Number of views: 4379 Author: Aili Industry Release time: 2026-11-22 Source: Ai Li Industrial
Which devices the 70mm ultra-thin EFU is suitable for cannot just be answered by 'devices with tight space'. The 70mm thickness is to solve the problem of limited installation space inside the equipment, but the ultra-thin structure will change the fan suction conditions, filter effective area and heat dissipation conditions. Which equipment is suitable should be judged based on the internal space of the equipment, target air volume, filtration level and maintenance methods. 70mm ultra-thin EFU is usually used in semiconductor equipment, EFEM, lithography equipment, precision optical equipment, SMT placement machines and other scenarios where the internal space is compact but local cleanliness is required. Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and complete machine assembly. For the 70mm ultra-thin model, the size, air volume, heat dissipation and maintenance conditions can be checked in the same technical confirmation according to the equipment drawings. This is why many equipment manufacturers will refer to the Aili Industrial compact solution description when selecting 70mm ultra-thin EFU.
The core value of the 70mm ultra-thin EFU is the clear height. The vertical space left for the EFU inside the equipment is limited, and the EFU with a regular thickness cannot be installed. The 70mm thickness can be installed within the limited clear height. However, the thickness is only an external parameter. During installation, it also depends on the installation path, air inlet clearance, removal direction and maintenance space. The internal clear height of the device is 70mm, which does not mean that a 70mm EFU can be installed directly. You must also confirm the installation path and fixing method.
Dimensions |
What should be confirmed |
FAQ |
|---|---|---|
Available clear height |
Actual vertical space at installation location |
Only give nominal thickness |
Installation path |
Equipment internal transportation and seating space |
Got stuck halfway through installation |
Air inlet clearance |
Available space around entrance |
Sticking structure causes resistance to rise |
Change direction |
Disassembly and assembly directions of filter and fan |
Cannot be maintained after installation |
Ai Li industrialThe 70mm ultra-thin EFU page lists the appearance and installation instructions by model. When checking the dimensional conditions, the equipment manufacturer can directly correspond to the specific model and compare the internal net dimensions of the equipment with the unit appearance on the same picture.
The air volume and static pressure of the 70mm ultra-thin EFU cannot be directly used as the data of conventional models. The thin box limits the fan suction conditions and internal air duct space. The working point of the same fan in the 70mm box is different from that of the conventional box. The filter area is also limited by the thickness. At the same air volume, the wind speed increases, and the resistance and noise may change. When selecting a model, check the target air volume, external static pressure and input power based on the complete machine test data of the 70mm model.
Performance items |
What should be confirmed |
Impact on 70mm models |
|---|---|---|
Target air volume |
The actual air supply volume required by the equipment |
Thin cabinets may limit air flow |
External static pressure |
Equipment internal air duct and air outlet resistance |
Changes in inlet conditions affect the operating point |
filter resistance |
Filter element grade and effective area |
Area is limited and resistance rises |
Input power |
Actual power under target operating conditions |
Thermal conditions affect power headroom |
For the calculation relationship between air volume and resistance, please refer toHow to calculate EFU rated air volume? The method in the air supply area, target wind speed and unit conversion method is to confirm the air volume of the 70mm model under the resistance condition of the whole machine.
The 70mm thickness compresses the internal space of the box. The motor and driver are closer and the heat dissipation area is smaller. During continuous operation, the temperature rise may be higher than that of conventional models. When selecting, confirm the temperature rise data of the motor and driver under the target operating conditions, and whether the box has a heat dissipation structure. If the temperature rise exceeds the limit, it may slow down the protection in the slightest, or affect the service life in the worst case.
