How to divide the chemical filtration solution of the wafer factory into fresh air and circulating air?
The fab chemical filtration plan should distinguish between pollution brought by fresh air and molecular pollution in indoor circulation, and then determine the responsibilities of MAU, circulation filtration and equipment-side protection. The two air paths cannot simply substitute for each other.
Fresh air section control external input
Inlet gas and seasonal changes determine the need for fresh air filtration. The main target, load and air treatment process should be confirmed to avoid bringing in external air before local remediation.
Loop segments focus on internal sources
Materials, equipment and operations may continuously release gases. Local exhaust and circulation treatment need to be coordinated, and strong release cannot only rely on room return air dilution.
Check equipment area individually
Different devices may have different sensitivities and microenvironmental requirements. Corresponding detection points and maintenance targets should be set, and total return air readings should not be used to represent all critical locations.
Project judgment example
When the fresh air gas has dropped but there are still changes in a certain equipment area, the internal source can be investigated and local circulation filtration can be evaluated again.
Selection check points
Write the following four items into the evaluation record to facilitate product comparison, trial and subsequent review using the same conditions.
| for inspection items | Confirm key points | for inspection items | Confirm key points |
|---|---|---|---|
| external input | Check MAU entrance | internal release | Investigate equipment and materials |
| cycle path | Determine the scope of processing | critical area | Independently verify microenvironments |
Aili Industrial products and equipment supporting
Aili Industrial provides MAU box-type chemical filters and related clean air equipment. For fresh air or air handling unit projects, the inlet gas, air volume, filter section location and replacement space should be checked at the same time, and the division of labor between particle pre-filtration and gas-phase filtration should be clarified. Aili Industrial's R&D and production of motors and fans, control systems, sheet metal, filters and complete machine assembly capabilities can be used to configure the connection between the filter section and the air supply equipment; the specific gas applicability and performance still need to be confirmed based on the model, filter material and usage conditions.
Related products:MAU box type chemical filter ; more plans can be viewedChemical filter series . First clarify the pollution and protection goals → then check the product conditions → finally verify the on-site effect.
Summary
The fab chemical filtration plan should distinguish between pollution brought by fresh air and molecular pollution in indoor circulation, and then determine the responsibilities of MAU, circulation filtration and equipment-side protection. The two air paths cannot simply substitute for each other.
