Number of views: 8612 Author: Editor of this site Release time: 2026-08-13 Source: This site
When choosing EFU, many customers will first ask:
'How much air volume does this EFU have?'
But for device-side EFU, what really needs attention is not:
The bigger the air volume, the better.
Instead:
How much air does the EFU actually need to provide to meet the process and cleanliness requirements inside the equipment?
Because of different devices:
The installation space is different
Different air supply areas
Different target wind speeds
Filter resistance is different
The final required EFU air volume will also be different.
EFU air volume usually refers to the air volume flow rate that EFU can provide per unit time.
Common units include:
m³/h
as well as:
CFM
wait.
For example:
The rated air volume of an EFU is 1000m³/h
It means that its air delivery capacity reaches the corresponding level under the specified test conditions.
But after actually installing it on the device:
Actual air volume
Not necessarily equal to:
Product maximum air volume.
Because the internal structure, filters and air ducts of the equipment will affect the actual operating status.
Usually the following aspects can be considered:
How much air is needed to cover the target area?
What air speed is required in the process area?
Are there any air ducts, baffles or other resistance inside?
HEPA or ULPA will create some resistance.
Continuous operation or intermittent operation?
Different equipment has different requirements for air supply.
In some simple air supply scenarios, you can use:
Air volume = wind speed × effective air supply area
Make an estimate.
For example:
A certain device requires:
0.5m/s
target average wind speed,
The effective air supply area is:
1m²
Then the theoretical air flow:
Q = 0.5 × 1 = 0.5m³/s
Convert to hourly:
0.5 × 3600 = 1800m³/h
Therefore, the theoretical air volume is approximately:
1800m³/h.
But this is just a basic calculation.
Actual EFU selection also needs to consider:
filter resistance
Air duct resistance
airflow loss
as well as:
actual operating conditions.
Because EFU is not a simple 'fan'.
The complete system includes:
fan
↓
wind channel
↓
filter
↓
Equipment internal structure
Every step may cause resistance.
For example:
the fan ↓ produces air ↓ passes through the filter ↓ and generates resistance ↓ enters the inside of the equipment ↓ and is subject to structural resistance ↓ and finally forms the actual air supply
Therefore, when choosing EFU, you need to pay attention to:
Air volume
and:
static pressure.
This is a very important point in EFU selection.
Fan performance is usually not:
A fixed air volume.
Rather, it will be affected by system resistance.
Generally speaking:
Increased system resistance
↓
The fan operating point changes
↓
Actual air volume may decrease
So when choosing EFU, don’t just look at:
Maximum air volume.
Also need to see:
How much air volume can be provided under the actual system static pressure.
meeting.
Both HEPA and ULPA filters create some resistance.
Filter's:
Filtration efficiency
area
structure
Use status
will affect resistance.
For example, after the filter gradually accumulates dust:
increased resistance
May cause:
System operating point changes.
Therefore, the filter resistance needs to be included in the fan selection when designing the EFU.
uncertain.
If the device only needs:
800m³/h
However, choosing a system that significantly exceeds actual needs may lead to:
Wind speed is too high
increased noise
Increased energy consumption
even:
Affects the airflow inside the device.
Therefore, a more reasonable idea is:
Select the appropriate air volume while meeting the equipment requirements.
If the EFU air volume is insufficient, it may not be able to meet the air supply requirements of the target area.
For example:
Target air volume is insufficient
↓
Insufficient air coverage in target area
↓
Actual cleaning results may be affected
Therefore, it is also inappropriate if the air volume is too small.
Ultimately you need to find:
Meet requirements + operate reasonably
working point.
Simply put:
Air volume
represent:
How much air is delivered per unit time.
and:
wind speed
represent:
The speed at which air moves.
The two are related, but not identical.
For example, with the same air volume, if:
Different air outlet areas
Finally got:
wind speed
It will also be different.
Therefore, when designing the device-side EFU, it is usually necessary to clarify at the same time:
Target air volume
and:
Target wind speed.
Semiconductor equipment usually cannot be simply calculated based on the volume of the equipment.
Also consider:
clean area
target wind speed
Airflow direction
Equipment internal structure
as well as:
Craft area.
In particular, certain devices are more concerned about:
Wind speed uniformity.
Therefore, airflow analysis and EFU matching need to be performed based on the actual equipment structure.
Some lithium battery equipment may pay more attention to:
Air volume
as well as:
Wind speed.
