How to distinguish the humidity tasks of air conditioning boxes in OLED production environments from those of process equipment?

Humidity requirements for OLED production should be differentiated between factory background air, local clean areas and the internal environment of process equipment. The air-conditioning box is usually responsible for air treatment within its agreed range. Just because a certain process is sensitive to moisture, the special conditions inside the equipment cannot be directly used as the air supply index of the entire workshop.

Map process requirements to control space item by item

The craftsman shall explain the sensitive process, exposure location and allowed conditions, and then check whether the product is always in a controlled equipment or local environment. If local equipment has a dedicated drying or gas supply, its connection with the factory air and the impact of leakage need to be confirmed. Measuring methods for background environments and equipment cavities may also be different, and readings cannot be mixed.

The background of the factory should include the service area, personnel activities and general heat and moisture load; the local environment should include openings, transfers, interfaces and air exchange with the factory; the inside of the equipment should include the independent control and energy supply conditions specified by the process equipment side. The three types of spaces correspond to different responsible entities and cannot just be given a humidity number. What control objectives should be clarified when selecting a constant temperature and humidity air conditioning box? Please refer toWhat control objectives should be clarified when selecting a constant temperature and humidity air conditioning box?。

The background environment of the factory is borne by the air-conditioning box

The humidity of the factory background environment is usually handled by an air conditioning box or MAU, with the goal of maintaining personnel comfort, preventing general condensation and meeting regional environmental requirements. The humidity control range of the background environment is generally wider, the measuring points are arranged in return air or representative areas, and the control accuracy requirements are lower than those of the internal environment of the equipment.

How the fresh air tasks of the clean room MAU correspond to the process exhaust air, please refer toHow does the fresh air task of the clean room MAU correspond to the process exhaust? . Circulating air handling units should be selected based on which indoor loads, please refer toWhat indoor loads should the circulating air handling unit be selected based on?。

Partially clean areas may be more sensitive to moisture

Local clean areas, such as transfer lanes, buffer rooms, or local protective enclosures, may have additional requirements for humidity. These areas are connected to the background environment of the factory, and the humidity is affected by both background air and local air supply. The local environment may require independent air supply or local drying, which cannot be controlled solely by the background air conditioning box.

The panel shows how the air-conditioning box in the workshop copes with large-area air supply zones. Please refer toHow does the panel display air-conditioning box in the workshop deal with large-area air supply zones? . Why external gas may still enter if the clean room pressure difference is qualified? Please refer toIf the clean room pressure difference is qualified, why can external gas still enter?。

The internal environment of the equipment is usually the responsibility of the process equipment party

There may be independent humidity controls, dry gas supplies or sealed chambers inside OLED process equipment. Humidity requirements inside the equipment are usually much stricter than in the factory setting and are the responsibility of the equipment owner to implement and verify. The purpose of the air conditioning box is to provide background air that meets the equipment inlet requirements, not to replace the humidity control inside the equipment.

What on-site data is required for chemical filtration of the air inlet of lithography equipment? Please refer toWhat field data is needed for chemical filtration of the air inlet of lithography equipment? . How EFEM air inlet chemical filtration corresponds to equipment cleanliness requirements, please refer toHow does EFEM air inlet chemical filtration correspond to equipment cleanliness requirements?。

Avoid duplicating tasks before configuring equipment

Write each humidity requirement into a responsibility matrix, indicating which set of equipment implements it and where it is inspected. For conditions that exceed the scope of conventional cooling and dehumidification, the technical route and energy requirements should be evaluated separately, and it cannot be directly promised that ordinary air-conditioning boxes can be achieved. The division here is used to clarify requirements, and specific indicators are still determined by the actual process.

Please refer to the pollutant information required before configuring the air conditioning box with chemical filtration.What pollutant information is required before the air conditioning box is equipped with chemical filtration? . What unchangeable conditions must be determined first for non-standard customization, please refer toWhat unchangeable conditions should be determined first for non-standard customization of air-conditioning boxes?。

The measurement location and acceptance boundaries must be agreed separately.

Different measuring instruments, sampling locations and evaluation periods may be used in the background environment, local areas and equipment interiors. They should be tested separately during acceptance, and the data from one room measurement point cannot be used to represent the internal environment of the equipment. The equipment party is responsible for the internal acceptance of the equipment, and the acceptance of the air-conditioning box is carried out according to the agreed measuring points.

How to determine the installation and calibration requirements for air conditioning box temperature and humidity sensors, please refer toHow to determine the installation and calibration requirements for air conditioning box temperature and humidity sensors? . What is the difference between air supply accuracy and room control accuracy? Please refer toWhat is the difference between air supply accuracy of air conditioning box and room control accuracy?。

Aili industrial supporting equipment

Aili Industrial can check the air treatment and EFU and other supporting facilities according to the clear division of labor between the factory building and the equipment. Please keep the boundaries of each control space when submitting project information. Aili's industrial manufacturing end covers independent R&D and production of motors and fans, control systems, sheet metal, air filters and complete machine assembly. Air conditioning boxes, EFU and terminal filter interfaces can be matched in the same package; non-standard configurations can be adjusted according to background environment and local area requirements.

Product form can be viewedAir handling unit andFan box page; clean air supply package can be combinedFFU fan filter unit andEFU equipment end fan filter unit verification; terminal particle filtration can be combinedHEPA/ULPA filter confirmation; when it comes to gaseous pollution control, you can communicate separatelyChemical filter solutions. The specific humidity control range, applicable conditions and delivery scope still need to be verified based on the corresponding configuration data and on-site working conditions. The actual effect is subject to on-site debugging and performance test results.

Submit project parameters:https://ailigy.com/contactus.html

Related questions and answers

Can the internal humidity requirements of OLED equipment be directly used as an air supply indicator for air conditioning boxes?
cannot. There is usually an independent humidity control inside the equipment. The air-conditioning box is responsible for the background environment or equipment entrance conditions. The boundaries of the two responsibilities should be agreed separately.

Are the background environmental humidity control accuracy requirements high?
It is generally lower than the internal environment of the equipment, but the specifics still depend on the requirements of the process area and should be determined separately by area.

Can Aili Industrial help delineate humidity control boundaries?
The humidity task division can be checked based on the process area, equipment interface and air conditioning box service scope. The specific plan needs to be confirmed according to the project conditions.

Related articles

1. What control objectives should be clarified when selecting a constant temperature and humidity air conditioning box?

2. How does the fresh air task of the clean room MAU correspond to the process exhaust?

3. How does EFEM air inlet chemical filtration correspond to equipment cleanliness requirements?

4. How to determine the installation and calibration requirements for air conditioning box temperature and humidity sensors?

Key points for selection and acceptance inspection