How to choose 70mm ultra-thin EFU? Semiconductor equipment space, air volume and maintenance conditions
Direct answer: '70mm' for 70mm ultra-thin EFU should be understood as the overall height requirement of the entire machine. It mainly solves the problem that regular EFU cannot be placed on top or inside the device. Since the internal airflow channel is more compact, the matching of fans, filters, boxes and control components is more sensitive than conventional height products, so both space and performance must be considered when selecting.
Confirm which installation standard the 70mm limit corresponds to
Equipment drawings should specify the allowable height from the mounting surface to the highest point, and check whether fasteners, connectors, cable bends and upper covers occupy space. If only nominal heights are reserved, installation or maintenance may still be impossible on site.
Under ultra-thin structure, first check the air volume and static pressure
Lowering the height compresses the fan inlet, the static pressure area in front of the filter, and the internal flow space. The higher the target air volume, the more attention needs to be paid to inlet conditions, local flow velocities, pressure losses and noise. The test results of the whole machine under the agreed filter and actual resistance should prevail.
Semiconductor equipment pays more attention to wind speed uniformity
The clean air supply at the equipment end must not only have a total air volume, but also provide stable and uniform air to key process areas. The number of measurement points, measurement plane, uniformity determination method and internal occlusion conditions of the equipment should be clearly defined.
Filter thickness and efficiency need to be selected simultaneously
Ultra-thin EFU can be configured with filters of different efficiencies and structures, but the filter thickness, resistance, effective area and sealing method will all occupy internal space. Efficiency selection should be subject to process objectives and matched with fan residual pressure.
Maintenance methods determine whether it can be used for a long time
During the equipment integration stage, it is necessary to determine whether the filter and fan should be accessed from above, below or from the side. Equipment shutdown conditions, personnel operating space and seal inspection after replacement should also be considered to avoid products that can be installed but cannot be maintained.
FAQ
Is 70mm the cabinet height or the overall height?
In the related plans of Aili Industry, 70mm is the height of the box and the overall height is 100mm. The specific interfaces and protruding parts still need to be checked according to the confirmation drawing.
Is prototype testing required for ultra-thin EFU?
For high air volume, high uniformity or special interface projects, it is recommended to confirm the overall machine performance and equipment suitability through a prototype.
How does Aili Industry cooperate with equipment-side EFU projects?
Aili Industry carries out R&D and production around EFU complete machines, fans and motors, control systems, sheet metal structures and air filters. For equipment-side projects, configuration can be carried out based on equipment drawings, target air volume, static pressure, filtration efficiency, installation interface and control logic. When it comes to ultra-thin, small size or special interfaces, it is recommended to confirm the drawings and agreed working conditions first, and then test the curing parameters through the prototype so that the configuration can be consistent in subsequent mass production.
During project consultation, the available internal length, width and height of the equipment, target cleanliness, air supply area, air volume or wind speed requirements, filtration efficiency, power supply and communication methods can be provided to facilitate quick judgment of whether standard products are suitable or whether non-standard design is required.
Related content
EFU FAQ and technical support EFU equipment fan filter unit 70mm ultra-thin EFU
Conclusion: The 70mm ultra-thin EFU is suitable for equipment-side applications with limited top space, but the selection cannot only confirm the height. It is also necessary to check the air inlet conditions, effective filter area, target air volume, static pressure, uniformity, wiring and maintenance direction.