For example, when the process area requires a higher air flow rate, you need to choose the corresponding:
Air volume and static pressure capacity
EFU.
If needed:
high wind speed
Then it cannot be solved by just selecting the ordinary standard EFU, and it needs to be matched again:
fan
and:
motor.
The EFU air volume of photovoltaic equipment also needs to be combined with:
device space
Target air supply area
Cleanliness requirements
as well as:
Process requirements
Sure.
If the internal space of the equipment is relatively large or the air supply distance is long, you also need to consider:
Air duct resistance
and:
Actual working point.
The panel shows that there may be large equipment spaces and different process areas inside the equipment.
Therefore it is necessary to:
Actual air supply area
as well as:
target wind speed
Determine the EFU air volume.
If multiple EFUs are required to supply air in a coordinated manner, further considerations are required:
Air volume balance between multiple EFUs.
It can be determined according to the specific design.
But the difficulty with ultra-thin EFU is:
Installation space becomes smaller
and:
Fans, motors, filters and airflow channels still need to meet performance requirements.
So a more refined approach is needed:
Fan design
Motor matching
as well as:
Air flow structure design.
For example, Aili Industrial's ultra-thin EFU can be designed according to the height restrictions of the equipment.
Can.
If the EFU is equipped with an adjustable speed motor and control system, the operating status can be adjusted according to equipment needs.
For example:
Low speed operation
↓
Medium speed operation
↓
High speed operation
Different running speeds correspond to different:
Air volume
and:
energy consumption.
Therefore, appropriate operating parameters can be set according to the equipment process requirements.
Control system design can be carried out according to project requirements.
For example:
the device is on standby ↓ EFU runs at low speed ↓ The device starts ↓ EFU increases the running speed ↓ The device stops ↓ EFU reduces the running speed
If necessary, you can also combine:
PLC
sensor
as well as:
Communication interface
Realize device linkage.
When designing EFU, Aili Industrial does not just select products based on an air volume number.
Usually a combination of:
Equipment installation space
Target air volume
target wind speed
filter resistance
System static pressure
as well as:
control method.
Then proceed:
Motor + fan + filter + air flow structure
match.
The EFU designed in this way is more in line with the actual operating requirements of specific equipment.
High air volume scheme design can be carried out according to project requirements.
If the device requires:
Higher air volume
or:
higher wind speed
You need to reconsider:
Fan performance
Motor power
filter area
as well as:
Internal airflow structure.
Aili Industrial has independent R&D and manufacturing capabilities for motors, fans and control systems, which can be matched to specific needs.
If the customer does not know how much air volume to choose, he or she can provide:
Equipment internal dimensions
Installation space
Target air supply area
target wind speed
Target air volume
filter requirements
How the equipment operates
as well as:
3D drawings or site photos.
The manufacturer's solution analysis based on these data will be more accurate than if the customer directly purchases an EFU with a standard air volume.
You can follow the following logic:
Determine the air supply area
↓
Determine target wind speed
↓
Calculate basic air volume
↓
Determine filter resistance
↓
Calculate system resistance
↓
Determine the fan operating point
↓
Matching motor
↓
Determine the control method
↓
Test actual operation effect
This is a relatively complete EFU air volume determination process.
Aili Industrial owns:
motor
fan
filter
Automatic control system software and hardware
sheet metal
as well as:
Whole machine assembly
etc. production capacity.
Therefore, the EFU requirements of different devices can be matched starting from the core components.
For example:
Normal air volume
High air volume
high wind speed
Ultra-thin structure
as well as:
Special installation space
All can be designed according to actual projects.
There is no unified fixed value and it needs to be determined based on the equipment air supply area, target wind speed, filter resistance and system structure.
Under basic circumstances, air volume = wind speed × effective air supply area can be used for estimation. Actual selection also needs to consider system resistance and filter resistance.
no. Excessive air volume may lead to higher wind speed, noise and energy consumption, and should be selected based on the actual needs of the equipment.
The air volume represents the amount of air transported per unit time, and the wind speed represents the air movement speed. The two are related but not the same parameter.
meeting. The filter will produce a certain amount of resistance, so the filter resistance needs to be considered when selecting an EFU fan.
If equipped with an adjustable speed motor and corresponding control system, the EFU operating status can be adjusted according to the equipment operation requirements.
Fans, motors, filters and airflow structures can be matched according to specific equipment needs to form a corresponding high air volume solution.
EFU solutions can be matched based on equipment size, installation space, target wind speed, air volume, filters and control requirements.