How do FFU and EFU divide their labor in a Class 100 clean room?

In class 100 clean roomFFU fan filter unit andThe division of labor of the fan filter unit at the EFU equipment end is divided according to the air supply range: FFU is responsible for air supply to the whole room from the ceiling to maintain background cleanliness; EFU is responsible for independent air supply inside the equipment or local spaces to protect key processes. The installation positions, airflow logic and matching methods of the two are different and cannot replace each other. When the division of labor is unclear, problems such as insufficient coverage of the whole room or insufficient internal protection of the equipment may easily occur. Aili Industrial's product line covers both FFU for ceiling scenarios and EFU for equipment-side scenarios. In the same 100-level project, you can compare and select between the two installation methods, instead of looking for separate quotes from suppliers and piecing them together.

1. Divided by service scope: FFU is the factory side, EFU is the equipment side

FFU is usually installed on the ceiling of a clean room to serve the macro environment of the entire factory and is a factory-side equipment. It forms a stable one-way flow by covering a large area, sending clean air into the clean area and maintaining the particle concentration in the whole room.-1

The EFU is installed directly inside the process equipment or close to the equipment, and is designed to provide precise terminal air supply for photolithography machines, etching machines, cleaning machines, glue coating and development equipment, etc. It does not undertake the task of purifying the whole room, but only protects the workpieces and key processes inside the equipment. The background cleanliness of the Class 100 clean room is maintained by FFU, while the more sophisticated layer of protection inside the equipment is maintained by EFU. Aili Industry isWhen selecting HEPA/ULPA filters , confirm the level according to the protection object. The equipment-side EFU can match the air supply mode according to the wafer path and cavity structure. The relationship between levels and particle limits can be found inISO cleanliness level comparison。-1-8

2. The installation method is different from the air flow logic: self-weighted sealing vs rigid fixing

FFU is generally installed horizontally and relies on its own weight, ceiling keels and filters to achieve sealing. Its airflow covers the large space from the ceiling downwards, and cooperates with the lower return air to form a whole-room airflow organization. Installation is relatively simple, and maintenance can be performed from below or above the suspended ceiling.-1

The installation method of EFU is more complicated, with two forms: horizontal installation and vertical installation. The box and filter are usually fixedly connected with bolts and nuts, and the whole machine and the machine are rigidly fixed by special brackets. Its airflow guidance is more precise, requiring higher static pressure to overcome the complex resistance inside the equipment and deliver clean air to the surface of the wafer or workpiece. Aili Industry isthe EFU equipment end fan filter unit, confirm the fixing method according to the equipment structure and installation direction.When matching The ultra-thin EFU provides a compact installation solution when space on the top of the equipment is limited. Please refer to the key points of the interface installed on the device side.EFU FAQ and technical support。-1-8

3. Differences in working conditions: The back pressure faced by the EFU is not a fixed value

The back pressure faced by the EFU is not a fixed value. Structures such as the robotic arm, stage, and chamber door inside the equipment will create additional resistance, which will change with the process movements. Therefore, EFU requires stronger static pressure capacity, thinner box design and stricter vibration control, and the technical requirements are usually higher than that of general-purpose FFU.-3-8

FFU faces a relatively stable ceiling space. The working point is mainly affected by filter resistance and return air back pressure. The matching logic is different from the equipment-side EFU. Ai Li industrialFFU fan filter unit andThe fan filter unit at the EFU equipment end checks the working points according to the corresponding working conditions in their respective product lines.The FFU computer group control system records the air volume and operating status of the zones, making it easy to compare the actual performance of the two types of equipment with the design values. For working point matching methods, please refer toFFU FAQ and technical support。

4. The combination of the two in a Class 100 clean room: background protection + local enhancement

The typical division of labor is: the ceiling FFU maintains background cleanliness, and the EFU establishes local protection inside the equipment. The background area of ​​the Class 100 clean room is covered by FFU, reaching the particle concentration level of ISO Class 5; EFU provides more precise air supply inside key equipment to protect wafers or workpieces from being contaminated by particles during transportation and processing.

Aili Industrial's product line covers both aspects. There areFFU fan filter unit , equipped on the equipment sideEFU equipment side fan filter unit , both can be used together in the same project. FFU is responsible for full room coverage, and EFU matches the air outlet pattern according to the machine back pressure and cavity structure.The FFU computer group control system can manage wind speed and pressure difference by area, allowing the background area and equipment to maintain operating status respectively. Please refer to the local protection scheme inside the equipment.ULPA ultra-high efficiency filter FAQ and selection guide。

5. Common misuses to avoid

Using EFU to replace FFU coverage in the whole room does not have enough service coverage and the cleanliness of the whole room cannot be maintained. When FFU is used to replace the EFU inside the equipment, it is difficult for ceiling airflow to enter the equipment cavity, and key internal processes cannot be effectively protected. The two working points are configured according to the same set of parameters. Ignoring the difference in machine back pressure faced by the EFU will lead to insufficient or fluctuating air volume at the equipment end.

When confirming the division of labor, first clarify the cleanliness target of the whole room and the location of key processes, then check the ceiling coverage of FFU and the equipment end interface of EFU respectively, and finally confirm the airflow boundary between the local area and the background area. Aili Industry isNon-standard ULPA filters andultra-thin EFU equipment end project, the air supply boundary is confirmed according to the wafer path and mechanism action.In the FFU fan filter unit ceiling solution confirms coverage based on room layout and return air conditions. For verification of division of labor boundaries, please refer toHEPA FAQs and Selection Guide。

6. Related questions and answers

Can a Class 100 clean room only use EFU?
cannot. The interior or local space of EFU service equipment cannot maintain the cleanliness of the entire room. Full room coverage still requires FFU or centralized air supply system.

Can FFU and EFU use the same filter?
Yes, but the size, sealing method and installation interface must match respectively. The box structures of FFU and EFU are different, and the filters cannot be directly interchanged.

The equipment is located in a Class 100 clean room. Does it still require EFU inside?
need. Compliance of room conditions does not mean that the internal equipment meets the standards. Mechanical movement, workpiece handling and door opening may become local sources of pollution. Local air supply inside the equipment needs to be separately evaluated.

7. Related articles

ULPA ultra-high efficiency filter FAQ and selection guide

EFU equipped with ULPA ultra-high efficiency filter

FFU equipped with ULPA ultra-high efficiency filter

HEPA FAQs and Selection Guide

8. Key points for selection and acceptance inspection

9. Product matching and technical support from Aili Industrial

Aili Industrial has a production base of approximately 30,000 square meters. The manufacturing system covers motors, fans, control systems, sheet metal, air filters and complete machine assembly. FFU and EFU can be matched in the same system. Ceiling sideThe FFU fan filter unit is responsible for full room coverage, equipment sideThe EFU equipment end fan filter unit matches the air outlet type according to the machine back pressure and cavity structure;Ultra-thin EFU provides a compact solution when space on the top of the device is limited.The FFU computer group control system can manage wind speed and pressure difference by area, allowing the background area and equipment to maintain operating status respectively.HEPA/ULPA filters, confirm them separately according to the different judgment conditions of the whole room and the equipment end.When selecting Non-standard ULPA filters can customize the interface according to the equipment structure. Provide process goals, installation drawings, operating conditions and acceptance requirements to further communicate the division of labor and configuration suggestions between FFU and EFU. The specific parameters and test range are based on the confirmed model and technical documents.