How to choose between ULPA in equipment and ULPA on clean room ceiling? Installation and air supply boundaries

within the deviceThe differences in selection between ULPA filters and clean room ceiling ULPA are mainly in the protection of boundaries, spaces, airflow paths and maintenance methods. The same level of filtration may require completely different interfaces and testing arrangements. The ULPA inside the equipment and the ULPA on the ceiling appear to be ULPA, but their 'service objects' are different: one protects the workpieces and mechanisms inside the equipment, and the other protects the operating area and personnel environment in the room. The service objects are different, and the air supply boundaries, installation methods and acceptance conditions are also different. Aili Industrial's product line also covers ceiling scenariosFFU fan filter unit and equipment side scenariosFor the EFU equipment-end fan filter unit , you can compare and select between two installation methods in the same project, instead of looking for separate quotes from suppliers and piecing them together.

1. Clarify the objects of protection: pay attention to the workpiece inside the equipment, and pay attention to the room and personnel on the ceiling.

Pay attention to the movement area of ​​the workpiece and mechanism in the equipment. The air supply from the ceiling needs to be combined with the room, personnel and return air systems. The qualified room cannot be directly presumed to be the internal compliance of the equipment.

The protection objects of ULPA in the equipment are the workpiece surface, transmission mechanism and cavity environment. The judgment points for particle control are often at specific locations inside the equipment; the protection objects of ceiling ULPA are the operating area and the overall environment in the room, and the judgment points are arranged according to the room sampling rules. The qualification standards of the two are different. In a clean room where the cleanliness of the room meets the standard, the internal equipment may still exceed the standard due to dust generated by the mechanism or the door opening. Aili Industry isWhen matching the fan filter unit at the EFU equipment end, confirm the air supply boundary according to the position of the workpiece inside the equipment and the action of the mechanism.FFU fan filter unit ceiling solution confirms coverage based on room layout and return air conditions. The relationship between levels and filtering requirements can be found inISO cleanliness level comparison。

2. Compare installation conditions: the equipment space may be narrower, the air ducts may be shorter, and there may be linkage actions

The equipment space may be narrower, the air ducts may be shorter, and there may be linkage movements; the ceiling system needs to coordinate the module, load-bearing, maintenance channels and multiple modules.

The installation space of ULPA in the equipment is limited by the equipment structure. The box size, air outlet direction and replacement path must match the equipment. The outlet side of the fan also faces the mechanical arm, carrier and other structures, and the back pressure changes with the movement. The installation space of suspended ceiling ULPA is relatively regular, but it is necessary to coordinate the ceiling module, keel load-bearing, access channels and joints between multiple modules. Aili Industry isNon-standard ULPA filters andIn the equipment-side supporting of ultra-thin EFU , the structure is determined according to the net size of the cavity and the range of movement of the mechanism, and the ceiling solution isWhen matching the FFU fan filter unit, confirm the box form according to the ceiling module and load-bearing conditions. Please refer to the key points of the interface installed on the device side.EFU FAQ and technical support。

3. Determine the acceptance conditions respectively: equipment doors, mechanism actions and room operation modes must be written clearly.

Pay attention to the actual installed air volume, completeness, uniformity and protection zone status, and record the equipment door, process exhaust or room operation mode.

The ULPA acceptance conditions within the equipment must cover the actual operating status of the equipment: door opening and closing, mechanism movement, and the entry and exit of the stage may change the airflow path and local particle concentration. The acceptance conditions of ceiling ULPA are determined according to the room operation mode: empty, static or dynamic. The number of personnel and equipment operating status must be stated in the agreement. The two types of working conditions cannot be applied to each other. Aili Industry isWhen ULPA ultra-high-efficiency filters are delivered, we can cooperate with the project party to clarify the applicable acceptance status.The FFU computer group control system records partition operating parameters to facilitate comparison with the actual operating status during acceptance. Please refer to the method for determining the acceptance working conditions.HEPA FAQs and Selection Guide。

4. When the equipment is located in a clean room, the internal mechanism may still produce particles.

A piece of equipment is located in a clean room and internal mechanical actions may still generate particles, so local air supply needs to be evaluated individually. Meeting the standard of room cleanliness does not mean that the internal environment of the equipment meets the standard. The friction of the internal moving mechanism of the equipment, the handling of workpieces and the opening of the door may become local sources of pollution.

Aili Industry can combine the equipment-side solution withThe fan filter unit at the EFU equipment end is configured separately, and the air supply direction is determined according to the location of the pollution source inside the equipment and the workpiece protection requirements, rather than relying on room conditions to cover the inside of the equipment. Whether ULPA for suspended ceilings can be installed directly into the equipment also requires rechecking the size, sealing, resistance and protection boundaries, and cannot be interchanged simply based on the same grade. Please refer to the configuration points for local protection inside the equipment.ULPA ultra-high efficiency filter FAQ and selection guide。

5. Related questions and answers

Can ULPA used for suspended ceilings be directly installed with equipment?
Dimensions, sealing, resistance and protective boundaries need to be rechecked and cannot be interchanged simply based on the same grade.

If the equipment is located in a clean room, does it still require an in-equipment ULPA?
It needs to be judged based on the exposure of wafer or workpiece and the dust generated by the equipment. Room conditions cannot automatically represent internal protection.

Can the acceptance conditions inside the equipment and on the ceiling be shared?
cannot. The door opening and closing and mechanism movements must be covered in the equipment, and the ceiling must be determined according to the room operation mode. The working conditions of the two are different.

6. Related articles

ULPA ultra-high efficiency filter FAQ and selection guide

EFU equipped with ULPA ultra-high efficiency filter

FFU equipped with ULPA ultra-high efficiency filter

HEPA FAQs and Selection Guide

7. Key points for selection and acceptance inspection

8. Product matching and technical support from Aili Industrial

Aili Industrial's product line also covers ceiling scenariosFFU fan filter unit and equipment side scenariosEFU equipment-side fan filter unit can be compared and selected between two installation methods in the same project.The EFU equipment end fan filter unit is equipped with a fan filter unit to confirm the air supply boundary according to the position of the workpiece inside the equipment and the mechanism action.The FFU fan filter unit ceiling solution confirms the coverage according to the room layout and return air conditions;Non-standard ULPA filters andThe structure of the ultra-thin EFU is determined based on the net size of the cavity and the range of movement of the mechanism. The ceiling plan determines the box form based on the ceiling module and load-bearing conditions.The delivery of ULPA ultra-high efficiency filters can be coordinated with the respective applicable acceptance status.The FFU computer group control system records partition operating parameters for easy acceptance control. Provide process objectives, installation drawings, operating conditions and acceptance requirements, and can further communicate ULPA standard specifications, non-standard interfaces, samples and batch matching. The specific parameters and test range are based on the confirmed model and technical documents.