How to choose U15 or U16 for EFEM? Wafer area air volume and uniformity verification

EFEM's choice of U15 or U16 needs to be confirmed based on process objectives, test standards, air volume distribution, resistance and material requirements. A higher grade does not mean that the performance of the entire wafer area will necessarily improve. The difference between U15 and U16 lies in the efficiency level, but the performance of EFEM in the wafer area does not only depend on the filter level - the uniformity of the air supply, whether the air volume is sufficient, the air flow stability when the mechanism is in action, and material outgassing. These factors jointly determine whether the wafer is protected during the transportation process. If the level is selected one level higher, the resistance will increase and the air volume may decrease. If the system does not have the corresponding margin, it may affect the performance of the wafer area. Aili Industry isThe fan filter unit at the EFU equipment end can match the grade and fan configuration according to the air volume requirements and space conditions of the EFEM.ULPA ultra-high efficiency filter provides U15/U16 gears.Ultra-thin EFU and small size models can be configured according to the EFEM structure.

1. First clarify the equipment requirements: wafer area goals, operating status and return air conditions

List the particle targets, carrier and door status, mechanical actions, return air and exhaust air in the wafer area, and confirm the test position and operating mode.

Before choosing U15 or U16, you must first clarify what EFEM needs to achieve. What particle size and concentration level are targeted for particle control in the wafer area, under what conditions the test is conducted (static or dynamic), how much mechanical action and carrier door opening affect the airflow, and what the return and exhaust conditions are - these inputs determine the level requirements and air volume requirements. Aili Industry isHEPA/ULPA filters, confirm the gear according to the particle size and protection range.When selecting When matching the EFU equipment end fan filter unit, confirm the air volume requirement according to the EFEM action status.Non-standard ULPA filter projects can confirm the installation conditions according to the wafer area structure. The relationship between levels and filtering requirements can be found inISO cleanliness level comparison。

2. Compare the complete configuration: Check the filter element, fan and sealing interface under the same air volume

Check the filter element data, fan margin, effective area and sealing interface under the same air volume conditions, and adjust the size or structure if necessary instead of directly changing the grade.

Replacing U15 with U16 improves efficiency but usually also increases resistance. If the fan margin is insufficient and the air volume decreases, the airflow coverage in the wafer area may become poor. When comparing, you should check under the same target air volume: what is the resistance of U16 at this air volume, whether the existing fan can be maintained, whether the effective filtration area is sufficient, and whether the sealing interface is compatible. Aili Industry isIn the selection of ULPA ultra-high efficiency filter, the resistance data of U15 and U16 are provided according to the target air volume.FFU fan filter unit andThe fan filter unit at the EFU equipment end can check the working point according to the resistance change.The FFU computer group control system records the air volume and operating parameters, and the caliber is consistent when compared. The relationship between filter resistance and fan matching can be referred toHEPA FAQs and Selection Guide。

3. Verify the wafer area: air volume, uniformity and protection under actual action

Confirm the installation integrity, air outlet uniformity and protection boundary under actual operation, and add AMC and material release data as needed.

After the level is determined, verification should cover three aspects: installation integrity (whether the seal between the filter and the box is effective), air outlet uniformity (whether the wind speed distribution along the wafer path is consistent), and protection under actual action (the particle concentration at the wafer when the robot moves and the carrier door opens and closes). AMC and material outgassing requirements are evaluated individually by process and cannot be inferred from the ULPA rating. Aili Industry isWhen supporting the fan filter unit at the EFU equipment end , the air outlet direction and uniformity conditions can be confirmed according to the EFEM structure.The FFU computer group control system records the operating air volume and equipment status, which can be compared with actual actions during verification;PTFE HEPA/ULPA filters can be evaluated for low outgassing requirements. For methods of wafer area verification, please refer toULPA ultra-high efficiency filter FAQ and selection guide。

4. When the air volume of the U16 sample is insufficient after installation, the complete machine should be rematched.

When the air volume of the U16 sample is insufficient after installation, the whole machine should be rematched, and the result that the filter element efficiency is qualified should not be retained. Insufficient air volume means that the airflow coverage and particle removal capabilities are reduced, and the actual protection of the wafer area may not meet expectations.

Aili Industry isIn the EFU equipment end fan filter unit EFEM project, when the air volume is insufficient after the upgrade, the adjustment plan is evaluated from three aspects: filter area, fan configuration and air outlet structure.The small size EFU equipment fan filter unit provides different configuration options when space is limited.The structure of non-standard ULPA filters can be adjusted according to the EFEM space. Please refer to the method for adjusting the air volume after the upgrade.EFU FAQ and technical support。

5. Related questions and answers

Is U15 necessarily not as suitable for EFEM as U16?
Applicability depends on the matching of process and system, and cannot just be sorted by grade numbers.

What should I do if the air volume drops after EFEM selects U16?
The fan margin and filter area should be checked and adjusted from the filter area, fan configuration or air outlet structure, rather than just retaining the efficiency index.

Can EFEM's AMC requirements be solved by ULPA grade?
cannot. ULPA is responsible for particle filtration, AMC and material outgassing requirements need to be evaluated individually by process.

6. Related articles

ULPA ultra-high efficiency filter FAQ and selection guide

Ultra-thin EFU

Small size EFU equipment fan filter unit

PTFE HEPA

7. Key points for selection and acceptance inspection

8. Product matching and technical support from Aili Industrial

Aili Industry isThe fan filter unit at the EFU equipment end matches the grade and fan configuration according to the air volume requirements and space conditions of EFEM.ULPA ultra-high efficiency filter provides U15/U16 gears and provides resistance data according to the target air volume.Ultra-thin EFU and small size models are configured according to the EFEM structure.HEPA/ULPA filter selection is based on the determined particle size and protection range.The fan filter unit at the EFU equipment end is equipped to confirm the air volume demand according to the EFEM action status.The non-standard ULPA filter project confirms the installation conditions according to the wafer area structure;FFU fan filter unit andThe EFU equipment end fan filter unit is equipped with a working point to check according to the resistance change.The FFU computer group control system records air volume and operating parameters.The fan filter unit at the EFU equipment end is matched with the EFEM structure to confirm the air outlet direction and uniformity conditions.The FFU computer group control system records the operating air volume and equipment status, and compares them with actual actions during verification;PTFE HEPA/ULPA filters are evaluated for low outgassing requirements. When the air volume is insufficient after the upgrade, the filter area, fan configuration and air outlet structure will be evaluated and adjusted.Small size EFU equipment fan filter units are available in different configuration options. Provide process objectives, installation drawings, operating conditions and acceptance requirements, and can further communicate ULPA standard specifications, non-standard interfaces, samples and batch matching. The specific parameters and test range are based on the confirmed model and technical documents.