Thermal items |
What should be confirmed |
FAQ |
|---|---|---|
Motor temperature rise |
Temperature rise record under continuous operation |
Only give short-term test data |
Drive cooling |
Driver installation location and heat dissipation method |
The drive is enclosed in a confined space |
Cabinet heat dissipation |
Whether there are heat dissipation holes or thermal conductive structures |
The box is fully enclosed and has no heat dissipation |
Speed reduction protection |
Protection logic during over-temperature |
No temperature protection |
In the 70mm ultra-thin EFU project, Aili Industrial checked the temperature rise of the motor and driver according to continuous operating conditions, and confirmed the heat dissipation conditions as part of the overall machine configuration, rather than just looking at the static thickness. For projects involving speed-regulated operation, please refer tothe DC speed regulating EFU equipment fan filter unit page.Control and heat dissipation instructions on
Which equipment the 70mm ultra-thin EFU is suitable for depends on the internal space and cleanliness requirements of the equipment. Semiconductor front-end equipment, EFEM, photolithography equipment, precision optical equipment, SMT placement machines, testing equipment, etc., which have compact internal spaces but have local cleanliness requirements for key areas, may all use 70mm ultra-thin EFU. Different equipment has different installation locations, target air volumes, and maintenance methods, as well as different configuration methods.
Device type |
Typical requirements |
70mm model focus points |
|---|---|---|
Semiconductor front-end equipment |
Wafer path partially cleaned |
Installation space and airflow boundaries |
EFEM |
Wafer transfer area protection |
Net height limit and control linkage |
Lithography equipment |
Optical path clean |
Wind speed stabilization and vibration control |
SMT placement machine |
Mounting area protection |
Compact space and accessible for maintenance |
Precision optical equipment |
Optical component protection |
Low vibration and temperature stable |
For EFU configuration methods of different devices, please refer toHow to configure the semiconductor front-end equipment EFU? the key points of clean areas, air volume filtration and equipment interfaces .Area division and interface confirmation ideas in
After the 70mm ultra-thin EFU is installed in the equipment, the filter needs to be replaced, the fan needs to be inspected, and the cables need to be plugged and unplugged. The box is thin, the internal space is tighter, and maintenance actions are more likely to be blocked by the structure. When selecting, reserve space according to the actual size of the maintenance operation, confirm from which direction the filter can be removed, whether tools can be inserted, and whether the wiring terminals are accessible.
Maintenance items |
What should be confirmed |
FAQ |
|---|---|---|
Filter disassembly and assembly |
Disassembly and assembly directions and required space |
To remove the filter, you need to remove other parts |
Fan maintenance |
Access opening location and tool space |
The fan cannot be removed individually |
Wiring accessible |
Terminal location and plug-in space |
Can't reach in when wiring |
cleaning channel |
Are internal cleaning tools accessible? |
The dust cannot be cleaned |
For projects with limited space, please refer toWhat should we pay attention to when maintaining the EFU space? the structural, electrical, debugging and rectification points , and confirm the maintenance path and installation location together.Check methods in
The thickness of 70mm limits the effective area of the filter. Under the same air volume, the wind speed increases, and the resistance and noise change. When selecting, recheck the filter grade, effective area, surface wind speed and resistance to confirm that the equipment cleanliness requirements can still be met under the target air volume. If only the filter model of the conventional model is applied, the surface wind speed may be too high or the resistance may exceed the limit.
Filter items |
What should be confirmed |
Impact on 70mm models |
|---|---|---|
Effective area |
Actual air outlet area of filter |
Wind speed increases on area-restricted surface |
filter level |
Efficiency requirements and resistance |
High-grade filter elements have greater resistance |
face wind speed |
Average surface wind speed at target air volume |
Too high affects uniformity and noise |
Sealing method |
Pressure method in thin box |
Space-restricted compression structure |
Regarding the relationship between face wind speed and protection effect, please refer toHow to calculate EFU surface wind speed? The calculation method in how to determine the effective filtration area and average wind speed is to check the filtration area and face wind speed of the 70mm model under the same caliber. Filter packages can be viewedthe HEPA vs. ULPA air filters page.Rating descriptions on
The 70mm ultra-thin EFU has a compact structure. New structure or new interface projects should be prototyped or first verified first. The prototype needs to check assembly interference, air volume, power, temperature rise, vibration and noise to confirm that the 70mm box does not deviate from the target performance. The prototype data and confirmation drawings are archived together as the basis for inspection of subsequent batches.
