How to write the low outgassing requirements of semiconductor FFU into the material and purchasing conditions
Why can’t we just write one sentence about low outgassing requirements?
Semiconductor clean rooms have control requirements for gaseous molecular contamination (AMC). Materials inside the FFU may release trace amounts of gas during operation, such as sealants, gaskets, coatings, cable insulation materials, and plastic parts. These releases may affect the process environment.
Therefore, semiconductor projects may put forward low outgassing requirements when purchasing FFU. However, if the purchasing conditions only state 'low outgassing' or 'clean grade material', the supplier and purchaser may have inconsistent understandings of the requirements. The outgassing results may be different under different materials, different testing methods, and different usage environments.
Low outgassing requirements should clearly define which materials are involved, what evaluation methods are used, under what conditions, and how they are verified and changed. Aili Industrial has complete production capabilities in FFU complete machine manufacturing and can provide configuration solutions according to project material requirements. For the basic structure of the FFU machine, please refer toAili Industrial FFU fan filter unit。
What materials need to be included
Low outgassing requirements should specify the range of materials involved. Materials that may be involved in FFU include: cabinet coatings or surface treatments; sealants and sealing strips; filter frames and sealing materials; cable insulation and jackets; controller housings and plastic parts; labels and tapes; lubricants and fastener surface treatments.
Different materials have different locations and exposure levels in the FFU. Releases from materials located close to the air supply path may be more likely to enter the clean area. Therefore, the range of materials can be classified by location and degree of exposure.
How to agree on the evaluation method
The evaluation method for low outgassing should be clear. Common methods include thermal desorption, gas chromatography-mass spectrometry, or other material release testing. The evaluation method should describe the test temperature, time, sample preparation and judgment indicators.
If the project has industry standards or corporate standards, they can be quoted in the procurement conditions. If there are no clear standards, the evaluation method can be determined in consultation with the supplier.
The evaluation method should be written into the technical agreement or purchasing conditions as the basis for acceptance. If you only write about low outgassing without writing the method, it will be difficult to judge whether it meets the requirements later.
How to explain the usage environment
The outgassing behavior is related to the usage environment. Temperature, humidity and operating conditions may affect material release. Therefore, the purchasing conditions should describe the use environment of the FFU, including temperature range, humidity range and operating mode.
For semiconductor clean rooms, the environment usually has temperature and humidity control. However, the internal temperature of the FFU may be slightly higher than the ambient temperature due to the fan operation. Material release test conditions can refer to actual usage conditions.
How to agree on change control
Low outgassing requirements also involve change control. If suppliers of sealants, cables or plastic parts are changed during FFU production, the new materials may need to be re-evaluated. Change control should clarify which material changes need to be notified to the project party and whether they need to be retested or confirmed.
Change records should be associated with the overall machine configuration version to facilitate subsequent traceability.
Verify and document how to do it
Low outgassing verification can be provided by the material supplier with a test report, or the FFU manufacturer can provide a material list and statement. For critical materials, the project party may require test reports or sample confirmation.
Verification records should include material name, supplier, test method, test results and applicable models. The records should correspond to the overall machine configuration.
Issues that should be confirmed in advance during project communication
In the confirmation stage of semiconductor FFU low outgassing requirements, it is recommended to confirm the following with the manufacturer: the scope of materials involved; evaluation methods and judgment standards; environmental conditions of use; material suppliers and test reports; change control requirements; verification and recording methods; correspondence with the complete machine configuration; whether prototype confirmation is required.
If you are formulating semiconductor FFU low outgassing purchasing conditions, you can visitAili Industrial FFU fan filter unit to learn about the complete machine configuration, you can also refer toChemical Filters and AMC Molecular Contamination Control Learn about AMC control solutions, or contact Aili Industries for material validation support.
in conclusion
The low outgassing requirements of semiconductor FFU should clarify the material scope, evaluation method, use environment and change control. It is difficult to judge whether sealants, gaskets, coatings and cables meet project requirements by only writing about low outgassing or clean grade materials. Verification records should correspond to the overall machine configuration, and changes need to be re-evaluated.
Aili Industrial has complete production capabilities in FFU complete machine manufacturing and can provide configuration solutions according to project material requirements. If you need to know more about semiconductor FFU material requirements, you can visitAili Industrial FFU fan filter unit , you are also welcome to contact Aili Industrial for project support.
