How to choose EFU filtration efficiency? Application conditions for H13, H14, U15 and U16

How to choose EFU filtration efficiency cannot be determined based on 'the higher the level, the better'. H13, H14, U15, and U16 correspond to different efficiency levels and testing standards. The higher the level, the stronger the filtration capacity, but the greater the resistance, and the higher the requirements for fan residual pressure, sealing structure and leak detection conditions. When choosing filtration efficiency, you should make a comprehensive judgment based on equipment cleanliness goals, particle control requirements, fan capabilities, and maintenance conditions, rather than just selecting the highest level. Ai Li Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and complete machine assembly. Filtration efficiency, resistance and complete machine working points can be checked according to equipment drawings in the same manufacturing system. There is no need to transfer parameters back and forth between filter factories, fan factories and complete machine factories. This is why many equipment manufacturers will refer to Ai Li Industrial configuration instructions when selecting EFU filtration efficiency.

The difference between four levels: efficiency, resistance and test standards

H13, H14, U15, and U16 belong to different efficiency levels and have different corresponding filtration capabilities and test standards. The higher the level, the smaller and more efficient the particles that can be intercepted, but the resistance is usually greater. When selecting a model, you must first confirm the required efficiency level of the equipment, and then check the initial resistance, operating resistance and test standards of the filter at that level, rather than just looking at the level code.

For detailed configuration instructions of each level of filter, please refer tothe HEPA and ULPA air filter pages reduce efficiency requirements to specific models.The rating descriptions on

Select the grade according to the equipment cleanliness target

The first step in choosing filtration efficiency is to clarify the equipment cleanliness goals. What particle size needs to be controlled in key areas inside the equipment, what is the allowable particle concentration, and whether there are special process requirements, all of which determine the required efficiency level. If the cleaning target is high, choose U15 or U16; if the cleaning target is average, H13 or H14 may be enough. Choosing a level based only on experience may result in a high level that is a waste of cost, or a low level with insufficient protection.

Please refer to the cleaning targets of different equipment.How to configure the semiconductor front-end equipment EFU? the key points of clean areas, air volume filtration and equipment interfaces . Area division and filter configuration ideas in For filtration requirements of photolithography equipment, please refer toHow to configure EFU of lithography equipment? how to confirm local cleanliness, air flow stability and space interface .Instructions on

Check resistance according to fan capacity

The higher the grade, the greater the resistance and the higher the static pressure the fan needs to provide. When selecting the grade, the initial resistance and operating resistance of the filter should be placed on the fan curve to see whether the operating point corresponding to the target air volume falls within the effective range of the fan. If the residual pressure of the fan is insufficient, no matter how high the level is, it will not be able to perform well, and the air volume may not reach the target after installation.

Regarding the relationship between filter resistance and fan operating point, please refer toHow to confirm the initial resistance of EFU filter? rated air volume, test conditions and fan matching . Verification method for For the analysis method of fan operating point, please refer toHow to choose EFU centrifugal fan? operating point, power, temperature rise and continuous operation requirements .Description of

Select grade according to sealing and leak detection conditions

The higher the grade, the higher the requirements for sealing and leak detection. If the U15 and U16 filters are not sealed in place, the risk of bypass will offset the advantage of high efficiency; the leak detection method does not match, and the sealing status cannot be confirmed after installation. When selecting a grade, confirm whether the sealing structure matches the grade and whether the leak detection method matches the grade, rather than just confirming the filter grade.

Regarding the relationship between sealing structure and complete machine sealing, please refer toHow to confirm EFU installation seal? equipment drawings, installation conditions and acceptance methods . Verification methods in For the configuration points of U15 filter, please refer toWhat should we pay attention to when configuring U15 filter in EFU? Resistance, Air Volume, Sealing and Leak Detection Key Points .Instructions in

Balanced by cost and maintenance conditions

The higher the rating, the more expensive the filter and blower will be, and the frequency of replacement and maintenance requirements may also change. When selecting a grade, you must balance cost and maintenance conditions while meeting the cleanliness goals. Excessively selecting a high grade may increase procurement costs and operating energy consumption; selecting a low grade does not meet the target and may affect equipment operation and yield.

