How to set the boundary between the operating area and the construction area when semiconductor FFU is put into production in phases
Why phased production requires boundary management
Semiconductor projects usually have a long construction period and may be put into production in phases. Some areas will be put into operation first, while construction will continue in other areas. The operating area needs to maintain cleanliness and process stability, and there is dust, vibration and personnel activities in the construction area.
If there is no effective boundary between the operating area and the construction area, construction dust may enter the operating area through the shared return air, ceiling mezzanine or personnel passage, affecting the process. Construction vibrations may also affect precision equipment. Therefore, staging requires management of the boundaries between operating and construction areas.
FFU provides clean air supply in the operating area, but in boundary management, FFU is only part of the system. Boundaries also involve partitions, pressure differentials, return air paths, and personnel management. Aili Industrial has complete production capabilities in FFU complete machines and semiconductor project supporting, and can cooperate with the project to carry out phased production boundary planning. For the basic structure of the FFU machine, you can refer toAili Industrial FFU fan filter unit。
How to identify boundaries
Boundary identification is the first step in management. It is necessary to confirm the boundary between the operating area and the construction area. The boundary may be a wall, a partition, a passage or a shared mezzanine. There may be openings, doors, transfers, or pipeline crossings at the boundary.
When identifying boundaries, you should also confirm whether the two areas share return air, fresh air, or ceiling space. If shared, contamination may spread through shared paths.
After the boundary is identified, it can be marked on the drawing and the locations that need to be isolated or controlled can be confirmed.
How to set up temporary partitions
Temporary partitions can limit construction dust and personnel movement. The form of partition can be hard partition wall, soft curtain, temporary fence or pressure difference isolation. Partitions should be as continuous as possible to reduce openings.
If there are doors or passages on the boundary, buffer rooms or air curtains can be set up. Personnel entering and exiting the construction area should change clothes or be cleaned. The entry and exit of materials should be controlled to avoid bringing dust into the operating area.
Temporary partitions should be inspected regularly to ensure they are in good condition.
How to control pressure difference
Differential pressure control prevents contamination from flowing from the construction area to the operating area. Usually, the construction area is maintained at a slight negative pressure and the operation area is maintained at a positive pressure. In this way, air flows from the operating area to the construction area, reducing the reverse entry of dust.
Differential pressure control needs to confirm that the fresh air, return air and exhaust air can support it. If the exhaust air in the construction area increases, the supplementary air in the operation area needs to be adjusted accordingly. The pressure difference should be continuously monitored and any abnormalities should be dealt with promptly.
How to deal with shared return air and ceiling space
Special attention is required if the operational area and the construction area share return air or suspended ceiling space. Construction dust may enter the operating area through the shared mezzanine.
The treatment methods include: setting up partitions in the shared mezzanine to block the air flow path; adjusting the return air path so that the return air in the construction area does not pass through the operation area; filtering or separately discharging the return air in the construction area; and adding protection on the air inlet side of the FFU in the operation area.
For shared mezzanines, please refer toHow much air volume will be lost if the FFU air inlet is blocked by the bridge (Note: This link is an example of the FFU product page, please refer to the corresponding page on the site for specific air inlet content) to understand the air inlet conditions.
How to adjust the operation strategy
During the phased production period, the FFU operation strategy of the operating area may need to be adjusted. For example, increase the positive pressure in the operating area, increase the air supply volume, and strengthen filter monitoring. If there is construction activity near the boundary, local protection or temporary filtration can be added.
The operating strategy should be adjusted according to the construction stage and restored after the construction is completed.
How to do stage acceptance
After each stage of construction is completed, the boundary area should be inspected and accepted. The acceptance content includes: partition integrity; pressure difference recovery; operating area cleanliness; FFU operating status; return air path; filter status.
After passing the acceptance, you can move to the next stage or adjust the boundaries. Acceptance records should be retained.
Issues that should be confirmed in advance during project communication
During the phased production boundary management stage of semiconductors, it is recommended to confirm the following with the designer and FFU manufacturer: the boundary between the operating area and the construction area; shared return air and ceiling paths; temporary partition scheme; pressure difference control requirements; personnel and material entry and exit management; FFU operation strategy; monitoring and acceptance methods; construction phase adjustment plan.
If you are planning semiconductor staging boundary management, you can visitAili Industrial FFU fan filter unit to learn about the complete machine configuration, you can also refer toFFU/EFU group control touch screen controller andFFU computer group control system to learn about the control scheme, or contact Aili Industrial for project support.
in conclusion
When semiconductors are put into production in phases, the boundaries between the operational area and the construction area should be managed. Boundary identification, temporary partitions, pressure difference control, shared return air treatment and operation strategy adjustment are the main links. After the area that is not in production is shut down, it may affect the operating area through shared return air or ceiling space. Phase acceptance can confirm boundary effects.
Aili Industrial has complete production capabilities in FFU complete machines and semiconductor project supporting, and can cooperate with the project to carry out phased production boundary planning. If you need to know more about semiconductor FFU applications, you can visitAili Industrial FFU fan filter unit , you are also welcome to contact Aili Industrial for project support.