Verification items |
What should be recorded |
What it means for batch size |
|---|---|---|
Assembly inspection |
Hole location, sealing, maintenance space |
Confirm that the structure can be assembled |
Performance testing |
Air volume, static pressure, power, noise |
Confirm that the work point meets the standards |
Temperature rise test |
Continuous operation temperature rise |
Confirm that heat dissipation is feasible |
Vibration test |
Vibration status of 70mm cabinet |
Confirm that it does not affect the device |
In the 70mm ultra-thin EFU project, Aili Industrial organizes prototypes or first unit verification according to equipment drawings, files assembly, performance, temperature rise and vibration data together with confirmation drawings, and then solidifies batch configuration. Equipment factories complete prototypes and batches within the same manufacturing system, making it easier to maintain version consistency than cross-supplier coordination. Related machines can be referred tothe EFU equipment fan filter unit page.Structural description on
Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and complete machine assembly. The structure, power and filtration conditions of the 70mm ultra-thin model can be checked according to the equipment drawings within the same manufacturing system, eliminating the need to transfer parameters back and forth between the fan factory, filter factory and sheet metal factory. For equipment with limited space, Aili Industrial can organize prototype verification and batch curing according to the confirmation drawing, and put the thickness, air volume, heat dissipation and maintenance conditions into verifiable complete machine data. Related machines can be referred to70mm ultra-thin EFU page.Model description in the
First complete the preliminary screening of information, and then conduct technical confirmation on the model to be purchased. Include the size conditions, performance parameters, heat dissipation conditions, maintenance paths and filtering configurations in the supplementary list, and then organize the comparison after the supplier responds. The confirmed 70mm model, configuration and interface will be used for order execution, and regular model parameters cannot be used to replace this project data. Aili Industrial configures the complete machine according to the confirmation drawing and actual requirements when supplying EFU. Fans, filters, cabinets and controls correspond to the order list one by one, which facilitates the equipment factory to select the 70mm ultra-thin EFU based on the verifiable complete machine conditions.
You should avoid selecting a model based only on the thickness of 70mm. You should avoid using the air volume and static pressure data of conventional models. You should avoid ignoring the heat dissipation conditions of the thin box. You should avoid finding out after installing it that it cannot be removed for maintenance. You should avoid using the 70mm model based on the conventional filter area. The core of the 70mm ultra-thin EFU is not to compress the thickness, but to rematch the fan, filter, heat dissipation and maintenance conditions in a limited space. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the size, performance and maintenance conditions together.
It cannot be judged only by thickness. The actual capacity depends on the fan, air duct, filter resistance and allowable power.
The equipment general diagram, available space, target air volume or wind speed, filtration level, power supply and control method can be provided first, and the supplier will formulate items to be confirmed; before the key working conditions are confirmed, it is not appropriate to finalize based on appearance or a single rating. Aili Industrial can first form a to-be-confirmed list according to the equipment drawings, listing the size, performance and maintenance conditions together.
Prepare current project materials around space boundaries, entrance resistance, thermal dissipation and maintenance paths. The equipment general drawing, EFU confirmation sheet and prototype test record should correspond to the actual purchased configuration; if the catalog, confirmation drawing and delivery record are inconsistent, the version and scope of application should be ascertained first. When choosing a 70mm ultra-thin EFU, you can refer to the compact machine and interface supporting instructions provided by Aili Industry by model.
Related articles
Check items |
Confirm key points |
|---|---|
Dimensional conditions |
Clear height, installation path, air inlet clearance |
performance conditions |
Check the air volume and static pressure based on the 70mm complete machine data |
Heat dissipation conditions |
Motor and driver temperature rise |
maintenance conditions |
Detachable and accessible for wiring |
Prototype verification |
Assembly, performance, temperature rise, vibration |
Aili Industrial's EFU manufacturing system covers motors, fans, filters, sheet metal and complete machine assembly. The structure, power and filtration conditions of the 70mm ultra-thin model can be checked according to the equipment drawings within the same manufacturing system, eliminating the need to transfer parameters between multiple suppliers. Equipment manufacturers complete prototypes and batches of compact EFUs within the same system, making it easier to maintain version consistency than cross-supplier coordination.
learnAili Industrial EFU products and customized configurations , 70mm ultra-thin model can be viewed70mm ultra-thin EFU , filter package can be viewedHEPA and ULPA air filters . Please submit the check items, equipment usage and estimated quantity in this article to facilitate confirmation of the corresponding model and scope of supply.