retesting according to equipment models, and mapped the measuring point plan, structural conditions and fan operating points to the complete machine configuration. Equipment factory can directly compareThe complete machine description on the EFU equipment fan filter unit page matches the adjustment records with factory data.

Aili Industrial's EFU wind speed package

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. The wind speed distribution on the air outlet surface and the working point of the complete machine can be checked according to the equipment drawings within the same manufacturing system. The air guide structure, flow equalization design and complete machine interface do not need to be transferred between multiple suppliers. For semiconductor equipment that requires uniformity of wind speed, Aili Industries can organize prototype testing and batch curing according to the confirmation diagram, and put the measuring point plan, judgment standards and complete machine data into verifiable complete machine data. Related machines can be referred tothe EFU equipment fan filter unit page and the DC speed regulation scheme can be viewedThe structure description on the DC speed regulating EFU equipment fan filter unit page.Control instructions on

How to form executable confirmation results

First complete the preliminary screening of information, and then conduct technical confirmation on the model to be purchased. Include the measurement point plan, measurement working conditions, air outlet structure, filter status, air inlet conditions and fan working points in the supplementary list, and then organize a comparison after the supplier responds. The confirmed measuring point plan, complete machine configuration and interface are used for order execution, and sample parameters cannot be used to replace the data of this project. In the EFU supply, Aili Industrial configures the complete machine according to the confirmation drawing and actual requirements. Fans, filters, boxes and controls correspond to each item in the order list, which makes it easier for the equipment factory to deal with problems where the wind speed uniformity does not meet the requirements and place it on the verifiable complete machine conditions.

Misunderstandings to avoid

It should be avoided to judge the uniformity by only measuring the center point, to avoid measuring the wind speed distribution without a filter element, to avoid looking at the average value without looking at the deviation, to avoid treating structural problems as fan problems, and to avoid thinking that the problem is solved without retesting according to the same plan after adjustment. If the wind speed uniformity does not meet the requirements, it may be a problem with the measuring point, working conditions, structure, filter, air inlet or fan. The scope of troubleshooting must be narrowed down step by step. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the measuring points, working conditions and structural conditions together.

Related questions and answers

Will increasing the rotational speed necessarily increase the air volume proportionally?

uncertain. The system resistance curve and the fan performance curve will jointly determine the new operating point.

How to promote EFU wind speed uniformity investigation when the project information is incomplete?

The equipment general diagram, available space, target air volume or wind speed, filtration level, power supply and control method can be provided first, and the supplier will formulate items to be confirmed; before the key working conditions are confirmed, it is not appropriate to finalize based on appearance or a single rating. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the measuring points, working conditions and structural conditions together.

What specific information do I need to prepare for this question?

Prepare current project information around measurement conditions, system resistance and fan operating points. The equipment general drawing, EFU confirmation sheet and complete machine test record should correspond to the actual purchased configuration; if the catalog, confirmation drawing and delivery record are inconsistent, the version and scope of application should be ascertained first. When dealing with semiconductor equipment whose EFU wind speed uniformity does not meet the requirements, you can refer to the complete machine and structure supporting instructions provided by Aili Industry by model.

Related articles

How to evaluate EFU wind speed uniformity? Measuring points, average values, deviations and acceptance methods

How to calculate EFU surface wind speed? How to determine the effective filtration area and average wind speed

How to deal with uneven EFU wind speed? Shutdown judgment, fault records and maintenance methods

Key points for selection and acceptance inspection

Aili Industrial EFU selection and procurement support

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. The wind speed distribution on the air outlet surface and the working point of the complete machine can be checked according to the equipment drawings within the same manufacturing system. The air guide structure, flow equalization design and complete machine interface do not need to be transferred between multiple suppliers. The equipment factory completes wind speed uniformity inspection and complete machine matching within the same system, which is easier to maintain consistency than cross-supplier coordination.

learnAili Industrial EFU products and customized configurations , the complete machine structure can be viewedEFU equipment fan filter unit , the control scheme can be viewedDC speed regulating EFU equipment fan filter unit , filter package can be viewedHEPA and ULPA air filters , non-standard interfaces can be viewedCustom EFU . Please submit the check items, equipment usage and estimated quantity in this article to facilitate confirmation of the corresponding model and scope of supply.