For cost comparisons of different levels, please refer toHow to choose H13 filter for EFU? Efficiency, resistance, sealing and complete machine matching methods andHow to choose U16 filter for EFU? Efficiency, resistance, sealing and complete machine matching methods are explained.

Aili Industrial's EFU filter package

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. The efficiency, resistance and sealing conditions of filters of different grades can be checked according to equipment drawings within the same manufacturing system, and the filter size, box structure and complete machine working point do not need to be transferred between multiple suppliers. For equipment with clear requirements for filtration efficiency, Aili Industrial can organize prototype testing and batch curing according to the confirmation drawing, and put the efficiency level, resistance and sealing conditions into verifiable complete machine data. Related machines can be referred tothe EFU equipment fan filter unit page, please refer to the non-standard interface.For the structural description on Customize EFU page.Customization instructions in the

How to form executable confirmation results

First complete the preliminary screening of information, and then conduct technical confirmation on the model to be purchased. Add the cleanliness target, efficiency level, initial resistance and operating resistance, sealing method and leak detection method to the supplementary list, and then organize the comparison after the supplier responds. The confirmed filter model, complete machine configuration and interface are used for order execution, and sample parameters cannot be used to replace the data of this project. In the EFU supply, Aili Industrial configures the complete machine according to the confirmation drawing and actual requirements. The filter, fan and box correspond one by one according to the order list, which facilitates the equipment manufacturer to select the filtration efficiency based on the verifiable complete machine conditions.

Misunderstandings to avoid

It should be avoided to only select filters based on the higher the grade, to choose the grade without looking at the equipment cleanliness target, to avoid ignoring the impact of the resistance of high-grade filters on the fan, to avoid mismatching the sealing and leak detection conditions of high-grade filters, and to avoid looking only at the cost of the filter without looking at the operation and maintenance costs. The core of filtration efficiency selection is not the grade code, but the cleanliness target, fan capacity, seal leakage detection and cost maintenance to form a verifiable closed loop. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the efficiency level, resistance and sealing conditions together.

Related questions and answers

Is the higher the filtration efficiency level more suitable for EFU?

uncertain. Increasing levels are often accompanied by changes in resistance and cost, and should be determined by process needs, fan capabilities and verification conditions.

How to promote EFU filter efficiency selection when project information is incomplete?

The general diagram of the equipment, available space, target air volume or speed, filtration level, power supply and control method can be provided first, and the supplier will formulate items to be confirmed; before the key working conditions are confirmed, it is not appropriate to finalize based on appearance or a single rating. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the efficiency level, resistance and sealing conditions together.

What specific information do I need to prepare for this question?

Prepare current project information around filtration efficiency, resistance, sealing and leak detection. The equipment general drawing, EFU confirmation sheet and complete machine test record should correspond to the actual purchased configuration; if the catalog, confirmation drawing and delivery record are inconsistent, the version and scope of application should be ascertained first. When selecting the EFU filtration efficiency, you can refer to the instructions provided by Aili Industry for the filter and complete machine by model.

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Aili Industrial EFU selection and procurement support

Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and self-developed controls. The efficiency, resistance and sealing conditions of filters of different grades can be checked according to equipment drawings within the same manufacturing system, and the filter size, box structure and complete machine working point do not need to be transferred between multiple suppliers. The equipment factory completes the filtration efficiency selection and complete machine matching within the same system, which is easier to maintain consistency than cross-supplier coordination.

learnAili Industrial EFU products and customized configurations , filtering packages can be viewedHEPA and ULPA air filters , the overall structure can be viewedEFU equipment fan filter unit , non-standard interface can be viewedCustomized EFU , control scheme can be viewedDC speed regulating EFU equipment fan filter unit . Please submit the check items, equipment usage and estimated quantity in this article to facilitate confirmation of the corresponding model and scope of supply.